Membership
Tour
Register
Log in
Suguru Tabara
Follow
Person
Hamamatsu-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
7,265,058
Issue date
Sep 4, 2007
Rohm Co., Ltd.
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wiring forming method
Patent number
6,835,651
Issue date
Dec 28, 2004
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wiring forming method
Patent number
6,509,261
Issue date
Jan 21, 2003
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wiring forming method
Patent number
6,348,404
Issue date
Feb 19, 2002
Yamaha Corporation
Suguru Tabara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor manufacture method with aluminum wiring layer pattern...
Patent number
6,197,689
Issue date
Mar 6, 2001
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacture of semiconductor device with fine patterns
Patent number
6,187,689
Issue date
Feb 13, 2001
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conductive layer forming method using etching mask with direction &...
Patent number
6,150,250
Issue date
Nov 21, 2000
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
6,147,003
Issue date
Nov 14, 2000
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with multi-layer wiring
Patent number
6,137,175
Issue date
Oct 24, 2000
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement of electron shading damage
Patent number
6,114,182
Issue date
Sep 5, 2000
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming wiring pattern
Patent number
6,080,681
Issue date
Jun 27, 2000
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching suppressing formation of notch
Patent number
6,008,132
Issue date
Dec 28, 1999
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device using antireflection...
Patent number
5,998,300
Issue date
Dec 7, 1999
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring electron shading damage
Patent number
5,940,682
Issue date
Aug 17, 1999
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacture of semiconductor device with fine pattens
Patent number
5,910,021
Issue date
Jun 8, 1999
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring electron shading damage
Patent number
5,904,490
Issue date
May 18, 1999
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interconnection with metal plug and reduced step
Patent number
5,786,637
Issue date
Jul 28, 1998
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal plug with adhesion layer
Patent number
5,767,015
Issue date
Jun 16, 1998
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a semiconductor device using antireflectio...
Patent number
5,707,883
Issue date
Jan 13, 1998
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Controlled taper etching
Patent number
5,686,363
Issue date
Nov 11, 1997
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming an interconnection with metal plug and reduced step
Patent number
5,670,422
Issue date
Sep 23, 1997
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching with less particles
Patent number
5,639,341
Issue date
Jun 17, 1997
Yamaha Corporation
Suguru Tabara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multilayer aluminum wiring in semiconductor IC
Patent number
5,519,254
Issue date
May 21, 1996
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching polysilicon using a thin oxide mask formed on the...
Patent number
5,514,621
Issue date
May 7, 1996
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a wiring layer wherein the masking material is ash...
Patent number
5,451,293
Issue date
Sep 19, 1995
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming multilayer aluminum wiring in semiconductor IC
Patent number
5,399,527
Issue date
Mar 21, 1995
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of manufacturing semiconductor device
Publication number
20040082172
Publication date
Apr 29, 2004
ROHM CO., LTD.
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wiring forming method
Publication number
20030029035
Publication date
Feb 13, 2003
Yamaha Corp.
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wiring forming method
Publication number
20020052107
Publication date
May 2, 2002
Yamaha Corporation
Suguru Tabara
H01 - BASIC ELECTRIC ELEMENTS