Soovo Sen

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Heated gas box for PECVD applications
- Patent number 7,628,863
- Issue date Dec 8, 2009
- Applied Materials, Inc.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heater assembly
- Patent number 7,024,105
- Issue date Apr 4, 2006
- Applied Materials Inc.
- Mark A. Fodor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for deposition of low dielectric constant mate...
- Patent number 7,008,484
- Issue date Mar 7, 2006
- Applied Materials Inc.
- Kang Sub Yim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated gas distribution plate for a processing chamber
- Patent number 6,946,033
- Issue date Sep 20, 2005
- Applied Materials Inc.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20170121813
- Publication date May 4, 2017
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20140158048
- Publication date Jun 12, 2014
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mixing Energized and Non-Energized Gases for Silicon Nitride Deposi...
- Publication number 20120009803
- Publication date Jan 12, 2012
- Applied Materials, Inc.
- Kee Bum Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE DEVELOPMENT TO REDUCE BEVEL DEPOSITION
- Publication number 20080152838
- Publication date Jun 26, 2008
- Applied Materials, Inc.
- SOOVO SEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas box for PECVD applications
- Publication number 20070107660
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mixing energized and non-energized gases for silicon nitride deposi...
- Publication number 20060162661
- Publication date Jul 27, 2006
- APPLIED MATERIALS, INC.
- Kee Bum Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for deposition of low dielectric constant mate...
- Publication number 20060144334
- Publication date Jul 6, 2006
- APPLIED MATERIALS, INC.
- Kang Sub Yim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas box for PECVD applications
- Publication number 20060027165
- Publication date Feb 9, 2006
- APPLIED MATERIALS, INC.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hardware development to reduce bevel deposition
- Publication number 20050196971
- Publication date Sep 8, 2005
- Applied Materials, Inc.
- Soovo Sen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process kit design for deposition chamber
- Publication number 20050150452
- Publication date Jul 14, 2005
- Soovo Sen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate heater assembly
- Publication number 20050078953
- Publication date Apr 14, 2005
- APPLIED MATERIALS, INC.
- Mark A. Fodor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Blocker plate bypass design to improve clean rate at the edge of th...
- Publication number 20040118519
- Publication date Jun 24, 2004
- APPLIED MATERIALS, INC.
- Soovo Sen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for operating a chemical vapor deposition chamber using a h...
- Publication number 20040052969
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas distribution plate for a processing chamber
- Publication number 20040050492
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for deposition of low dielectric constant mate...
- Publication number 20030207033
- Publication date Nov 6, 2003
- APPLIED MATERIALS, INC.
- Kang Sub Yim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Heated gas box for PECVD applications

Substrate heater assembly

Method and apparatus for deposition of low dielectric constant mate...

Heated gas distribution plate for a processing chamber

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

Mixing Energized and Non-Energized Gases for Silicon Nitride Deposi...

HARDWARE DEVELOPMENT TO REDUCE BEVEL DEPOSITION

Heated gas box for PECVD applications

Mixing energized and non-energized gases for silicon nitride deposi...

Method and apparatus for deposition of low dielectric constant mate...

Heated gas box for PECVD applications

Hardware development to reduce bevel deposition

Process kit design for deposition chamber

Substrate heater assembly

Blocker plate bypass design to improve clean rate at the edge of th...

Methods for operating a chemical vapor deposition chamber using a h...

Heated gas distribution plate for a processing chamber

Method and apparatus for deposition of low dielectric constant mate...