Stephen M. Sirard

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Controlled degradation of a stimuli-responsive polymer film
- Patent number 11,862,473
- Issue date Jan 2, 2024
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for drying high aspect ratio structures without...
- Patent number 10,068,781
- Issue date Sep 4, 2018
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for collapse-free drying of high aspect ratio structures
- Patent number 10,008,396
- Issue date Jun 26, 2018
- Lam Research Corporation
- Stephen Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry development and image transfer of si-containing self-assembled...
- Patent number 9,773,649
- Issue date Sep 26, 2017
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate freeze dry apparatus and method
- Patent number 9,673,037
- Issue date Jun 6, 2017
- Law Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of collapse-free drying of high aspect ratio structures
- Patent number 9,666,427
- Issue date May 30, 2017
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for drying high aspect ratio structures without...
- Patent number 9,466,511
- Issue date Oct 11, 2016
- Lam Research Corporation
- Ratchana Limary
- F26 - DRYING
Information Patent Grant
Delamination drying apparatus and method
- Patent number 8,898,928
- Issue date Dec 2, 2014
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Strip with reduced low-K dielectric damage
- Patent number 8,691,701
- Issue date Apr 8, 2014
- Lam Research Corporation
- Bing Ji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for low-K dielectric etch with reduced damage
- Patent number 8,236,188
- Issue date Aug 7, 2012
- Lam Research Corporation
- Bing Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for dielectric material removal between conductive lines
- Patent number 8,114,780
- Issue date Feb 14, 2012
- Lam Research Corporation
- Mayumi Block
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for tunably repairing low-k dielectric damage
- Patent number 7,981,699
- Issue date Jul 19, 2011
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer electrical discharge control using argon free dechucking gas
- Patent number 7,892,445
- Issue date Feb 22, 2011
- Lam Research Corporation
- David Wei
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND FORMULATIONS FOR SACRIFICIAL BRACING, SURFACE PROTECTIO...
- Publication number 20250132195
- Publication date Apr 24, 2025
- LAM RESEARCH CORPORATION
- Stephen M. SIRARD
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TEMPORARY CAPPING MATERIAL FOR OXIDE PREVENTION IN LOW TEMPERATURE...
- Publication number 20240312778
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Stephen J. BANIK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LOW CEILING TEMPERATURE HOMOPOLYMERS AS SACRIFICIAL PROTECTION LAYE...
- Publication number 20230295412
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Stephen M. SIRARD
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RESIDUE-FREE REMOVAL OF STIMULUS RESPONSIVE POLYMERS FROM SUBSTRATES
- Publication number 20230207305
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Stephen M. SIRARD
- B08 - CLEANING
Information Patent Application
REMOVABLE CVD POLYMER FILM FOR SURFACE PROTECTION AND QUEUE PERIOD...
- Publication number 20230178364
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Gregory BLACHUT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLED DEGRADATION OF A STIMULI-RESPONSIVE POLYMER FILM
- Publication number 20230136036
- Publication date May 4, 2023
- LAM RESEARCH CORPORATION
- Stephen M. SIRARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMALL MOLECULE FILMS FOR SACRIFICIAL BRACING, SURFACE PROTECTION, A...
- Publication number 20220328338
- Publication date Oct 13, 2022
- LAM RESEARCH CORPORATION
- Gregory BLACHUT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STIMULUS RESPONSIVE POLYMER FILMS AND FORMULATIONS
- Publication number 20220301859
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Gregory BLACHUT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY DEVELOPMENT AND IMAGE TRANSFER OF SI-CONTAINING SELF-ASSEMBLED...
- Publication number 20160141184
- Publication date May 19, 2016
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20160099160
- Publication date Apr 7, 2016
- LAM RESEARCH CORPORATION
- Stephen Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DRYING HIGH ASPECT RATIO STRUCTURES WITHOUT...
- Publication number 20160097590
- Publication date Apr 7, 2016
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- F26 - DRYING
Information Patent Application
SYSTEMS AND METHODS FOR DRYING HIGH ASPECT RATIO STRUCTURES WITHOUT...
- Publication number 20160086829
- Publication date Mar 24, 2016
- LAM RESEARCH CORPORATION
- Ratchana Limary
- B08 - CLEANING
Information Patent Application
METHOD OF COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20140373384
- Publication date Dec 25, 2014
- Stephen M. SIRARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS AND METHOD
- Publication number 20140179097
- Publication date Jun 26, 2014
- LAM RESEARCH CORPORATION
- Diane J. HYMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DELAMINATION DRYING APPARATUS AND METHOD
- Publication number 20140101964
- Publication date Apr 17, 2014
- LAM RESEARCH CORPORATION
- Stephen M. SIRARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE FREEZE DRY APPARATUS AND METHOD
- Publication number 20120304483
- Publication date Dec 6, 2012
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TUNABLY REPAIRING LOW-K DIELECTRIC DAMAGE
- Publication number 20110244600
- Publication date Oct 6, 2011
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REPAIRING LOW-K DIELECTRIC DAMAGE
- Publication number 20110097904
- Publication date Apr 28, 2011
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TUNABLY REPAIRING LOW-K DIELECTRIC DAMAGE
- Publication number 20110097821
- Publication date Apr 28, 2011
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRIP WITH REDUCED LOW-K DIELECTRIC DAMAGE
- Publication number 20100285671
- Publication date Nov 11, 2010
- LAM RESEARCH CORPORATION
- Bing Ji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE
- Publication number 20100261352
- Publication date Oct 14, 2010
- LAM RESEARCH CORPORATION
- Bing Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DIELECTRIC MATERIAL REMOVAL BETWEEN CONDUCTIVE LINES
- Publication number 20100248485
- Publication date Sep 30, 2010
- LAM RESEARCH CORPORATION
- Mayumi Block
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING VIA FACET WITH MINIMAL RIE LAG
- Publication number 20090068767
- Publication date Mar 12, 2009
- LAM RESEARCH CORPORATION
- Stephen Sirard
- H01 - BASIC ELECTRIC ELEMENTS

Stephen M. Sirard

Person

Patents Grantslast 30 patents

Controlled degradation of a stimuli-responsive polymer film

Systems and methods for drying high aspect ratio structures without...

Method for collapse-free drying of high aspect ratio structures

Dry development and image transfer of si-containing self-assembled...

Substrate freeze dry apparatus and method

Method of collapse-free drying of high aspect ratio structures

Systems and methods for drying high aspect ratio structures without...

Delamination drying apparatus and method

Strip with reduced low-K dielectric damage

Method for low-K dielectric etch with reduced damage

Method for dielectric material removal between conductive lines

Method for tunably repairing low-k dielectric damage

Wafer electrical discharge control using argon free dechucking gas

Patents Applicationslast 30 patents

METHODS AND FORMULATIONS FOR SACRIFICIAL BRACING, SURFACE PROTECTIO...

TEMPORARY CAPPING MATERIAL FOR OXIDE PREVENTION IN LOW TEMPERATURE...

LOW CEILING TEMPERATURE HOMOPOLYMERS AS SACRIFICIAL PROTECTION LAYE...

RESIDUE-FREE REMOVAL OF STIMULUS RESPONSIVE POLYMERS FROM SUBSTRATES

REMOVABLE CVD POLYMER FILM FOR SURFACE PROTECTION AND QUEUE PERIOD...

CONTROLLED DEGRADATION OF A STIMULI-RESPONSIVE POLYMER FILM

SMALL MOLECULE FILMS FOR SACRIFICIAL BRACING, SURFACE PROTECTION, A...

STIMULUS RESPONSIVE POLYMER FILMS AND FORMULATIONS

DRY DEVELOPMENT AND IMAGE TRANSFER OF SI-CONTAINING SELF-ASSEMBLED...

METHOD FOR COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES

SYSTEMS AND METHODS FOR DRYING HIGH ASPECT RATIO STRUCTURES WITHOUT...

SYSTEMS AND METHODS FOR DRYING HIGH ASPECT RATIO STRUCTURES WITHOUT...

METHOD OF COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES

DEPOSITION APPARATUS AND METHOD

DELAMINATION DRYING APPARATUS AND METHOD

SUBSTRATE FREEZE DRY APPARATUS AND METHOD

METHOD FOR TUNABLY REPAIRING LOW-K DIELECTRIC DAMAGE

METHOD FOR REPAIRING LOW-K DIELECTRIC DAMAGE

METHOD FOR TUNABLY REPAIRING LOW-K DIELECTRIC DAMAGE

STRIP WITH REDUCED LOW-K DIELECTRIC DAMAGE

METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE

METHOD FOR DIELECTRIC MATERIAL REMOVAL BETWEEN CONDUCTIVE LINES

TUNING VIA FACET WITH MINIMAL RIE LAG