Shotaro Okabe

Person

Nara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming deposited film and photovoltaic element
- Patent number 7,501,305
- Issue date Mar 10, 2009
- Canon Kabushiki Kaisha
- Yasuyoshi Takai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust processing method, plasma processing method and plasma proc...
- Patent number 7,211,708
- Issue date May 1, 2007
- Canon Kabushiki Kaisha
- Takeshi Shishido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon-based thin film, silicon-based thin film,...
- Patent number 7,074,641
- Issue date Jul 11, 2006
- Canon Kabushiki Kaisha
- Takaharu Kondo
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus for forming deposited film
- Patent number 6,877,458
- Issue date Apr 12, 2005
- Canon Kabushiki Kaisha
- Hiroyuki Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor element, and method of forming silicon-based film
- Patent number 6,858,308
- Issue date Feb 22, 2005
- Canon Kabushiki Kaisha
- Takaharu Kondo
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Process for forming a silicon-based film on a substrate using a tem...
- Patent number 6,794,275
- Issue date Sep 21, 2004
- Canon Kabushiki Kaisha
- Takaharu Kondo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus for manufacturing thin film
- Patent number 6,530,341
- Issue date Mar 11, 2003
- Canon Kabushiki Kaisha
- Yuzo Kohda
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Process for producing a semiconductor device
- Patent number 6,495,392
- Issue date Dec 17, 2002
- Canon Kabushiki Kaisha
- Akira Sakai
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Fabrication of photovoltaic cell by plasma process
- Patent number 6,472,296
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for forming a deposited film on a substrate
- Patent number 6,436,797
- Issue date Aug 20, 2002
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming non-single-crystal semiconductor thin film, and...
- Patent number 6,399,411
- Issue date Jun 4, 2002
- Canon Kabushiki Kaisha
- Tadashi Hori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing photovoltaic element and apparatus therefor
- Patent number 6,368,944
- Issue date Apr 9, 2002
- Canon Kabushiki Kaisha
- Shotaro Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,313,430
- Issue date Nov 6, 2001
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Deposition of semiconductor layer by plasma process
- Patent number 6,287,943
- Issue date Sep 11, 2001
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing semiconductor element using non-monocryst...
- Patent number 6,271,055
- Issue date Aug 7, 2001
- Canon Kabushiki Kaisha
- Takahiro Yajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photovoltaic element
- Patent number 6,162,988
- Issue date Dec 19, 2000
- Canon Kabushiki Kaisha
- Shotaro Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for forming non-single-crystal semiconductor thin film, m...
- Patent number 6,159,300
- Issue date Dec 12, 2000
- Canon Kabushiki Kaisha
- Tadashi Hori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for forming semiconductor thin film, and method a...
- Patent number 6,159,763
- Issue date Dec 12, 2000
- Canon Kabushiki Kaisha
- Akira Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposited-film-forming apparatus
- Patent number 6,153,013
- Issue date Nov 28, 2000
- Canon Kabushiki Kaisha
- Akira Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous forming method for functional deposited films and deposi...
- Patent number 5,968,274
- Issue date Oct 19, 1999
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous forming method for functional deposited films
- Patent number 5,946,587
- Issue date Aug 31, 1999
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing thin film
- Patent number 5,927,994
- Issue date Jul 27, 1999
- Canon Kabushiki Kaisha
- Yuzo Kohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuously film-forming apparatus provided with improved gas gate...
- Patent number 5,919,310
- Issue date Jul 6, 1999
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing photoelectric conversion element
- Patent number 5,897,332
- Issue date Apr 27, 1999
- Canon Kabushiki Kaisha
- Tadashi Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photovoltaic device
- Patent number 5,769,963
- Issue date Jun 23, 1998
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photovoltaic element and fabrication process thereof
- Patent number 5,720,826
- Issue date Feb 24, 1998
- Canon Kabushiki Kaisha
- Ryo Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photovoltaic elements and process and apparatus for their formation
- Patent number 5,589,007
- Issue date Dec 31, 1996
- Canon Kabushiki Kaisha
- Yasushi Fujioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma chemical vapor deposition apparatus with magnet on...
- Patent number 4,913,928
- Issue date Apr 3, 1990
- Canon Kabushiki Kaisha
- Satoshi Sugita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition film forming apparatus
- Patent number 4,599,971
- Issue date Jul 15, 1986
- Canon Kabushiki Kaisha
- Yasutomo Fujiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma vapor deposition film forming apparatus
- Patent number 4,545,328
- Issue date Oct 8, 1985
- Canon Kabushiki Kaisha
- Yasutomo Fujiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...
- Publication number 20090145555
- Publication date Jun 11, 2009
- Canon Kabushiki Kaisha
- TADASHI SAWAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...
- Publication number 20090114155
- Publication date May 7, 2009
- Canon Kabushiki Kaisha
- TADASHI SAWAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...
- Publication number 20090095420
- Publication date Apr 16, 2009
- Canon Kabushiki Kaisha
- TADASHI SAWAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...
- Publication number 20090084500
- Publication date Apr 2, 2009
- Canon Kabushiki Kaisha
- TADASHI SAWAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING DEPOSITED FILM AND PHOTOVOLTAIC ELEMENT
- Publication number 20080096305
- Publication date Apr 24, 2008
- Canon Kabushiki Kaisha
- Yasuyoshi Takai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...
- Publication number 20080014345
- Publication date Jan 17, 2008
- Canon Kabushiki Kaisha
- TADASHI SAWAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST PROCESSING METHOD, PLASMA PROCESSING METHOD AND PLASMA PROC...
- Publication number 20070169890
- Publication date Jul 26, 2007
- Canon Kabushiki Kaisha
- TAKESHI SHISHIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming silicon-based thin film, silicon-based thin film,...
- Publication number 20050227457
- Publication date Oct 13, 2005
- Takaharu Kondo
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus for manufacturing photovoltaic elements
- Publication number 20050161077
- Publication date Jul 28, 2005
- Canon Kabushiki Kaisha
- Shotaro Okabe
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Processing apparatus, exhaust processing process and plasma process...
- Publication number 20040161533
- Publication date Aug 19, 2004
- TADASHI SAWAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and process for forming deposited film
- Publication number 20040011290
- Publication date Jan 22, 2004
- Takaharu Kondo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING
- Publication number 20030164225
- Publication date Sep 4, 2003
- TADASHI SAWAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing photovoltaic element and apparatus therefor
- Publication number 20030124819
- Publication date Jul 3, 2003
- Shotaro Okabe
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Silicon film, semiconductor device, and process for forming silicon...
- Publication number 20030104664
- Publication date Jun 5, 2003
- Takaharu Kondo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor element, and method of forming silicon-based film
- Publication number 20030075717
- Publication date Apr 24, 2003
- Takaharu Kondo
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Production apparatus of semiconductor layer employing DC bias and V...
- Publication number 20030022519
- Publication date Jan 30, 2003
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing a semiconductor device
- Publication number 20020016017
- Publication date Feb 7, 2002
- Akira Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exhaust processing method, plasma processing method and plasma proc...
- Publication number 20020006477
- Publication date Jan 17, 2002
- Takeshi Shishido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Production process of semiconductor layer, fabrication process of p...
- Publication number 20020001924
- Publication date Jan 3, 2002
- Yasushi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for forming deposited film
- Publication number 20010039924
- Publication date Nov 15, 2001
- Hiroyuki Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shotaro Okabe

Person

Patents Grantslast 30 patents

Method for forming deposited film and photovoltaic element

Exhaust processing method, plasma processing method and plasma proc...

Method of forming silicon-based thin film, silicon-based thin film,...

Apparatus for forming deposited film

Semiconductor element, and method of forming silicon-based film

Process for forming a silicon-based film on a substrate using a tem...

Deposition apparatus for manufacturing thin film

Process for producing a semiconductor device

Fabrication of photovoltaic cell by plasma process

Apparatus and method for forming a deposited film on a substrate

Method for forming non-single-crystal semiconductor thin film, and...

Method of manufacturing photovoltaic element and apparatus therefor

Plasma processing apparatus and plasma processing method

Deposition of semiconductor layer by plasma process

Process for manufacturing semiconductor element using non-monocryst...

Photovoltaic element

Apparatus for forming non-single-crystal semiconductor thin film, m...

Method and device for forming semiconductor thin film, and method a...

Deposited-film-forming apparatus

Continuous forming method for functional deposited films and deposi...

Continuous forming method for functional deposited films

Method for manufacturing thin film

Continuously film-forming apparatus provided with improved gas gate...

Method for manufacturing photoelectric conversion element

Photovoltaic device

Photovoltaic element and fabrication process thereof

Photovoltaic elements and process and apparatus for their formation

Microwave plasma chemical vapor deposition apparatus with magnet on...

Vapor deposition film forming apparatus

Plasma vapor deposition film forming apparatus

Patents Applicationslast 30 patents

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...

METHOD FOR FORMING DEPOSITED FILM AND PHOTOVOLTAIC ELEMENT

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESS...

EXHAUST PROCESSING METHOD, PLASMA PROCESSING METHOD AND PLASMA PROC...

Method of forming silicon-based thin film, silicon-based thin film,...

Apparatus for manufacturing photovoltaic elements

Processing apparatus, exhaust processing process and plasma process...

Apparatus and process for forming deposited film

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING

Method of manufacturing photovoltaic element and apparatus therefor

Silicon film, semiconductor device, and process for forming silicon...

Semiconductor element, and method of forming silicon-based film

Production apparatus of semiconductor layer employing DC bias and V...

Process for producing a semiconductor device

Exhaust processing method, plasma processing method and plasma proc...

Production process of semiconductor layer, fabrication process of p...

Apparatus for forming deposited film