Takashi YAHATA

Person

Oume-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,136,545
- Issue date Nov 5, 2024
- Kokusai Electric Corporation
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,990,347
- Issue date May 21, 2024
- Kokusai Electric Corporation
- Takashi Yahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate retainer and method of ma...
- Patent number 11,961,715
- Issue date Apr 16, 2024
- Kokusai Electric Corporation
- Daisuke Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,891,697
- Issue date Feb 6, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, non-transitory computer-readable re...
- Patent number 11,495,435
- Issue date Nov 8, 2022
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 11,359,285
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,305,986
- Issue date Apr 19, 2022
- Kokusai Electric Corporation
- Takashi Yahata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,289,350
- Issue date Mar 29, 2022
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,264,217
- Issue date Mar 1, 2022
- Kokusai Electric Corporation
- Takashi Yahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,227,750
- Issue date Jan 18, 2022
- Kokusai Electric Corporation
- Takashi Yahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,145,505
- Issue date Oct 12, 2021
- Kokusai Electric Corporation
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,104,995
- Issue date Aug 31, 2021
- Kokusai Electric Corporation
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus having gas guide capable of suppress...
- Patent number 10,914,005
- Issue date Feb 9, 2021
- Kokusai Electric Corporation
- Takashi Yahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,796,934
- Issue date Oct 6, 2020
- Kokusai Electric Corporation
- Tsuyoshi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,633,739
- Issue date Apr 28, 2020
- Kokusai Electric Corporation
- Yukitomo Hirochi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 10,597,780
- Issue date Mar 24, 2020
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,541,170
- Issue date Jan 21, 2020
- Kokusai Electric Corporation
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,453,720
- Issue date Oct 22, 2019
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus capable of adjusting flow rate of in...
- Patent number 10,184,177
- Issue date Jan 22, 2019
- Kokusai Electric Corporation
- Takashi Yahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and heating unit
- Patent number 9,957,616
- Issue date May 1, 2018
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D795209
- Issue date Aug 22, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D793975
- Issue date Aug 8, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,340,879
- Issue date May 17, 2016
- Hitachi Kokusai Electric Inc.
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240047180
- Publication date Feb 8, 2024
- Kokusai Electric Corporation
- Daisuke HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus
- Publication number 20230029994
- Publication date Feb 2, 2023
- Kokusai Electric Corporation
- Teruo YOSHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220262632
- Publication date Aug 18, 2022
- Kokusai Electric Corporation
- Takashi YAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System
- Publication number 20220090263
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220090264
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210395887
- Publication date Dec 23, 2021
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210296111
- Publication date Sep 23, 2021
- Kokusai Electric Corporation
- Takashi YAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210210356
- Publication date Jul 8, 2021
- Kokusai Electric Corporation
- Takashi YAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210180185
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Daisuke HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...
- Publication number 20210183670
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Daisuke HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210035784
- Publication date Feb 4, 2021
- Kokusai Electric Corporation
- Takashi YAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200399759
- Publication date Dec 24, 2020
- Kokusai Electric Corporation
- Kazuhiko YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20200399757
- Publication date Dec 24, 2020
- Kokusai Electric Corporation
- Daisuke HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20200365367
- Publication date Nov 19, 2020
- Kokusai Electric Corporation
- Teruo YOSHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200346924
- Publication date Nov 5, 2020
- Kokusai Electric Corporation
- Takashi YAHATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200312632
- Publication date Oct 1, 2020
- Kokusai Electric Corporation
- Daisuke HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312625
- Publication date Oct 1, 2020
- Kokusai Electric Corporation
- Teruo YOSHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20200173024
- Publication date Jun 4, 2020
- Kokusai Electric Corporation
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200087785
- Publication date Mar 19, 2020
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200035523
- Publication date Jan 30, 2020
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20190287843
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20190206705
- Publication date Jul 4, 2019
- Kokusai Electric Corporation
- Tsuyoshi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS CAPABLE OF ADJUSTING FLOW RATE OF IN...
- Publication number 20190032213
- Publication date Jan 31, 2019
- Kokusai Electric Corporation
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180158714
- Publication date Jun 7, 2018
- Hitachi Kokusai Electric Inc.
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20170335458
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20170283949
- Publication date Oct 5, 2017
- Hitachi Kokusai Electric Inc.
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20170283945
- Publication date Oct 5, 2017
- Hitachi Kokusai Electric Inc.
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170253968
- Publication date Sep 7, 2017
- Hitachi Kokusai Electric Inc.
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT
- Publication number 20160244878
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20150270119
- Publication date Sep 24, 2015
- Hitachi Kokusai Electric Inc.
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takashi YAHATA

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Substrate processing apparatus, substrate retainer and method of ma...

Substrate processing apparatus

Substrate processing apparatus, non-transitory computer-readable re...

Substrate processing apparatus, heater and method of manufacturing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Substrate processing apparatus

Substrate processing apparatus

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus

Substrate processing apparatus having gas guide capable of suppress...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus

Substrate processing apparatus, heater and method of manufacturing...

Substrate processing apparatus and method of manufacturing semicond...

Method of manufacturing semiconductor device

Substrate processing apparatus capable of adjusting flow rate of in...

Substrate processing apparatus and heating unit

Heater for semiconductor thermal process

Heater for semiconductor thermal process

Substrate processing apparatus, method for manufacturing semiconduc...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

Substrate Processing Apparatus

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Substrate Processing System

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Method of Manufacturing Semiconductor Device, Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

Substrate Processing Apparatus

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus, Heater and Method of Manufacturing...

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS CAPABLE OF ADJUSTING FLOW RATE OF IN...

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus, Heater and Method of Manufacturing...

Substrate Processing Apparatus

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...