Sirish Reddy

Person

Boulder, CO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 11,209,729
- Issue date Dec 28, 2021
- Lam Research Corporation
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,831,096
- Issue date Nov 10, 2020
- Lam Research Corporation
- Jeffrey Marks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,514,598
- Issue date Dec 24, 2019
- Lam Research Corporation
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier ring structure and chamber systems including the same
- Patent number 10,242,848
- Issue date Mar 26, 2019
- Lam Research Corporation
- Eli Jeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High aspect ratio etch of oxide metal oxide metal stack
- Patent number 10,242,883
- Issue date Mar 26, 2019
- Lam Research Corporation
- Joydeep Guha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image reversal with AHM gap fill for multiple patterning
- Patent number 10,192,759
- Issue date Jan 29, 2019
- Lam Research Corporation
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for decreasing carbon-hydrogen content of amorphous carbon...
- Patent number 9,928,994
- Issue date Mar 27, 2018
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of metal dielectric film for hardmasks
- Patent number 9,875,890
- Issue date Jan 23, 2018
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 9,778,561
- Issue date Oct 3, 2017
- Lam Research Corporation
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High aspect ratio etch with combination mask
- Patent number 9,659,783
- Issue date May 23, 2017
- Lam Research Corporation
- Joydeep Guha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for supplying vaporized precursor
- Patent number 9,637,821
- Issue date May 2, 2017
- Lam Research Corporation
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High selectivity and low stress carbon hardmask by pulsed low frequ...
- Patent number 9,589,799
- Issue date Mar 7, 2017
- Lam Research Corporation
- Sirish K. Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal doping of amorphous carbon and silicon films used as hardmask...
- Patent number 9,520,295
- Issue date Dec 13, 2016
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a mask by etching conformal film on patterned as...
- Patent number 9,362,133
- Issue date Jun 7, 2016
- Lam Research Corporation
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxygen-containing ceramic hard masks and associated wet-cleans
- Patent number 9,337,068
- Issue date May 10, 2016
- Lam Research Corporation
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sulfur doped carbon hard masks
- Patent number 9,320,387
- Issue date Apr 26, 2016
- Lam Research Corporation
- Sirish K. Reddy
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
PECVD deposition of smooth silicon films
- Patent number 9,117,668
- Issue date Aug 25, 2015
- Novellus Systems, Inc.
- Alice Hollister
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon deposition-etch-ash gap fill process
- Patent number 9,023,731
- Issue date May 5, 2015
- Novellus Systems, Inc.
- Chunhai Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High aspect ratio etch with combination mask
- Patent number 9,018,103
- Issue date Apr 28, 2015
- Lam Research Corporation
- Joydeep Guha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor vapor generation and delivery system with filters and fil...
- Patent number 8,628,618
- Issue date Jan 14, 2014
- Novellus Systems Inc.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cascaded cure approach to fabricate highly tensile silicon nitride...
- Patent number 8,512,818
- Issue date Aug 20, 2013
- Novellus Systems, Inc.
- Bhadri Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High compressive stress carbon liners for MOS devices
- Patent number 8,362,571
- Issue date Jan 29, 2013
- Novellus Systems, Inc.
- Qingguo Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cascaded cure approach to fabricate highly tensile silicon nitride...
- Patent number 8,211,510
- Issue date Jul 3, 2012
- Novellus Systems, Inc.
- Bhadri Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High compressive stress carbon liners for MOS devices
- Patent number 7,906,817
- Issue date Mar 15, 2011
- Novellus Systems, Inc.
- Qingguo Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230273516
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230266662
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20220075260
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20200089104
- Publication date Mar 19, 2020
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20190094685
- Publication date Mar 28, 2019
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH ASPECT RATIO ETCH OF OXIDE METAL OXIDE METAL STACK
- Publication number 20180374712
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Joydeep GUHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20180004083
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL DIELECTRIC FILM FOR HARDMASKS
- Publication number 20160284541
- Publication date Sep 29, 2016
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING
- Publication number 20160254171
- Publication date Sep 1, 2016
- Lam Research Corporation
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL DOPING OF AMORPHOUS CARBON AND SILICON FILMS USED AS HARDMASK...
- Publication number 20160225632
- Publication date Aug 4, 2016
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DECREASING CARBON-HYDROGEN CONTENT OF AMORP...
- Publication number 20160225588
- Publication date Aug 4, 2016
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Carrier Ring Structure and Chamber Systems Including the Same
- Publication number 20160172165
- Publication date Jun 16, 2016
- LAM RESEARCH CORPORATION
- Eli Jeon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD DEPOSITION OF SMOOTH SILICON FILMS
- Publication number 20150325435
- Publication date Nov 12, 2015
- Novellus Systems, Inc.
- Alice G. Hollister
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20150221519
- Publication date Aug 6, 2015
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO ETCH WITH COMBINATION MASK
- Publication number 20150200106
- Publication date Jul 16, 2015
- LAM RESEARCH CORPORATION
- Joydeep GUHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SELECTIVITY AND LOW STRESS CARBON HARDMASK BY PULSED LOW FREQU...
- Publication number 20150093908
- Publication date Apr 2, 2015
- LAM RESEARCH CORPORATION
- Sirish K. Reddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SULFUR DOPED CARBON HARD MASKS
- Publication number 20150093915
- Publication date Apr 2, 2015
- LAM RESEARCH CORPORATION
- Sirish K. Reddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO ETCH WITH COMBINATION MASK
- Publication number 20150087154
- Publication date Mar 26, 2015
- LAM RESEARCH CORPORATION
- Joydeep GUHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXYGEN-CONTAINING CERAMIC HARD MASKS AND ASSOCIATED WET-CLEANS
- Publication number 20140175617
- Publication date Jun 26, 2014
- LAM RESEARCH CORPORATION
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING
- Publication number 20140170853
- Publication date Jun 19, 2014
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SUPPLYING VAPORIZED PRECURSOR
- Publication number 20140096834
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON DEPOSITION-ETCH-ASH GAP FILL PROCESS
- Publication number 20140094035
- Publication date Apr 3, 2014
- Novellus Systems, Inc.
- Chunhai Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION OF SMOOTH SILICON FILMS
- Publication number 20130316518
- Publication date Nov 28, 2013
- Alice HOLLISTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INCREASING ETCH SELECTIVITY OF CARBON FILMS WITH LOWER ABSORPTION C...
- Publication number 20120258261
- Publication date Oct 11, 2012
- Novellus Systems, Inc.
- Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...
- Publication number 20110111136
- Publication date May 12, 2011
- NOVELLUS SYSTEMS INC.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Photolytic Polymer Surface Modification
- Publication number 20080274335
- Publication date Nov 6, 2008
- Regents of the University of Colorado
- Christopher N. Bowman
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Polymer derived ceramic materials
- Publication number 20060069176
- Publication date Mar 30, 2006
- Christopher N. Bowman
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Sirish Reddy

Person

Patents Grantslast 30 patents

Vacuum-integrated hardmask processes and apparatus

Vacuum-integrated hardmask processes and apparatus

Vacuum-integrated hardmask processes and apparatus

Carrier ring structure and chamber systems including the same

High aspect ratio etch of oxide metal oxide metal stack

Image reversal with AHM gap fill for multiple patterning

Methods for decreasing carbon-hydrogen content of amorphous carbon...

Deposition of metal dielectric film for hardmasks

Vacuum-integrated hardmask processes and apparatus

High aspect ratio etch with combination mask

Method for supplying vaporized precursor

High selectivity and low stress carbon hardmask by pulsed low frequ...

Metal doping of amorphous carbon and silicon films used as hardmask...

Method for forming a mask by etching conformal film on patterned as...

Oxygen-containing ceramic hard masks and associated wet-cleans

Sulfur doped carbon hard masks

PECVD deposition of smooth silicon films

Carbon deposition-etch-ash gap fill process

High aspect ratio etch with combination mask

Precursor vapor generation and delivery system with filters and fil...

Cascaded cure approach to fabricate highly tensile silicon nitride...

High compressive stress carbon liners for MOS devices

Cascaded cure approach to fabricate highly tensile silicon nitride...

High compressive stress carbon liners for MOS devices

Patents Applicationslast 30 patents

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

HIGH ASPECT RATIO ETCH OF OXIDE METAL OXIDE METAL STACK

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

DEPOSITION OF METAL DIELECTRIC FILM FOR HARDMASKS

IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING

METAL DOPING OF AMORPHOUS CARBON AND SILICON FILMS USED AS HARDMASK...

SYSTEMS AND METHODS FOR DECREASING CARBON-HYDROGEN CONTENT OF AMORP...

Carrier Ring Structure and Chamber Systems Including the Same

PECVD DEPOSITION OF SMOOTH SILICON FILMS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

HIGH ASPECT RATIO ETCH WITH COMBINATION MASK

HIGH SELECTIVITY AND LOW STRESS CARBON HARDMASK BY PULSED LOW FREQU...

SULFUR DOPED CARBON HARD MASKS

HIGH ASPECT RATIO ETCH WITH COMBINATION MASK

OXYGEN-CONTAINING CERAMIC HARD MASKS AND ASSOCIATED WET-CLEANS

IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING

METHOD FOR SUPPLYING VAPORIZED PRECURSOR

CARBON DEPOSITION-ETCH-ASH GAP FILL PROCESS

PECVD DEPOSITION OF SMOOTH SILICON FILMS

INCREASING ETCH SELECTIVITY OF CARBON FILMS WITH LOWER ABSORPTION C...

PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...

Photolytic Polymer Surface Modification

Polymer derived ceramic materials