Tetsuo Taniguchi

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus and method
- Patent number 7,061,575
- Issue date Jun 13, 2006
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and exposure apparatus
- Patent number 6,897,963
- Issue date May 24, 2005
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,850,327
- Issue date Feb 1, 2005
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure method and apparatus
- Patent number 6,753,948
- Issue date Jun 22, 2004
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,724,463
- Issue date Apr 20, 2004
- Nikon Corporation
- Tetsuo Taniguchi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,710,848
- Issue date Mar 23, 2004
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,559,925
- Issue date May 6, 2003
- Nikon Corporation
- Tetsuo Taniguchi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Projection exposure method and apparatus
- Patent number 6,549,266
- Issue date Apr 15, 2003
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 6,549,271
- Issue date Apr 15, 2003
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,525,817
- Issue date Feb 25, 2003
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,496,257
- Issue date Dec 17, 2002
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 6,333,776
- Issue date Dec 25, 2001
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 6,317,195
- Issue date Nov 13, 2001
- Nikon Corporation
- Tetsuo Taniguchi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Projection exposure method with corrections for image displacement
- Patent number 6,312,859
- Issue date Nov 6, 2001
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of adjusting a scanning exposure apparatus and scanning expo...
- Patent number 6,310,680
- Issue date Oct 30, 2001
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection apparatus and method
- Patent number 6,304,317
- Issue date Oct 16, 2001
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical apparatus
- Patent number RE37352
- Issue date Sep 4, 2001
- Nikon Corporation
- Kazuaki Suzuki
- 353 - Optics: image projectors
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,169,602
- Issue date Jan 2, 2001
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,151,122
- Issue date Nov 21, 2000
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method involving variation and co...
- Patent number 6,078,380
- Issue date Jun 20, 2000
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustment method for an optical projection system to change image...
- Patent number 5,945,239
- Issue date Aug 31, 1999
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method that use mark patterns to determine i...
- Patent number 5,841,520
- Issue date Nov 24, 1998
- Nikon Corporatioin
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus having function of detecting intensit...
- Patent number 5,798,838
- Issue date Aug 25, 1998
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and apparatus
- Patent number 5,721,608
- Issue date Feb 24, 1998
- Nikon Corporation
- Tetsuo Taniguchi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Projection exposure method and apparatus
- Patent number 5,710,620
- Issue date Jan 20, 1998
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,677,757
- Issue date Oct 14, 1997
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method with changing imaging char...
- Patent number 5,661,546
- Issue date Aug 26, 1997
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focus detecting method and apparatus
- Patent number 5,650,840
- Issue date Jul 22, 1997
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal distortion compensated projection exposure method and appar...
- Patent number 5,581,324
- Issue date Dec 3, 1996
- Nikon Corporation
- Tsuneo Miyai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposing apparatus
- Patent number 5,424,552
- Issue date Jun 13, 1995
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure system and device production process
- Publication number 20060007415
- Publication date Jan 12, 2006
- Nikon Corporation
- Junichi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and method
- Publication number 20050094115
- Publication date May 5, 2005
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure system and device production process
- Publication number 20050088634
- Publication date Apr 28, 2005
- Nikon Corporation
- Junichi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and lithography system, exposure apparatus and meth...
- Publication number 20040157143
- Publication date Aug 12, 2004
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure method and apparatus
- Publication number 20030035090
- Publication date Feb 20, 2003
- NIKON CORPORATION
- Yuji Imai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection method and apparatus for projection optical systems
- Publication number 20030025908
- Publication date Feb 6, 2003
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20030016338
- Publication date Jan 23, 2003
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus
- Publication number 20030016339
- Publication date Jan 23, 2003
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and method
- Publication number 20030011763
- Publication date Jan 16, 2003
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus
- Publication number 20020080338
- Publication date Jun 27, 2002
- NIKON CORPORATION
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus
- Publication number 20020008863
- Publication date Jan 24, 2002
- NIKON CORPORATION
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and method
- Publication number 20020006561
- Publication date Jan 17, 2002
- NIKON CORPORATION
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and method
- Publication number 20010048514
- Publication date Dec 6, 2001
- NIKON CORPORATION
- Tetsuo Taniguchi
- B60 - VEHICLES IN GENERAL
Information Patent Application
Projection exposure apparatus and method
- Publication number 20010043319
- Publication date Nov 22, 2001
- NIKON CORPORATION
- Tetsuo Taniguchi
- B60 - VEHICLES IN GENERAL

Tetsuo Taniguchi

Person

Patents Grantslast 30 patents

Projection exposure apparatus and method

Stage device and exposure apparatus

Inspection method and apparatus for projection optical systems

Scanning exposure method and apparatus

Projection exposure apparatus and method

Projection exposure apparatus and method

Projection exposure apparatus and method

Projection exposure method and apparatus

Exposure apparatus and method

Inspection method and apparatus for projection optical systems

Projection exposure apparatus and method

Projection exposure apparatus

Projection exposure apparatus

Projection exposure method with corrections for image displacement

Method of adjusting a scanning exposure apparatus and scanning expo...

Projection apparatus and method

Projection optical apparatus

Inspection method and apparatus for projection optical systems

Inspection method and apparatus for projection optical systems

Projection exposure apparatus and method involving variation and co...

Adjustment method for an optical projection system to change image...

Exposure apparatus and method that use mark patterns to determine i...

Projection exposure apparatus having function of detecting intensit...

Projection exposure method and apparatus

Projection exposure method and apparatus

Projection exposure apparatus

Projection exposure apparatus and method with changing imaging char...

Focus detecting method and apparatus

Thermal distortion compensated projection exposure method and appar...

Projection exposing apparatus

Patents Applicationslast 30 patents

Exposure system and device production process

Projection exposure apparatus and method

Exposure system and device production process

Exposure method and lithography system, exposure apparatus and meth...

Scanning exposure method and apparatus

Inspection method and apparatus for projection optical systems

Exposure apparatus and method

Exposure method and apparatus

Projection exposure apparatus and method

Projection exposure apparatus

Projection exposure apparatus

Projection exposure apparatus and method

Projection exposure apparatus and method

Projection exposure apparatus and method