Suguru Tabara

Person

Hamamatsu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 7,265,058
- Issue date Sep 4, 2007
- Rohm Co., Ltd.
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wiring forming method
- Patent number 6,835,651
- Issue date Dec 28, 2004
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wiring forming method
- Patent number 6,509,261
- Issue date Jan 21, 2003
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wiring forming method
- Patent number 6,348,404
- Issue date Feb 19, 2002
- Yamaha Corporation
- Suguru Tabara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor manufacture method with aluminum wiring layer pattern...
- Patent number 6,197,689
- Issue date Mar 6, 2001
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacture of semiconductor device with fine patterns
- Patent number 6,187,689
- Issue date Feb 13, 2001
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive layer forming method using etching mask with direction &...
- Patent number 6,150,250
- Issue date Nov 21, 2000
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,147,003
- Issue date Nov 14, 2000
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with multi-layer wiring
- Patent number 6,137,175
- Issue date Oct 24, 2000
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of electron shading damage
- Patent number 6,114,182
- Issue date Sep 5, 2000
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming wiring pattern
- Patent number 6,080,681
- Issue date Jun 27, 2000
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching suppressing formation of notch
- Patent number 6,008,132
- Issue date Dec 28, 1999
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device using antireflection...
- Patent number 5,998,300
- Issue date Dec 7, 1999
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring electron shading damage
- Patent number 5,940,682
- Issue date Aug 17, 1999
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacture of semiconductor device with fine pattens
- Patent number 5,910,021
- Issue date Jun 8, 1999
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring electron shading damage
- Patent number 5,904,490
- Issue date May 18, 1999
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnection with metal plug and reduced step
- Patent number 5,786,637
- Issue date Jul 28, 1998
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal plug with adhesion layer
- Patent number 5,767,015
- Issue date Jun 16, 1998
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device using antireflectio...
- Patent number 5,707,883
- Issue date Jan 13, 1998
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlled taper etching
- Patent number 5,686,363
- Issue date Nov 11, 1997
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming an interconnection with metal plug and reduced step
- Patent number 5,670,422
- Issue date Sep 23, 1997
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching with less particles
- Patent number 5,639,341
- Issue date Jun 17, 1997
- Yamaha Corporation
- Suguru Tabara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer aluminum wiring in semiconductor IC
- Patent number 5,519,254
- Issue date May 21, 1996
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching polysilicon using a thin oxide mask formed on the...
- Patent number 5,514,621
- Issue date May 7, 1996
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a wiring layer wherein the masking material is ash...
- Patent number 5,451,293
- Issue date Sep 19, 1995
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming multilayer aluminum wiring in semiconductor IC
- Patent number 5,399,527
- Issue date Mar 21, 1995
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20040082172
- Publication date Apr 29, 2004
- ROHM CO., LTD.
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wiring forming method
- Publication number 20030029035
- Publication date Feb 13, 2003
- Yamaha Corp.
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wiring forming method
- Publication number 20020052107
- Publication date May 2, 2002
- Yamaha Corporation
- Suguru Tabara
- H01 - BASIC ELECTRIC ELEMENTS

Suguru Tabara

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Wiring forming method

Wiring forming method

Wiring forming method

Semiconductor manufacture method with aluminum wiring layer pattern...

Manufacture of semiconductor device with fine patterns

Conductive layer forming method using etching mask with direction &...

Method of manufacturing semiconductor device

Semiconductor device with multi-layer wiring

Measurement of electron shading damage

Method of forming wiring pattern

Dry etching suppressing formation of notch

Method of manufacturing a semiconductor device using antireflection...

Method of measuring electron shading damage

Manufacture of semiconductor device with fine pattens

Method of measuring electron shading damage

Interconnection with metal plug and reduced step

Metal plug with adhesion layer

Method for manufacturing a semiconductor device using antireflectio...

Controlled taper etching

Method of forming an interconnection with metal plug and reduced step

Dry etching with less particles

Multilayer aluminum wiring in semiconductor IC

Method of etching polysilicon using a thin oxide mask formed on the...

Method of making a wiring layer wherein the masking material is ash...

Method of forming multilayer aluminum wiring in semiconductor IC

Patents Applicationslast 30 patents

Method of manufacturing semiconductor device

Wiring forming method

Wiring forming method