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Tetsuro Hanawa
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Itami, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming resist pattern and method of manufacturing semico...
Patent number
7,727,709
Issue date
Jun 1, 2010
Renesas Technology Corp.
Toshifumi Suganaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of producing photo mask
Patent number
6,057,066
Issue date
May 2, 2000
Mitsubishi Denki Kabushiki Kaisha
Tetsuro Hanawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist coating film
Patent number
5,981,146
Issue date
Nov 9, 1999
Mitsubishi Denki Kabushiki Kaisha
Teruhiko Kumada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming resist pattern and organic silane compound for fo...
Patent number
5,512,422
Issue date
Apr 30, 1996
Mitsubishi Denki Kabushiki Kaisha
Tetsuro Hanawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Method of forming a critical resist pattern
Patent number
5,429,910
Issue date
Jul 4, 1995
Mitsubishi Denki Kabushiki Kaisha
Tetsuro Hanawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming resist pattern and organic silane compound for fo...
Patent number
5,380,889
Issue date
Jan 10, 1995
Mitsubishi Denki Kabushiki Kaisha
Tetsuro Hanawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
5,328,560
Issue date
Jul 12, 1994
Mitsubishi Denki Kabushiki Kaisha
Tetsuro Hanawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for inspecting a phase shift mask
Patent number
5,270,796
Issue date
Dec 14, 1993
Mitsubishi Denki Kabushiki Kaisha
Akira Tokui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF FORMING RESIST PATTERN AND METHOD OF MANUFACTURING SEMICO...
Publication number
20100203456
Publication date
Aug 12, 2010
Renesas Technology Corp.
Toshifumi Suganaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of forming resist pattern and method of maufacturing semicon...
Publication number
20070224546
Publication date
Sep 27, 2007
RENESAS TECHNOLOGY CORP.
Toshifumi Suganaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MATERIAL FOR FORMING FINE PATTERN, METHOD OF FORMING FINE PATTERN,...
Publication number
20070128559
Publication date
Jun 7, 2007
Renesas Technology Corp.
Takeo ISHIBASHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY