Ta-Hung Yang

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Word line structure and method of manufacturing the same
- Patent number 10,892,265
- Issue date Jan 12, 2021
- Macronix International Co., Ltd.
- Chi-Min Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate and semiconductor device
- Patent number 10,497,652
- Issue date Dec 3, 2019
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit device with layered trench conductors
- Patent number 10,388,664
- Issue date Aug 20, 2019
- Macronix International Co., Ltd.
- Yukai Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inverted-T shaped via for reducing adverse stress-migration effects
- Patent number 9,905,509
- Issue date Feb 27, 2018
- Macronix International Co., Ltd.
- Yen-Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for detecting defects of wafer by wafer sort
- Patent number 9,869,712
- Issue date Jan 16, 2018
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring and analyzing surface structure of chip or wafer
- Patent number 9,589,086
- Issue date Mar 7, 2017
- Macronix International Co., Ltd.
- Tuung Luoh
- G02 - OPTICS
Information Patent Grant
Method of fabricating three-dimensional gate-all-around vertical ga...
- Patent number 9,466,610
- Issue date Oct 11, 2016
- Macronix International Co., Ltd.
- Ta-Hone Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating deep trench semiconductor devices, and deep t...
- Patent number 9,349,746
- Issue date May 24, 2016
- Macronix International Co., Ltd.
- Ta-Hone Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching composition
- Patent number 9,305,794
- Issue date Apr 5, 2016
- Macronix International Co., Ltd.
- Ta-Hone Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of word-line formation by semi-damascene process with thin p...
- Patent number 9,252,153
- Issue date Feb 2, 2016
- Macronix International Co., Ltd.
- Cheng-Yi Lung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting an electrical defect of contact/via plugs
- Patent number 9,244,112
- Issue date Jan 26, 2016
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of line-edge-roughness and line-width-roughness on pre-...
- Patent number 9,236,219
- Issue date Jan 12, 2016
- Macronix International Co., Ltd.
- Yu-Chung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection optimization
- Patent number 9,116,108
- Issue date Aug 25, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting bitmap failure associated with physical coordinate
- Patent number 9,006,003
- Issue date Apr 14, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Method for improving flatness of a layer deposited on polycrystalli...
- Patent number 8,669,184
- Issue date Mar 11, 2014
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolation structure, non-volatile memory having the same, and metho...
- Patent number 8,653,592
- Issue date Feb 18, 2014
- Macronix International Co., Ltd.
- Ming-Da Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-line inspection yield prediction system
- Patent number 8,594,963
- Issue date Nov 26, 2013
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming a deposited material by utilizing a multi-step de...
- Patent number 8,520,194
- Issue date Aug 27, 2013
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device having plural conductive layers disposed withi...
- Patent number 8,519,541
- Issue date Aug 27, 2013
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing a silicon-containing material by utilizing a m...
- Patent number 8,184,288
- Issue date May 22, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Multivariate monitoring method for plasma process machine
- Patent number 8,085,390
- Issue date Dec 27, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Lithography systems and processes
- Patent number 8,072,577
- Issue date Dec 6, 2011
- Macronix International Co., Ltd.
- Tzong Hsien Wu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Isolation structure, non-volatile memory having the same, and metho...
- Patent number 8,067,292
- Issue date Nov 29, 2011
- Macronix International Co., Ltd.
- Ming-Da Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD...
- Patent number 8,034,691
- Issue date Oct 11, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of metal film stacks having improved bottom critical di...
- Patent number 7,960,835
- Issue date Jun 14, 2011
- Macronix International Co., Ltd.
- Han-Hui Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a pattern
- Patent number 7,939,451
- Issue date May 10, 2011
- Macronix International Co., Ltd.
- Shih-Chang Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact barrier layer deposition process
- Patent number 7,846,835
- Issue date Dec 7, 2010
- Macronix International Co. LTD
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal pad formation method and metal pad structure using the same
- Patent number 7,786,023
- Issue date Aug 31, 2010
- Macronix International Co., Ltd.
- Yung-Tai Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming dielectric layer
- Patent number 7,648,921
- Issue date Jan 19, 2010
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling system and method for operating the same
- Patent number 7,632,616
- Issue date Dec 15, 2009
- Macronix International Co., Ltd.
- Chao-Lung Lo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING MEMORY DEVICE
- Publication number 20250105017
- Publication date Mar 27, 2025
- Macronix International Co., Ltd.
- Hsun-Wei Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF MEMORY DEVICE AND MANUFACTURING METHOD OF T...
- Publication number 20250089258
- Publication date Mar 13, 2025
- Macronix International Co., Ltd.
- Meng-Hsun Hsieh
Information Patent Application
WORD LINE STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200273868
- Publication date Aug 27, 2020
- Macronix International Co., Ltd.
- Chi-Min Chen
- G11 - INFORMATION STORAGE
Information Patent Application
3D INTEGRATED CIRCUIT DEVICE HAVING A BUTTRESS STRUCTURE FOR RESIST...
- Publication number 20180337140
- Publication date Nov 22, 2018
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D MEMORY DEVICE WITH LAYERED CONDUCTORS
- Publication number 20180269222
- Publication date Sep 20, 2018
- Macronix International Co., Ltd.
- Yukai Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICE WITH LAYERED TRENCH CONDUCTORS
- Publication number 20180269225
- Publication date Sep 20, 2018
- Macronix International Co., Ltd.
- Yukai HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATION STRUCTURE AND METHOD FOR FABRICATING THE SAME
- Publication number 20170076976
- Publication date Mar 16, 2017
- Macronix International Co., Ltd.
- Chin-Tsan Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE-ALL-AROUND VERTICAL GATE MEMORY STRUCTURES AND SEMICONDUCTOR D...
- Publication number 20160358932
- Publication date Dec 8, 2016
- Macronix International Co., Ltd.
- Ta-Hone Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR DETECTING DEFECTS OF WAFER BY WAFER SORT
- Publication number 20160314237
- Publication date Oct 27, 2016
- Macronix International Co., Ltd.
- Tuung Luoh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF FABRICATING THREE-DIMENSIONAL GATE-ALL-AROUND VERTICAL GA...
- Publication number 20160284725
- Publication date Sep 29, 2016
- Macronix International Co., Ltd.
- Ta-Hone Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of fabricating three-dimensional semiconductor devices, and...
- Publication number 20160204123
- Publication date Jul 14, 2016
- Macronix International Co., Ltd.
- Ta-Hone Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO STRUCTURE
- Publication number 20160172294
- Publication date Jun 16, 2016
- Macronix International Co., Ltd.
- Sheng-Yuan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD FOR CONTACT BY DIE TO DATABASE
- Publication number 20160110859
- Publication date Apr 21, 2016
- Macronix International Co., Ltd.
- Tuung Luoh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INVERTED-T SHAPED VIA FOR REDUCING ADVERSE STRESS-MIGRATION EFFECTS
- Publication number 20160027729
- Publication date Jan 28, 2016
- Macronix International Co., Ltd.
- Yen-Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING METHOD AND PATTERNING APPARATUS
- Publication number 20150357203
- Publication date Dec 10, 2015
- Macronix International Co., Ltd.
- Ta-Hone Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETECTING AN ELECTRICAL DEFECT OF CONTACT/VIA PLUGS
- Publication number 20150323583
- Publication date Nov 12, 2015
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Application
ETCHING METHOD AND ETCHING COMPOSITION
- Publication number 20150287608
- Publication date Oct 8, 2015
- Macronix International Co., Ltd.
- Ta-Hone Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM INSPECTION OPTIMIZATION
- Publication number 20150226687
- Publication date Aug 13, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING AND ANALYZING SURFACE STRUCTURE OF CHIP OR WAFER
- Publication number 20150213172
- Publication date Jul 30, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Application
IMAGE INSPECTION METHOD OF DIE TO DATABASE
- Publication number 20150110384
- Publication date Apr 23, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT OF LINE-EDGE-ROUGHNESS AND LINE-WIDTH-ROUGHNESS ON PRE-...
- Publication number 20140264016
- Publication date Sep 18, 2014
- Macronix International Co., Ltd.
- YU-CHUNG CHEN
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR IMPROVING FLATNESS OF A LAYER DEPOSITED ON POLYCRYSTALLI...
- Publication number 20120190198
- Publication date Jul 26, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATION STRUCTURE, NON-VOLATILE MEMORY HAVING THE SAME, AND METHO...
- Publication number 20120049269
- Publication date Mar 1, 2012
- Macronix International Co., Ltd.
- Ming-Da Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LINE INSPECTION YIELD PREDICTION SYSTEM
- Publication number 20120053855
- Publication date Mar 1, 2012
- MACRONIX INTERNATIONAL CO., LTD
- Hsiang-Chou Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HDP-CVD SYSTEM
- Publication number 20120000423
- Publication date Jan 5, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO STEP CHEMICAL-MECHANICAL POLISHING PROCESS
- Publication number 20110275216
- Publication date Nov 10, 2011
- MACRONIX INTERNATIONAL CO., LTD
- Chun Fu Chen
- B24 - GRINDING POLISHING
Information Patent Application
CONTACT BARRIER LAYER DEPOSITION PROCESS
- Publication number 20110056432
- Publication date Mar 10, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF METAL FILM STACKS HAVING IMPROVED BOTTOM CRITICAL DI...
- Publication number 20100276807
- Publication date Nov 4, 2010
- Han-Hui Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING DEVICE ISOLATION STRUCTURE
- Publication number 20100244180
- Publication date Sep 30, 2010
- Macronix International Co., Ltd.
- Yung-Tai Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HDP-CVD PROCESS, FILLING-IN PROCESS UTILIZING HDP-CVD, AND HDP-CVD...
- Publication number 20100041245
- Publication date Feb 18, 2010
- Macronix International Co., Ltd.
- Tuung Luoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ta-Hung Yang

Person

Patents Grantslast 30 patents

Word line structure and method of manufacturing the same

Semiconductor substrate and semiconductor device

Integrated circuit device with layered trench conductors

Inverted-T shaped via for reducing adverse stress-migration effects

Method and system for detecting defects of wafer by wafer sort

Method for measuring and analyzing surface structure of chip or wafer

Method of fabricating three-dimensional gate-all-around vertical ga...

Method of fabricating deep trench semiconductor devices, and deep t...

Etching method and etching composition

Method of word-line formation by semi-damascene process with thin p...

Method for detecting an electrical defect of contact/via plugs

Measurement of line-edge-roughness and line-width-roughness on pre-...

Electron beam inspection optimization

Method of detecting bitmap failure associated with physical coordinate

Method for improving flatness of a layer deposited on polycrystalli...

Isolation structure, non-volatile memory having the same, and metho...

In-line inspection yield prediction system

Method of forming a deposited material by utilizing a multi-step de...

Semiconductor device having plural conductive layers disposed withi...

Method of depositing a silicon-containing material by utilizing a m...

Multivariate monitoring method for plasma process machine

Lithography systems and processes

Isolation structure, non-volatile memory having the same, and metho...

HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD...

Fabrication of metal film stacks having improved bottom critical di...

Method for fabricating a pattern

Contact barrier layer deposition process

Metal pad formation method and metal pad structure using the same

Method of forming dielectric layer

Controlling system and method for operating the same

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING MEMORY DEVICE

MANUFACTURING METHOD OF MEMORY DEVICE AND MANUFACTURING METHOD OF T...

WORD LINE STRUCTURE AND METHOD OF MANUFACTURING THE SAME

3D INTEGRATED CIRCUIT DEVICE HAVING A BUTTRESS STRUCTURE FOR RESIST...

3D MEMORY DEVICE WITH LAYERED CONDUCTORS

INTEGRATED CIRCUIT DEVICE WITH LAYERED TRENCH CONDUCTORS

ISOLATION STRUCTURE AND METHOD FOR FABRICATING THE SAME

GATE-ALL-AROUND VERTICAL GATE MEMORY STRUCTURES AND SEMICONDUCTOR D...

METHOD AND SYSTEM FOR DETECTING DEFECTS OF WAFER BY WAFER SORT

METHOD OF FABRICATING THREE-DIMENSIONAL GATE-ALL-AROUND VERTICAL GA...

Method of fabricating three-dimensional semiconductor devices, and...

HIGH ASPECT RATIO STRUCTURE

INSPECTION METHOD FOR CONTACT BY DIE TO DATABASE

INVERTED-T SHAPED VIA FOR REDUCING ADVERSE STRESS-MIGRATION EFFECTS

PATTERNING METHOD AND PATTERNING APPARATUS

METHOD FOR DETECTING AN ELECTRICAL DEFECT OF CONTACT/VIA PLUGS

ETCHING METHOD AND ETCHING COMPOSITION

ELECTRON BEAM INSPECTION OPTIMIZATION

METHOD FOR MEASURING AND ANALYZING SURFACE STRUCTURE OF CHIP OR WAFER

IMAGE INSPECTION METHOD OF DIE TO DATABASE

MEASUREMENT OF LINE-EDGE-ROUGHNESS AND LINE-WIDTH-ROUGHNESS ON PRE-...

METHOD FOR IMPROVING FLATNESS OF A LAYER DEPOSITED ON POLYCRYSTALLI...

ISOLATION STRUCTURE, NON-VOLATILE MEMORY HAVING THE SAME, AND METHO...

IN-LINE INSPECTION YIELD PREDICTION SYSTEM

HDP-CVD SYSTEM

TWO STEP CHEMICAL-MECHANICAL POLISHING PROCESS

CONTACT BARRIER LAYER DEPOSITION PROCESS

FABRICATION OF METAL FILM STACKS HAVING IMPROVED BOTTOM CRITICAL DI...

METHOD FOR FABRICATING DEVICE ISOLATION STRUCTURE

HDP-CVD PROCESS, FILLING-IN PROCESS UTILIZING HDP-CVD, AND HDP-CVD...