TREA

Steven C. Selbrede

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  • San Jose, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Systems and methods for remote plasma clean
    • Patent number 6,835,278
    • Issue date Dec 28, 2004
    • Mattson Technology Inc.
    • Steven C. Selbrede
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Inductive plasma reactor
    • Patent number 6,551,447
    • Issue date Apr 22, 2003
    • Mattson Technology, Inc.
    • Stephen E. Savas
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Inductive plasma reactor
    • Patent number 6,143,129
    • Issue date Nov 7, 2000
    • Mattson Technology, Inc.
    • Stephen E. Savas
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Purge gas in wafer coating area selection
    • Patent number 5,447,570
    • Issue date Sep 5, 1995
    • Genus, Inc.
    • Johannes J. Schmitz
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Differential pressure CVD chuck
    • Patent number 5,383,971
    • Issue date Jan 24, 1995
    • Genus, Inc.
    • Steven C. Selbrede
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Differential pressure CVD chuck
    • Patent number 5,094,885
    • Issue date Mar 10, 1992
    • Genus, Inc.
    • Steven C. Selbrede
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents