Siew Neo

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-layer polishing pad for low-pressure polishing
- Patent number 8,066,552
- Issue date Nov 29, 2011
- Applied Materials, Inc.
- Alain Duboust
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint for electroprocessing
- Patent number 7,790,015
- Issue date Sep 7, 2010
- Applied Materials, Inc.
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for electrochemical mechanical processing
- Patent number 7,678,245
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Algorithm for real-time process control of electro-polishing
- Patent number 7,628,905
- Issue date Dec 8, 2009
- Applied Materials, Inc.
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 7,422,516
- Issue date Sep 9, 2008
- Applied Materials, Inc.
- Paul D. Butterfield
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrolyte with good planarization capability, high removal rate a...
- Patent number 7,384,534
- Issue date Jun 10, 2008
- Applied Materials, Inc.
- Lizhong Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 7,278,911
- Issue date Oct 9, 2007
- Applied Materials, Inc.
- Paul D. Butterfield
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and composition for polishing a substrate
- Patent number 7,232,514
- Issue date Jun 19, 2007
- Applied Materials, Inc.
- Feng Q. Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hydrogen bubble reduction on the cathode using double-cell designs
- Patent number 7,229,535
- Issue date Jun 12, 2007
- Applied Materials, Inc.
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 7,207,878
- Issue date Apr 24, 2007
- Applied Materials, Inc.
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and composition for polishing a substrate
- Patent number 7,160,432
- Issue date Jan 9, 2007
- Applied Materials, Inc.
- Feng Q. Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and composition for polishing a substrate
- Patent number 7,128,825
- Issue date Oct 31, 2006
- Applied Materials, Inc.
- Feng Q. Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Algorithm for real-time process control of electro-polishing
- Patent number 7,112,270
- Issue date Sep 26, 2006
- Applied Materials, Inc.
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 6,991,528
- Issue date Jan 31, 2006
- Applied Materials, Inc.
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control of removal profile in electrochemically assisted CMP
- Patent number 6,991,526
- Issue date Jan 31, 2006
- Applied Materials, Inc.
- Lizhong Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 6,962,524
- Issue date Nov 8, 2005
- Applied Materials, Inc.
- Paul D. Butterfield
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrolyte composition and treatment for electrolytic chemical mec...
- Patent number 6,899,804
- Issue date May 31, 2005
- Applied Materials, Inc.
- Alain Duboust
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrolyte with good planarization capability, high removal rate a...
- Patent number 6,863,797
- Issue date Mar 8, 2005
- Applied Materials, Inc.
- Lizhong Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Endpoint detection for electro chemical mechanical polishing and el...
- Patent number 6,837,983
- Issue date Jan 4, 2005
- Applied Materials, Inc.
- Alain Duboust
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for face-up substrate polishing
- Patent number 6,776,693
- Issue date Aug 17, 2004
- Applied Materials Inc.
- Alain Duboust
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
POLISHING PAD WITH PROJECTING PORTION
- Publication number 20100267318
- Publication date Oct 21, 2010
- Alain Duboust
- B24 - GRINDING POLISHING
Information Patent Application
ENDPOINT FOR ELECTROPROCESSING
- Publication number 20080051009
- Publication date Feb 28, 2008
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONDUCTIVE POLISHING ARTICLE FOR ELECTROCHEMICAL MECHANICAL POLISHING
- Publication number 20080026681
- Publication date Jan 31, 2008
- PAUL D. BUTTERFIELD
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND COMPOSITION FOR POLISHING A SUBSTRATE
- Publication number 20070295611
- Publication date Dec 27, 2007
- FENG Q. LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Algorithm for real-time process control of electro-polishing
- Publication number 20060237330
- Publication date Oct 26, 2006
- APPLIED MATERIALS, INC.
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ALGORITHM FOR REAL-TIME PROCESS CONTROL OF ELECTRO-POLISHING
- Publication number 20060163074
- Publication date Jul 27, 2006
- APPLIED MATERIALS, INC.
- Antoine P. Manens
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Conductive polishing article for electrochemical mechanical polishing
- Publication number 20050284770
- Publication date Dec 29, 2005
- APPLIED MATERIALS, INC.
- Paul D. Butterfield
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Multi-layer polishing pad for low-pressure polishing
- Publication number 20050221723
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Alain Duboust
- B24 - GRINDING POLISHING
Information Patent Application
Electrolyte with good planarization capability, high removal rate a...
- Publication number 20050145507
- Publication date Jul 7, 2005
- APPLIED MATERIALS, INC.
- Lizhong Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Conductive polishing article for electrochemical mechanical polishing
- Publication number 20050133363
- Publication date Jun 23, 2005
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Endpoint compensation in electroprocessing
- Publication number 20050061674
- Publication date Mar 24, 2005
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for electrochemical mechanical processing
- Publication number 20050000801
- Publication date Jan 6, 2005
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Conductive polishing article for electrochemical mechanical polishing
- Publication number 20040082289
- Publication date Apr 29, 2004
- Paul D. Butterfield
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Effective method to improve surface finish in electrochemically ass...
- Publication number 20040072445
- Publication date Apr 15, 2004
- APPLIED MATERIALS, INC.
- Lizhong Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Control of removal profile in electrochemically assisted CMP
- Publication number 20040053560
- Publication date Mar 18, 2004
- Lizhong Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and composition for polishing a substrate
- Publication number 20040053499
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Feng Q. Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Conductive polishing article for electrochemical mechanical polishing
- Publication number 20040023610
- Publication date Feb 5, 2004
- APPLIED MATERIALS, INC.
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and composition for polishing a substrate
- Publication number 20030234184
- Publication date Dec 25, 2003
- APPLIED MATERIALS, INC.
- Feng Q. Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Hydrogen bubble reduction on the cathode using double-cell designs
- Publication number 20030216045
- Publication date Nov 20, 2003
- APPLIED MATERIALS, INC.
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and composition for polishing a substrate
- Publication number 20030178320
- Publication date Sep 25, 2003
- APPLIED MATERIALS, INC.
- Feng Q. Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Endpoint detection for electro chemical mechanical polishing and el...
- Publication number 20030136684
- Publication date Jul 24, 2003
- APPLIED MATERIALS, INC.
- Alain Duboust
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolyte composition and treatment for electrolytic chemical mec...
- Publication number 20030116446
- Publication date Jun 26, 2003
- Alain Duboust
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolyte with good planarization capability, high removal rate a...
- Publication number 20030116445
- Publication date Jun 26, 2003
- APPLIED MATERIALS, INC.
- Lizhong Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for face-up substrate polishing
- Publication number 20030114087
- Publication date Jun 19, 2003
- APPLIED MATERIALS, INC.
- Alain Duboust
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Person

Patents Grantslast 30 patents

Multi-layer polishing pad for low-pressure polishing

Endpoint for electroprocessing

Method and apparatus for electrochemical mechanical processing

Algorithm for real-time process control of electro-polishing

Conductive polishing article for electrochemical mechanical polishing

Electrolyte with good planarization capability, high removal rate a...

Conductive polishing article for electrochemical mechanical polishing

Method and composition for polishing a substrate

Hydrogen bubble reduction on the cathode using double-cell designs

Conductive polishing article for electrochemical mechanical polishing

Method and composition for polishing a substrate

Method and composition for polishing a substrate

Algorithm for real-time process control of electro-polishing

Conductive polishing article for electrochemical mechanical polishing

Control of removal profile in electrochemically assisted CMP

Conductive polishing article for electrochemical mechanical polishing

Electrolyte composition and treatment for electrolytic chemical mec...

Electrolyte with good planarization capability, high removal rate a...

Endpoint detection for electro chemical mechanical polishing and el...

Method and apparatus for face-up substrate polishing

Patents Applicationslast 30 patents

POLISHING PAD WITH PROJECTING PORTION

ENDPOINT FOR ELECTROPROCESSING

CONDUCTIVE POLISHING ARTICLE FOR ELECTROCHEMICAL MECHANICAL POLISHING

METHOD AND COMPOSITION FOR POLISHING A SUBSTRATE

Algorithm for real-time process control of electro-polishing

ALGORITHM FOR REAL-TIME PROCESS CONTROL OF ELECTRO-POLISHING

Conductive polishing article for electrochemical mechanical polishing

Multi-layer polishing pad for low-pressure polishing

Electrolyte with good planarization capability, high removal rate a...

Conductive polishing article for electrochemical mechanical polishing

Endpoint compensation in electroprocessing

Method and apparatus for electrochemical mechanical processing

Conductive polishing article for electrochemical mechanical polishing

Effective method to improve surface finish in electrochemically ass...

Control of removal profile in electrochemically assisted CMP

Method and composition for polishing a substrate

Conductive polishing article for electrochemical mechanical polishing

Method and composition for polishing a substrate

Hydrogen bubble reduction on the cathode using double-cell designs

Method and composition for polishing a substrate

Endpoint detection for electro chemical mechanical polishing and el...

Electrolyte composition and treatment for electrolytic chemical mec...

Electrolyte with good planarization capability, high removal rate a...

Method and apparatus for face-up substrate polishing