Tadakazu Sone

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for polishing, processing system, and method of polishing
- Patent number 12,179,312
- Issue date Dec 31, 2024
- Ebara Corporation
- Takuya Moriura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device, polishing method, and recording medium for record...
- Patent number 11,980,998
- Issue date May 14, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,839,948
- Issue date Dec 12, 2023
- Ebara Corporation
- Takashi Yamazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing and method for polishing
- Patent number 11,642,755
- Issue date May 9, 2023
- Ebara Corporation
- Pohan Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,612,983
- Issue date Mar 28, 2023
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 11,472,002
- Issue date Oct 18, 2022
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for polishing and method for polishing
- Patent number 11,465,256
- Issue date Oct 11, 2022
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing and method for polishing
- Patent number 11,413,723
- Issue date Aug 16, 2022
- Ebara Corporation
- Pohan Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,007,621
- Issue date May 18, 2021
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Calibration method and non-transitory computer-readable storage med...
- Patent number 10,987,776
- Issue date Apr 27, 2021
- Ebara Corporation
- Pohan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Turntable cloth peeling jig
- Patent number 10,730,162
- Issue date Aug 4, 2020
- Ebara Corporation
- Hiroshi Sotozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate polishing apparatus
- Patent number 10,576,604
- Issue date Mar 3, 2020
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary joint and polishing apparatus
- Patent number 9,764,446
- Issue date Sep 19, 2017
- Ebara Corporation
- Hideo Aizawa
- B24 - GRINDING POLISHING
Information Patent Grant
Cover for component of polishing apparatus, component of polishing...
- Patent number 9,724,798
- Issue date Aug 8, 2017
- Ebara Corporation
- Kenji Shinkai
- B24 - GRINDING POLISHING
Information Patent Grant
Lifting device, substrate processing apparatus having lifting devic...
- Patent number 9,666,469
- Issue date May 30, 2017
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and wear detection method
- Patent number 9,530,704
- Issue date Dec 27, 2016
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,522,453
- Issue date Dec 20, 2016
- Ebara Corporation
- Hideo Aizawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus having temperature regulator for polishing pad
- Patent number 9,475,167
- Issue date Oct 25, 2016
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,409,277
- Issue date Aug 9, 2016
- Ebara Corporation
- Masao Umemoto
- B24 - GRINDING POLISHING
Information Patent Grant
Gas-liquid separator and polishing apparatus
- Patent number 9,216,442
- Issue date Dec 22, 2015
- Ebara Corporation
- Hideo Aizawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with polishing head cover
- Patent number 9,174,324
- Issue date Nov 3, 2015
- Ebara Corporation
- Masao Umemoto
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and wear detection method
- Patent number 9,144,878
- Issue date Sep 29, 2015
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,028,297
- Issue date May 12, 2015
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus, substrate polishing method, and appa...
- Patent number 8,845,391
- Issue date Sep 30, 2014
- Ebara Corporation
- Tadakazu Sone
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer transferring apparatus, polishing apparatus, and wafer receiv...
- Patent number 8,118,640
- Issue date Feb 21, 2012
- Ebara Corporation
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,969,305
- Issue date Nov 29, 2005
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,824,454
- Issue date Nov 30, 2004
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with air exhaust system
- Patent number 6,783,427
- Issue date Aug 31, 2004
- Ebara Corporation
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece polishing apparatus comprising a fluid pressure bag provi...
- Patent number 6,435,949
- Issue date Aug 20, 2002
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
- Publication number 20210283746
- Publication date Sep 16, 2021
- EBARA CORPORATION
- Takuya MORIURA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...
- Publication number 20210229235
- Publication date Jul 29, 2021
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20210229240
- Publication date Jul 29, 2021
- EBARA CORPORATION
- Hiroshi SOTOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING DEVICE, POLISHING METHOD, AND RECORDING MEDIUM FOR RECORD...
- Publication number 20200269385
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20200198093
- Publication date Jun 25, 2020
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20200171621
- Publication date Jun 4, 2020
- EBARA CORPORATION
- Takashi Yamazaki
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING AND METHOD FOR POLISHING
- Publication number 20200039029
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING AND METHOD FOR POLISHING
- Publication number 20200039031
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Pohan Chen
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190299360
- Publication date Oct 3, 2019
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...
- Publication number 20190168354
- Publication date Jun 6, 2019
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
CALIBRATION METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MED...
- Publication number 20180345454
- Publication date Dec 6, 2018
- EBARA CORPORATION
- Pohan CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN
- Publication number 20180304320
- Publication date Oct 25, 2018
- EBARA CORPORATION
- Hiroshi Aono
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20180290263
- Publication date Oct 11, 2018
- EBARA CORPORATION
- Hiroshi SOTOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
TURNTABLE CLOTH PEELING JIG
- Publication number 20180009081
- Publication date Jan 11, 2018
- EBARA CORPORATION
- Hiroshi Sotozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER FOR COMPONENT OF POLISHING APPARATUS, COMPONENT OF POLISHING...
- Publication number 20170008144
- Publication date Jan 12, 2017
- Kenji SHINKAI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN
- Publication number 20160256900
- Publication date Sep 8, 2016
- EBARA CORPORATION
- Hiroshi Aono
- B08 - CLEANING
Information Patent Application
WORKPIECE TRANSPORT DEVICE
- Publication number 20160233118
- Publication date Aug 11, 2016
- Ryuichi KOSUGE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
POLISHING APPARATUS
- Publication number 20160008948
- Publication date Jan 14, 2016
- EBARA CORPORATION
- Hideo AIZAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND WEAR DETECTION METHOD
- Publication number 20150364391
- Publication date Dec 17, 2015
- EBARA CORPORATION
- Ryuichi Kosuge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20150314418
- Publication date Nov 5, 2015
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
ROTARY JOINT AND POLISHING APPARATUS
- Publication number 20150290769
- Publication date Oct 15, 2015
- EBARA CORPORATION
- Hideo AIZAWA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20150273659
- Publication date Oct 1, 2015
- EBARA CORPORATION
- Hiroshi Aono
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS, METHOD FOR ATTACHING POLISHING PAD, AND METHOD...
- Publication number 20150118944
- Publication date Apr 30, 2015
- EBARA CORPORATION
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Application
LIFTING DEVICE, SUBSTRATE PROCESSING APPARATUS HAVING LIFTING DEVIC...
- Publication number 20150082613
- Publication date Mar 26, 2015
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...
- Publication number 20140364040
- Publication date Dec 11, 2014
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND WEAR DETECTION METHOD
- Publication number 20140295737
- Publication date Oct 2, 2014
- Ryuichi Kosuge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20140213158
- Publication date Jul 31, 2014
- EBARA CORPORATION
- Masao UMEMOTO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140162536
- Publication date Jun 12, 2014
- Masao UMEMOTO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20140080385
- Publication date Mar 20, 2014
- Masao UMEMOTO
- B24 - GRINDING POLISHING
Information Patent Application
WORKPIECE TRANSPORT DEVICE
- Publication number 20140030048
- Publication date Jan 30, 2014
- EBARA CORPORATION
- Ryuichi KOSUGE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Tadakazu Sone

Person

Patents Grantslast 30 patents

Apparatus for polishing, processing system, and method of polishing

Polishing device, polishing method, and recording medium for record...

Polishing apparatus

Apparatus for polishing and method for polishing

Polishing apparatus and polishing method

Substrate polishing apparatus

Apparatus for polishing and method for polishing

Apparatus for polishing and method for polishing

Polishing apparatus and polishing method

Calibration method and non-transitory computer-readable storage med...

Turntable cloth peeling jig

Substrate polishing apparatus

Rotary joint and polishing apparatus

Cover for component of polishing apparatus, component of polishing...

Lifting device, substrate processing apparatus having lifting devic...

Polishing apparatus and wear detection method

Polishing apparatus

Polishing apparatus having temperature regulator for polishing pad

Polishing apparatus and polishing method

Gas-liquid separator and polishing apparatus

Polishing apparatus with polishing head cover

Polishing apparatus and wear detection method

Polishing apparatus

Substrate polishing apparatus, substrate polishing method, and appa...

Wafer transferring apparatus, polishing apparatus, and wafer receiv...

Polishing apparatus

Polishing apparatus

Polishing system with air exhaust system

Workpiece polishing apparatus comprising a fluid pressure bag provi...

Patents Applicationslast 30 patents

APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...

POLISHING APPARATUS AND POLISHING METHOD

POLISHING DEVICE, POLISHING METHOD, AND RECORDING MEDIUM FOR RECORD...

SUBSTRATE POLISHING APPARATUS

POLISHING APPARATUS

APPARATUS FOR POLISHING AND METHOD FOR POLISHING

APPARATUS FOR POLISHING AND METHOD FOR POLISHING

POLISHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...

CALIBRATION METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MED...

SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN

POLISHING APPARATUS AND POLISHING METHOD

TURNTABLE CLOTH PEELING JIG

COVER FOR COMPONENT OF POLISHING APPARATUS, COMPONENT OF POLISHING...

SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN

WORKPIECE TRANSPORT DEVICE

POLISHING APPARATUS

POLISHING APPARATUS AND WEAR DETECTION METHOD

SUBSTRATE POLISHING APPARATUS

ROTARY JOINT AND POLISHING APPARATUS

SUBSTRATE POLISHING APPARATUS

POLISHING APPARATUS, METHOD FOR ATTACHING POLISHING PAD, AND METHOD...

LIFTING DEVICE, SUBSTRATE PROCESSING APPARATUS HAVING LIFTING DEVIC...

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...

POLISHING APPARATUS AND WEAR DETECTION METHOD

POLISHING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS

WORKPIECE TRANSPORT DEVICE