Shouichi Terada

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 8,864,933
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,192,796
- Issue date Jun 5, 2012
- Tokyo Electron Limited
- Hiroshi Shinya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and computer storage medium
- Patent number 8,084,372
- Issue date Dec 27, 2011
- Tokyo Electron Limited
- Gen You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 7,968,468
- Issue date Jun 28, 2011
- Tokyo Electron Limited
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming thin film and film-forming device
- Patent number 7,926,444
- Issue date Apr 19, 2011
- Tokyo Electron Limited
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and program
- Patent number 7,910,157
- Issue date Mar 22, 2011
- Tokyo Electron Limited
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,757,626
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Hiroshi Shinya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for forming thin film and film-forming device
- Patent number 7,757,625
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization apparatus
- Patent number 7,416,474
- Issue date Aug 26, 2008
- Tokyo Electron Limited
- Shouichi Terada
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid processing apparatus processing a substrate surface with a p...
- Patent number 7,316,515
- Issue date Jan 8, 2008
- Tokyo Electron Limited
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20110030897
- Publication date Feb 10, 2011
- TOKYO ELECTRON LIMITED
- Shouichi TERADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100221436
- Publication date Sep 2, 2010
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20090053904
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Gen You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20080008835
- Publication date Jan 10, 2008
- TOKYO ELECTRON LIMITED
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION APPARATUS
- Publication number 20070224918
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Shouichi Terada
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND PROGRAM
- Publication number 20070150112
- Publication date Jun 28, 2007
- TOKYO ELECTRON LIMITED
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming thin film and film-forming device
- Publication number 20070116881
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming thin film and film-forming device
- Publication number 20070098901
- Publication date May 3, 2007
- TOKYO ELECTRON LIMITED
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20070048449
- Publication date Mar 1, 2007
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus processing a substrate surface with a p...
- Publication number 20060029388
- Publication date Feb 9, 2006
- TOKYO ELECTRON LIMITED
- Shouichi Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film removing apparatus, film removing method and substrate process...
- Publication number 20040197433
- Publication date Oct 7, 2004
- Shouichi Terada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Shouichi Terada

Person

Patents Grantslast 30 patents

Substrate treatment apparatus and substrate treatment method

Substrate processing apparatus and substrate processing method

Substrate processing method and computer storage medium

Substrate treatment apparatus and substrate treatment method

Method for forming thin film and film-forming device

Substrate processing method and program

Substrate processing apparatus and substrate processing method

Method for forming thin film and film-forming device

Planarization apparatus

Liquid processing apparatus processing a substrate surface with a p...

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

PLANARIZATION APPARATUS

SUBSTRATE PROCESSING METHOD AND PROGRAM

Method for forming thin film and film-forming device

Method for forming thin film and film-forming device

Substrate processing apparatus and substrate processing method

Liquid processing apparatus processing a substrate surface with a p...

Film removing apparatus, film removing method and substrate process...