Stephan Kudelka

Person

Radebeul, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition method for a transition-metal-containing dielectric
- Patent number 7,666,752
- Issue date Feb 23, 2010
- Qimonda AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing a conductive layer including two metal nitrides
- Patent number 7,531,418
- Issue date May 12, 2009
- Qimonda AG
- Bernd Hintze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked capacitor and method for producing stacked capacitors for d...
- Patent number 7,413,951
- Issue date Aug 19, 2008
- Qimonda AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a capacitor
- Patent number 7,402,860
- Issue date Jul 22, 2008
- Infineon Technologies AG
- Christian Kapteyn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for a trench capacitor having an isolation col...
- Patent number 7,312,114
- Issue date Dec 25, 2007
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating trench capacitor with insulation collar elec...
- Patent number 7,273,790
- Issue date Sep 25, 2007
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a trench structure which is electrically con...
- Patent number 7,189,614
- Issue date Mar 13, 2007
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench capacitor with buried strap
- Patent number 7,157,329
- Issue date Jan 2, 2007
- Infineon Technologies Aktiengesellschaft
- Helmut Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etching to increase trench surface area
- Patent number 7,157,328
- Issue date Jan 2, 2007
- Infineon Technologies AG
- Helmut Horst Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Barrier layer and a method for suppressing diffusion processes duri...
- Patent number 7,157,371
- Issue date Jan 2, 2007
- Infineon Technologies AG
- Thomas Hecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for expanding a trench in a semiconductor structure
- Patent number 7,157,382
- Issue date Jan 2, 2007
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making encapsulated spacers in vertical pass gate DRAM an...
- Patent number 6,974,743
- Issue date Dec 13, 2005
- Infineon Technologies AG
- Ramac Divakaruni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for patterning ceramic layers
- Patent number 6,953,722
- Issue date Oct 11, 2005
- Infineon Technologies AG
- Harald Seidl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor trench structure
- Patent number 6,919,255
- Issue date Jul 19, 2005
- Infineon Technologies AG
- Albert Birner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a trench capacitor with an insulation collar
- Patent number 6,916,721
- Issue date Jul 12, 2005
- Infineon Technologies AG
- Lars Heineck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench capacitor with buried strap
- Patent number 6,853,025
- Issue date Feb 8, 2005
- Infineon Technologies Aktiengesellschaft
- Helmut Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch process for recessing polysilicon in trench structures
- Patent number 6,740,595
- Issue date May 25, 2004
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High aspect ratio PBL SiN barrier formation
- Patent number 6,677,197
- Issue date Jan 13, 2004
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process flow for thick isolation collar with reduced length
- Patent number 6,605,838
- Issue date Aug 12, 2003
- International Business Machines Corporation
- Jack A. Mandelman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of preparing buried LOCOS collar in trench DRAMS
- Patent number 6,599,798
- Issue date Jul 29, 2003
- Infineon Technologies AG
- Helmut Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rough oxide hard mask for DT surface area enhancement for DT DRAM
- Patent number 6,559,002
- Issue date May 6, 2003
- Infineon Technologies North America Corp.
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer formation process using oxide shield
- Patent number 6,548,344
- Issue date Apr 15, 2003
- Infineon Technologies AG
- Jochen Beintner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INSULATOR MATERIAL OVER BURIED CONDUCTIVE LINE
- Publication number 20090321805
- Publication date Dec 31, 2009
- QIMONDA AG
- Johannes von Kluge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition method for transition-metal oxide based dielectric
- Publication number 20080182427
- Publication date Jul 31, 2008
- Lars Oberbeck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective deposition method
- Publication number 20080173917
- Publication date Jul 24, 2008
- Matthias Patz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A DIELECTRIC LAYER
- Publication number 20080176375
- Publication date Jul 24, 2008
- Qimonda AG
- Elke Erben
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition method for a transition-metal-containing dielectric
- Publication number 20080173919
- Publication date Jul 24, 2008
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Storage capacitor and method for producing such a storage capacitor
- Publication number 20070235786
- Publication date Oct 11, 2007
- Infineon Technologies AG
- Christian Kapteyn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stacked capacitor and method for producing stacked capacitors for d...
- Publication number 20070059893
- Publication date Mar 15, 2007
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a capacitor
- Publication number 20070007624
- Publication date Jan 11, 2007
- Christian Kapteyn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method for a trench capacitor having an isolation col...
- Publication number 20060246656
- Publication date Nov 2, 2006
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective etching to increase trench surface area
- Publication number 20060172486
- Publication date Aug 3, 2006
- Helmut Horst Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for producing a conductive layer
- Publication number 20060128128
- Publication date Jun 15, 2006
- Infineon Technologies AG
- Bernd Hintze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a trench capacitor with an insulation collar...
- Publication number 20060003536
- Publication date Jan 5, 2006
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of fabricating bottle trench capacitors using an electrochem...
- Publication number 20050245025
- Publication date Nov 3, 2005
- Stephan P. Kudelka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method of fabricating bottle trench capacitors using an electrochem...
- Publication number 20050176198
- Publication date Aug 11, 2005
- Stephan P. Kudelka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for expanding a trench in a semiconductor structure
- Publication number 20050176256
- Publication date Aug 11, 2005
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENCAPSULATED SPACERS IN VERTICAL PASS GATE DRAM AND DAMASCENE LOGIC...
- Publication number 20050167741
- Publication date Aug 4, 2005
- Infineon Technologies North America Corp.
- Ramachandra Divakaruni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Trench capacitor with buried strap
- Publication number 20050158961
- Publication date Jul 21, 2005
- Helmut Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Trench capacitor and method for fabricating a trench capacitor
- Publication number 20050079679
- Publication date Apr 14, 2005
- Infineon Technologies AG
- Harald Seidl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Trench capacitor with pillar
- Publication number 20050048715
- Publication date Mar 3, 2005
- Thomas Steffen Rupp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a trench structure which is electrically con...
- Publication number 20050032324
- Publication date Feb 10, 2005
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating trench capacitor with insulation collar elec...
- Publication number 20050026384
- Publication date Feb 3, 2005
- Infineon Technologies AG
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a trench capacitor with an insulation collar
- Publication number 20040197988
- Publication date Oct 7, 2004
- Infineon Technologies AG
- Lars Heineck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Trench capacitor with buried strap
- Publication number 20040164313
- Publication date Aug 26, 2004
- Helmut Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and structures for increasing the structure density and the...
- Publication number 20040152317
- Publication date Aug 5, 2004
- Joern Luetzen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor trench structure
- Publication number 20040126961
- Publication date Jul 1, 2004
- Albert Birner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of preparing buried LOCOS collar in trench DRAMS
- Publication number 20040115895
- Publication date Jun 17, 2004
- Helmut Tews
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method and etching signal layer for processing semiconducto...
- Publication number 20040087045
- Publication date May 6, 2004
- Thomas Hecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Barrrier layer and a method for suppressing diffusion processes dur...
- Publication number 20040082166
- Publication date Apr 29, 2004
- Thomas Hecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for patterning ceramic layers
- Publication number 20040029343
- Publication date Feb 12, 2004
- Harald Seidl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etch process for recessing polysilicon in trench structures
- Publication number 20030194867
- Publication date Oct 16, 2003
- Infineon Technologies North America Corp.
- Stephan Kudelka
- H01 - BASIC ELECTRIC ELEMENTS

Stephan Kudelka

Person

Patents Grantslast 30 patents

Deposition method for a transition-metal-containing dielectric

Method of producing a conductive layer including two metal nitrides

Stacked capacitor and method for producing stacked capacitors for d...

Method for fabricating a capacitor

Manufacturing method for a trench capacitor having an isolation col...

Method for fabricating trench capacitor with insulation collar elec...

Method for fabricating a trench structure which is electrically con...

Trench capacitor with buried strap

Selective etching to increase trench surface area

Barrier layer and a method for suppressing diffusion processes duri...

Method for expanding a trench in a semiconductor structure

Method of making encapsulated spacers in vertical pass gate DRAM an...

Method for patterning ceramic layers

Semiconductor trench structure

Method for fabricating a trench capacitor with an insulation collar

Trench capacitor with buried strap

Etch process for recessing polysilicon in trench structures

High aspect ratio PBL SiN barrier formation

Process flow for thick isolation collar with reduced length

Method of preparing buried LOCOS collar in trench DRAMS

Rough oxide hard mask for DT surface area enhancement for DT DRAM

Spacer formation process using oxide shield

Patents Applicationslast 30 patents

INSULATOR MATERIAL OVER BURIED CONDUCTIVE LINE

Deposition method for transition-metal oxide based dielectric

Selective deposition method

METHOD FOR FORMING A DIELECTRIC LAYER

Deposition method for a transition-metal-containing dielectric

Storage capacitor and method for producing such a storage capacitor

Stacked capacitor and method for producing stacked capacitors for d...

Method for fabricating a capacitor

Manufacturing method for a trench capacitor having an isolation col...

Selective etching to increase trench surface area

Method for producing a conductive layer

Method for fabricating a trench capacitor with an insulation collar...

Method of fabricating bottle trench capacitors using an electrochem...

Method of fabricating bottle trench capacitors using an electrochem...

Method for expanding a trench in a semiconductor structure

ENCAPSULATED SPACERS IN VERTICAL PASS GATE DRAM AND DAMASCENE LOGIC...

Trench capacitor with buried strap

Trench capacitor and method for fabricating a trench capacitor

Trench capacitor with pillar

Method for fabricating a trench structure which is electrically con...

Method for fabricating trench capacitor with insulation collar elec...

Method for fabricating a trench capacitor with an insulation collar

Trench capacitor with buried strap

Method and structures for increasing the structure density and the...

Semiconductor trench structure

Method of preparing buried LOCOS collar in trench DRAMS

Etching method and etching signal layer for processing semiconducto...

Barrrier layer and a method for suppressing diffusion processes dur...

Method for patterning ceramic layers

Etch process for recessing polysilicon in trench structures