Takafumi Sasaki

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device capable of controlling...
- Patent number 12,211,689
- Issue date Jan 28, 2025
- Kokusai Electric Corporation
- Keigo Nishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,203,167
- Issue date Jan 21, 2025
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning member in process container, method of manufactu...
- Patent number 12,053,805
- Issue date Aug 6, 2024
- Kokusai Electric Corporation
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,898,247
- Issue date Feb 13, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,859,280
- Issue date Jan 2, 2024
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, quartz reaction tube and method of...
- Patent number 11,685,992
- Issue date Jun 27, 2023
- Kokusai Electric Corporation
- Yusaku Okajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,453,942
- Issue date Sep 27, 2022
- Kokusai Electric Corporation
- Hidetoshi Mimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boat for wafer processing apparatus
- Patent number D939459
- Issue date Dec 28, 2021
- Kokusai Electric Corporation
- Hironori Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 10,978,361
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Takafumi Sasaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Cover of seal cap for reaction chamber for semiconductor
- Patent number D916037
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, reaction tube and method of manufac...
- Patent number 10,961,625
- Issue date Mar 30, 2021
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,923,366
- Issue date Feb 16, 2021
- Kokusai Electric Corporation
- Yusaku Okajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,808,318
- Issue date Oct 20, 2020
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cover of seal cap for reaction chamber for semiconductor manufacturing
- Patent number D872037
- Issue date Jan 7, 2020
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, reaction tube, semiconductor device...
- Patent number 10,453,735
- Issue date Oct 22, 2019
- Kokusai Electric Corporation
- Yusaku Okajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,424,520
- Issue date Sep 24, 2019
- Kokusai Electric Corporation
- Takafumi Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,388,512
- Issue date Aug 20, 2019
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and method of processi...
- Patent number 10,290,494
- Issue date May 14, 2019
- Kokusai Electric Corporation
- Masanao Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Return nozzle
- Patent number D847301
- Issue date Apr 30, 2019
- Kokusai Electric Corporation
- Hidenari Yoshida
- D23 - Environmental heating and cooling
Information Patent Grant
Reaction tube
- Patent number D843958
- Issue date Mar 26, 2019
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Reaction tube
- Patent number D842823
- Issue date Mar 12, 2019
- Kokusai Electric Corporation
- Yusaku Okajima
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device and s...
- Patent number 9,982,347
- Issue date May 29, 2018
- Hitachi Kokusai Electric, Inc.
- Takatomo Yamaguchi
- B08 - CLEANING
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,644,265
- Issue date May 9, 2017
- Hitachi Kokusai Electric, Inc.
- Takafumi Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube, substrate processing apparatus, and method of manufa...
- Patent number 9,412,582
- Issue date Aug 9, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,365,928
- Issue date Jun 14, 2016
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and substrate manufacturi...
- Patent number 9,177,799
- Issue date Nov 3, 2015
- Hitachi Kokusai Electric, Inc.
- Yoshinori Imai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,163,309
- Issue date Oct 20, 2015
- Hitachi Kokusai Electric, Inc.
- Tetsuo Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube
- Patent number D739832
- Issue date Sep 29, 2015
- Hitachi Kokusai Electric Inc.
- Keishin Yamazaki
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, method for manufacturing substrate,...
- Patent number 9,082,694
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,028,614
- Issue date May 12, 2015
- Hitachi Kokusai Electric Inc.
- Daisuke Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...
- Publication number 20250118549
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250101583
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240141490
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Mika Urushihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240084448
- Publication date Mar 14, 2024
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...
- Publication number 20230253222
- Publication date Aug 10, 2023
- Kokusai Electric Corporation
- Kenta Kasamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230227979
- Publication date Jul 20, 2023
- Kokusai Electric Corporation
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20220403510
- Publication date Dec 22, 2022
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION TUBE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFAC...
- Publication number 20220307137
- Publication date Sep 29, 2022
- Kokusai Electric Corporation
- Kenta KASAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF PRO...
- Publication number 20220119949
- Publication date Apr 21, 2022
- Kokusai Electric Corporation
- Yoshimasa NAGATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210207268
- Publication date Jul 8, 2021
- Kokusai Electric Corporation
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20210202232
- Publication date Jul 1, 2021
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER
- Publication number 20210043485
- Publication date Feb 11, 2021
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, QUARTZ REACTION TUBE AND METHOD OF...
- Publication number 20200149159
- Publication date May 14, 2020
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20200098653
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20200066551
- Publication date Feb 27, 2020
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20190345605
- Publication date Nov 14, 2019
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Reaction Tube and Method of Manufac...
- Publication number 20190330738
- Publication date Oct 31, 2019
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...
- Publication number 20190255576
- Publication date Aug 22, 2019
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, SEMICONDUCTOR DEVICE...
- Publication number 20190096738
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190071777
- Publication date Mar 7, 2019
- Kokusai Electric Corporation
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190017169
- Publication date Jan 17, 2019
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MA...
- Publication number 20180202043
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20180151347
- Publication date May 31, 2018
- Hitachi Kokusai Electric Inc.
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND S...
- Publication number 20180044794
- Publication date Feb 15, 2018
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170271176
- Publication date Sep 21, 2017
- Hitachi Kokusai Electric, Inc.
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160376699
- Publication date Dec 29, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20160322217
- Publication date Nov 3, 2016
- Hitachi Kokusai Electric Inc.
- Masanao FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND GAS DISTRIBUTION ASSEMBLY THEREOF
- Publication number 20160068952
- Publication date Mar 10, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150371875
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150361554
- Publication date Dec 17, 2015
- Hitachi Kokusai Electric Inc.
- Tetsuo YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takafumi Sasaki

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device capable of controlling...

Substrate processing apparatus and method of manufacturing semicond...

Method of cleaning member in process container, method of manufactu...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, quartz reaction tube and method of...

Substrate processing apparatus and method of manufacturing semicond...

Boat for wafer processing apparatus

Substrate processing apparatus and recording medium

Cover of seal cap for reaction chamber for semiconductor

Substrate processing apparatus, reaction tube and method of manufac...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, method of manufacturing semiconduct...

Cover of seal cap for reaction chamber for semiconductor manufacturing

Substrate processing apparatus, reaction tube, semiconductor device...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device and method of processi...

Return nozzle

Reaction tube

Reaction tube

Cleaning method, method of manufacturing semiconductor device and s...

Method of manufacturing semiconductor device, substrate processing...

Reaction tube, substrate processing apparatus, and method of manufa...

Substrate processing apparatus, method for manufacturing semiconduc...

Semiconductor device manufacturing method and substrate manufacturi...

Substrate processing apparatus, method of manufacturing semiconduct...

Reaction tube

Substrate processing apparatus, method for manufacturing substrate,...

Substrate processing apparatus

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

REACTION TUBE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFAC...

SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF PRO...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER

SUBSTRATE PROCESSING APPARATUS, QUARTZ REACTION TUBE AND METHOD OF...

SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

Substrate Processing Apparatus, Reaction Tube and Method of Manufac...

METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTU...

SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, SEMICONDUCTOR DEVICE...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MA...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND S...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND GAS DISTRIBUTION ASSEMBLY THEREOF

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS