Takeshi Yokouchi

Person

Miyagi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas supply method
- Patent number 9,732,909
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
- Patent number 8,790,529
- Issue date Jul 29, 2014
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,475,623
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,257,601
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method for examining substrate proc...
- Patent number 8,190,281
- Issue date May 29, 2012
- Tokyo Electron Limited
- Takeshi Yokouchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
- Patent number 7,896,967
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pressure control method and processing device
- Patent number 7,553,773
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- Eiji Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for electrically discharging substrate, substrate processing...
- Patent number 7,535,688
- Issue date May 19, 2009
- Tokyo Electron Limited
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure control method and processing device
- Patent number 6,908,864
- Issue date Jun 21, 2005
- Tokyo Electron Limited
- Eiji Hirose
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY METHOD
- Publication number 20140332100
- Publication date Nov 13, 2014
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20120292290
- Publication date Nov 22, 2012
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...
- Publication number 20110224818
- Publication date Sep 15, 2011
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...
- Publication number 20110190924
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20110171830
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
- Publication number 20110120563
- Publication date May 26, 2011
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...
- Publication number 20070227658
- Publication date Oct 4, 2007
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXAMINING SUBSTRATE PROC...
- Publication number 20070212846
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...
- Publication number 20070199655
- Publication date Aug 30, 2007
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
- Publication number 20070181255
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for electrically discharging substrate, substrate processing...
- Publication number 20060215338
- Publication date Sep 28, 2006
- TOKTO ELECTRON LIMITED
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, system and program
- Publication number 20060090703
- Publication date May 4, 2006
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure control method and processing device
- Publication number 20050176258
- Publication date Aug 11, 2005
- TOKYO ELECTRON LIMITED
- Eiji Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure control method
- Publication number 20020182878
- Publication date Dec 5, 2002
- Eiji Hirose
- H01 - BASIC ELECTRIC ELEMENTS

Takeshi Yokouchi

Person

Patents Grantslast 30 patents

Gas supply method

Gas supply system, substrate processing apparatus and gas supply me...

Substrate processing method, system and program

Substrate processing method, system and program

Substrate processing apparatus, method for examining substrate proc...

Gas supply system, substrate processing apparatus and gas supply me...

Pressure control method and processing device

Method for electrically discharging substrate, substrate processing...

Pressure control method and processing device

Patents Applicationslast 30 patents

GAS SUPPLY METHOD

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...

CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...

CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXAMINING SUBSTRATE PROC...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...

Method for electrically discharging substrate, substrate processing...

Substrate processing method, system and program

Pressure control method and processing device

Pressure control method