Shuichi Yabu

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Image processing device and method for design
- Patent number 7,777,762
- Issue date Aug 17, 2010
- Canon Kabushiki Kaisha
- Yasuo Katano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Birefringence measurement apparatus and method
- Patent number 6,947,140
- Issue date Sep 20, 2005
- Canon Kabushiki Kaisha
- Shuichi Yabu
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus, gas replacing method, and method of manufacturi...
- Patent number 6,873,397
- Issue date Mar 29, 2005
- Canon Kabushiki Kaisha
- Shuichi Yabu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, and exposure apparatus and device manufacturing me...
- Patent number 6,414,742
- Issue date Jul 2, 2002
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system and exposure apparatus with the same
- Patent number 6,226,072
- Issue date May 1, 2001
- Canon Kabushiki Kaisha
- Shuichi Yabu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system and exposure apparatus using the same
- Patent number 6,157,159
- Issue date Dec 5, 2000
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection apparatus
- Patent number 4,998,821
- Issue date Mar 12, 1991
- Canon Kabushiki Kaisha
- Masakatsu Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,907,021
- Issue date Mar 6, 1990
- Canon Kabushiki Kaisha
- Shuichi Yabu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plate-like article holding device
- Patent number 4,869,481
- Issue date Sep 26, 1989
- Canon Kabushiki Kaisha
- Shuichi Yabu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Exposure apparatus having gas supplying means for air blow off
- Patent number 4,814,625
- Issue date Mar 21, 1989
- Canon Kabushiki Kaisha
- Shuichi Yabu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,786,947
- Issue date Nov 22, 1988
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for aligning objects
- Patent number 4,662,753
- Issue date May 5, 1987
- Canon Kabushiki Kaisha
- Shuichi Yabu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transfer apparatus provided with an auto-focusing mechanism
- Patent number 4,506,977
- Issue date Mar 26, 1985
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G02 - OPTICS
Information Patent Grant
Mask aligner
- Patent number 4,479,711
- Issue date Oct 30, 1984
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MASK FILM FORMATION METHOD AND MASK FILM FORMATION APPARATUS
- Publication number 20070184195
- Publication date Aug 9, 2007
- Canon Kabushiki Kaisha
- Hideyuki Hatakeyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Image processing device and method for design
- Publication number 20070024610
- Publication date Feb 1, 2007
- Canon Kabushiki Kaisha
- Yasuo Katano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
STAGE APPARATUS, AND EXPOSURE APPARATUS AND DEVICE MANUFACTURING ME...
- Publication number 20020021423
- Publication date Feb 21, 2002
- NOBUSHIGE KORENAGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage system in projection exposure apparatus
- Publication number 20010006422
- Publication date Jul 5, 2001
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shuichi Yabu

Person

Patents Grantslast 30 patents

Image processing device and method for design

Birefringence measurement apparatus and method

Exposure apparatus, gas replacing method, and method of manufacturi...

Stage apparatus, and exposure apparatus and device manufacturing me...

Stage system and exposure apparatus with the same

Stage system and exposure apparatus using the same

Projection apparatus

Projection exposure apparatus

Plate-like article holding device

Exposure apparatus having gas supplying means for air blow off

Projection exposure apparatus

Apparatus and method for aligning objects

Transfer apparatus provided with an auto-focusing mechanism

Mask aligner

Patents Applicationslast 30 patents

MASK FILM FORMATION METHOD AND MASK FILM FORMATION APPARATUS

Image processing device and method for design

STAGE APPARATUS, AND EXPOSURE APPARATUS AND DEVICE MANUFACTURING ME...

Stage system in projection exposure apparatus