Sivakami Ramanathan

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
- Patent number 9,546,432
- Issue date Jan 17, 2017
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of wet cleaning aluminum chamber parts
- Patent number 9,387,521
- Issue date Jul 12, 2016
- Lam Research Corporation
- Hong Shih
- B24 - GRINDING POLISHING
Information Patent Grant
Corrosion resistant aluminum coating on plasma chamber components
- Patent number 9,337,002
- Issue date May 10, 2016
- Lam Research Corporation
- John Daugherty
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
- Patent number 9,123,651
- Issue date Sep 1, 2015
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Electroless deposition method
- Patent number 6,905,622
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless deposition method
- Patent number 6,899,816
- Issue date May 31, 2005
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing organic depletion during non-proc...
- Patent number 6,878,245
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Srinivas Gandikota
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electroless deposition method over sub-micron apertures
- Patent number 6,824,666
- Issue date Nov 30, 2004
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post rinse to improve selective deposition of electroless cobalt on...
- Patent number 6,821,909
- Issue date Nov 23, 2004
- Applied Materials, Inc.
- Sivakami Ramanathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improved electroplating fill of an aperture
- Patent number 6,797,620
- Issue date Sep 28, 2004
- Applied Materials, Inc.
- John S. Lewis
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
- Publication number 20150337450
- Publication date Nov 26, 2015
- LAM RESEARCH CORPORATION
- Hong SHIH
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
- Publication number 20140295670
- Publication date Oct 2, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS
- Publication number 20140272459
- Publication date Sep 18, 2014
- LAM RESEARCH CORPORATION
- John Daugherty
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS
- Publication number 20140150819
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Post rinse to improve selective deposition of electroless cobalt on...
- Publication number 20050136185
- Publication date Jun 23, 2005
- Sivakami Ramanathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Post rinse to improve selective deposition of electroless cobalt on...
- Publication number 20040087141
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Sivakami Ramanathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Planarization by chemical polishing for ULSI applications
- Publication number 20030209523
- Publication date Nov 13, 2003
- APPLIED MATERIALS, INC.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for improved electroplating fill of an aperture
- Publication number 20030194850
- Publication date Oct 16, 2003
- APPLIED MATERIALS, INC.
- John S. Lewis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electroless deposition method
- Publication number 20030190812
- Publication date Oct 9, 2003
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Homogeneous copper-tin alloy plating for enhancement of electro-mig...
- Publication number 20030188974
- Publication date Oct 9, 2003
- APPLIED MATERIALS, INC.
- Deenesh Padhi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electroless deposition method
- Publication number 20030190426
- Publication date Oct 9, 2003
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless deposition method
- Publication number 20030189026
- Publication date Oct 9, 2003
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for reducing organic depletion during non-proc...
- Publication number 20030159936
- Publication date Aug 28, 2003
- APPLIED MATERIALS, INC.
- Srinivas Gandikota
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method to reduce the depletion of organics in electroplating baths
- Publication number 20030159937
- Publication date Aug 28, 2003
- APPLIED MATERIALS, INC.
- Srinivas Gandikota
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for forming copper interconnects
- Publication number 20030146102
- Publication date Aug 7, 2003
- APPLIED MATERIALS, INC.
- Sivakami Ramanathan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method of depositing a catalytic layer
- Publication number 20030143837
- Publication date Jul 31, 2003
- APPLIED MATERIALS, INC.
- Srinivas Gandikota
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electroless deposition method over sub-micron apertures
- Publication number 20030140988
- Publication date Jul 31, 2003
- APPLIED MATERIALS, INC.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process window for gap-fill on very high aspect ratio structures us...
- Publication number 20020112964
- Publication date Aug 22, 2002
- APPLIED MATERIALS, INC.
- Srinivas Gandikota
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Sivakami Ramanathan

Person

Patents Grantslast 30 patents

Dense oxide coated component of a plasma processing chamber and met...

Method of wet cleaning aluminum chamber parts

Corrosion resistant aluminum coating on plasma chamber components

Dense oxide coated component of a plasma processing chamber and met...

Method of cleaning aluminum plasma chamber parts

Electroless deposition method

Electroless deposition method

Method and apparatus for reducing organic depletion during non-proc...

Electroless deposition method over sub-micron apertures

Post rinse to improve selective deposition of electroless cobalt on...

Method and apparatus for improved electroplating fill of an aperture

Patents Applicationslast 30 patents

DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...

DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...

CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS

METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS

METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS

Post rinse to improve selective deposition of electroless cobalt on...

Post rinse to improve selective deposition of electroless cobalt on...

Planarization by chemical polishing for ULSI applications

Method and apparatus for improved electroplating fill of an aperture

Electroless deposition method

Homogeneous copper-tin alloy plating for enhancement of electro-mig...

Electroless deposition method

Electroless deposition method

Method and apparatus for reducing organic depletion during non-proc...

Method to reduce the depletion of organics in electroplating baths

Method for forming copper interconnects

Method of depositing a catalytic layer

Electroless deposition method over sub-micron apertures

Process window for gap-fill on very high aspect ratio structures us...