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Method and apparatus for forming a film
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Patent number 5,064,520
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Issue date Nov 12, 1991
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Hitachi, Ltd.
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Kiyoshi Miyake
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device
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Patent number 4,695,856
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Issue date Sep 22, 1987
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Hitachi, Ltd.
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Terunori Warabisako
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma treatment system
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Patent number 4,683,838
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Issue date Aug 4, 1987
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Hitachi, Ltd.
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Shin-Ichiro Kimura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma anodization system
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Patent number 4,585,541
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Issue date Apr 29, 1986
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Hitachi, Ltd.
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Kiyoshi Miyake
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Photocoupling device
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Patent number 4,354,115
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Issue date Oct 12, 1982
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Hitachi, Ltd.
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Terunori Warabisako
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H04 - ELECTRIC COMMUNICATION TECHNIQUE