Shinya EBATA

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,365,987
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for cleaning reaction vessel for processing su...
- Patent number 12,139,787
- Issue date Nov 12, 2024
- Kokusai Electric Corporation
- Shinya Ebata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning member in process container, method of manufactu...
- Patent number 12,053,805
- Issue date Aug 6, 2024
- Kokusai Electric Corporation
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,591,694
- Issue date Feb 28, 2023
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,170,995
- Issue date Nov 9, 2021
- Kokusai Electric Corporation
- Shinya Ebata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inlet liner for substrate processing apparatus
- Patent number D925481
- Issue date Jul 20, 2021
- Kokusai Electric Corporation
- Toru Kagaya
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,907,253
- Issue date Feb 2, 2021
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas nozzle for substrate processing apparatus
- Patent number D889596
- Issue date Jul 7, 2020
- Kokusai Electric Corporation
- Yusaku Okajima
- D23 - Environmental heating and cooling
Information Patent Grant
Gas nozzle for substrate processing apparatus
- Patent number D888196
- Issue date Jun 23, 2020
- Kokusai Electric Corporation
- Yusaku Okajima
- D23 - Environmental heating and cooling
Information Patent Grant
Reaction tube
- Patent number D853979
- Issue date Jul 16, 2019
- Kokusai Electric Corporation
- Toru Kagaya
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Method of manufacturing semiconductor device by alternatively incre...
- Patent number 9,508,531
- Issue date Nov 29, 2016
- Hitachi Kokusai Electric Inc.
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, METHOD OF MANUFACT...
- Publication number 20250115993
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240425972
- Publication date Dec 26, 2024
- Kokusai Electric Corporation
- Tomoya NAGAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20240359218
- Publication date Oct 31, 2024
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230115403
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20220301852
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Shinya EBATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20210115563
- Publication date Apr 22, 2021
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20210087678
- Publication date Mar 25, 2021
- Kokusai Electric Corporation
- Shinya EBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200098555
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Shinya EBATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20190255576
- Publication date Aug 22, 2019
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190112710
- Publication date Apr 18, 2019
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150087159
- Publication date Mar 26, 2015
- Hitachi Kokusai Electric Inc.
- Koei KURIBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS

Shinya EBATA

Person

Patents Grantslast 30 patents

Method of processing substrate, method of manufacturing semiconduct...

Apparatus and method for cleaning reaction vessel for processing su...

Method of cleaning member in process container, method of manufactu...

Method of manufacturing semiconductor device, method of processing...

Method of manufacturing semiconductor device, substrate processing...

Inlet liner for substrate processing apparatus

Method of manufacturing semiconductor device, substrate processing...

Gas nozzle for substrate processing apparatus

Gas nozzle for substrate processing apparatus

Reaction tube

Method of manufacturing semiconductor device by alternatively incre...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, METHOD OF MANUFACT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...