Tetsuya KOSUGI

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater, temperature control system, and processing apparatus
- Patent number 12,085,338
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 12,050,138
- Issue date Jul 30, 2024
- Kokusai Electric Corporation
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceiling heater for substrate processing apparatus
- Patent number D980177
- Issue date Mar 7, 2023
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Temperature sensor
- Patent number D976129
- Issue date Jan 24, 2023
- Kokusai Electric Corporation
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Retainer plate of top heater for wafer processing furnace
- Patent number D962184
- Issue date Aug 30, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Retainer plate of top heater for wafer processing furnace
- Patent number D962183
- Issue date Aug 30, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Ceiling heater for substrate processing apparatus
- Patent number D959393
- Issue date Aug 2, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 11,300,456
- Issue date Apr 12, 2022
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,049,742
- Issue date Jun 29, 2021
- Kokusai Electric Corporation
- Hideto Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Cooling unit, heat insulating structure, and substrate processing a...
- Patent number 11,043,402
- Issue date Jun 22, 2021
- Kokusai Electric Corporation
- Tetsuya Kosugi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Retainer of ceiling heater for semiconductor fabrication apparatus
- Patent number D918848
- Issue date May 11, 2021
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 10,684,174
- Issue date Jun 16, 2020
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,418,293
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Hideto Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus including heating and cooling device...
- Patent number 10,415,136
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Motoya Takewaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electric furnace for substrate processing apparatus
- Patent number D860420
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- D23 - Environmental heating and cooling
Information Patent Grant
Electric furnace for substrate processing apparatus
- Patent number D860419
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- D23 - Environmental heating and cooling
Information Patent Grant
Substrate processing apparatus, heating apparatus, ceiling heat ins...
- Patent number 10,340,151
- Issue date Jul 2, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 10,228,291
- Issue date Mar 12, 2019
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Ceiling heater for substrate processing apparatus
- Patent number D826185
- Issue date Aug 21, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Air flow controller for heater of substrate processing apparatus
- Patent number D825501
- Issue date Aug 14, 2018
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for substrate processing apparatus
- Patent number D825502
- Issue date Aug 14, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater of substrate processing apparatus
- Patent number D824440
- Issue date Jul 31, 2018
- Hitachi Kokusai Electric Inc.
- Motoya Takewaki
- D15 - Machines not elsewhere specified
Information Patent Grant
Heater of substrate processing apparatus
- Patent number D823363
- Issue date Jul 17, 2018
- Hitachi Kokusai Electric Inc.
- Motoya Takewaki
- D15 - Machines not elsewhere specified
Information Patent Grant
Protector tube for thermocouple
- Patent number D819463
- Issue date Jun 5, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Protector tube for thermocouple
- Patent number D818850
- Issue date May 29, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Thermometry tool for substrate processing apparatus
- Patent number D803075
- Issue date Nov 21, 2017
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Heater supporting device
- Patent number 9,779,970
- Issue date Oct 3, 2017
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,695,511
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulation structure and method of manufacturing semiconductor device
- Patent number 9,587,884
- Issue date Mar 7, 2017
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20240393050
- Publication date Nov 28, 2024
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
CEILING HEATER, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURIN...
- Publication number 20240222160
- Publication date Jul 4, 2024
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MAN...
- Publication number 20230257883
- Publication date Aug 17, 2023
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220139737
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20220082447
- Publication date Mar 17, 2022
- Kokusai Electric Corporation
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20210313205
- Publication date Oct 7, 2021
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20200393197
- Publication date Dec 17, 2020
- KOKUSAI ELECTRIC CORPORATION
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...
- Publication number 20200333766
- Publication date Oct 22, 2020
- Kokusai Electric Corporation
- Masashi SUGISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20200166413
- Publication date May 28, 2020
- Kokusai Electric Corporation
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190355630
- Publication date Nov 21, 2019
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20190284696
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING UNIT, HEAT INSULATING STRUCTURE, AND SUBSTRATE PROCESSING A...
- Publication number 20190080941
- Publication date Mar 14, 2019
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER
- Publication number 20190024232
- Publication date Jan 24, 2019
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20180328790
- Publication date Nov 15, 2018
- Hitachi Kokusai Electric Inc.
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180040520
- Publication date Feb 8, 2018
- Hitachi Kokusai Electric, Inc.
- Hideto YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING PART
- Publication number 20160376701
- Publication date Dec 29, 2016
- Hitachi Kokusai Electric Inc.
- Motoya TAKEWAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20160245704
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...
- Publication number 20150370245
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Masashi SUGISHITA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, CEILING HEAT INS...
- Publication number 20150221532
- Publication date Aug 6, 2015
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150093909
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...
- Publication number 20140342474
- Publication date Nov 20, 2014
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140322926
- Publication date Oct 30, 2014
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140287375
- Publication date Sep 25, 2014
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20140120636
- Publication date May 1, 2014
- Hitachi Kokusai Electric Inc.
- Hideto YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...
- Publication number 20130017628
- Publication date Jan 17, 2013
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEATING EQUIPMENT
- Publication number 20120006506
- Publication date Jan 12, 2012
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER SUPPORTING DEVICE
- Publication number 20110281226
- Publication date Nov 17, 2011
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110021039
- Publication date Jan 27, 2011
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110021038
- Publication date Jan 27, 2011
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20090209113
- Publication date Aug 20, 2009
- Hitachi Kokusai Electric, Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tetsuya KOSUGI

Person

Patents Grantslast 30 patents

Substrate processing apparatus and ceiling heater

Heater, temperature control system, and processing apparatus

Substrate processing apparatus, and thermocouple

Ceiling heater for substrate processing apparatus

Temperature sensor

Retainer plate of top heater for wafer processing furnace

Retainer plate of top heater for wafer processing furnace

Ceiling heater for substrate processing apparatus

Substrate processing apparatus, and thermocouple

Substrate processing apparatus, method of manufacturing semiconduct...

Cooling unit, heat insulating structure, and substrate processing a...

Retainer of ceiling heater for semiconductor fabrication apparatus

Substrate processing apparatus, and thermocouple

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus including heating and cooling device...

Electric furnace for substrate processing apparatus

Electric furnace for substrate processing apparatus

Substrate processing apparatus, heating apparatus, ceiling heat ins...

Substrate processing apparatus, and thermocouple

Ceiling heater for substrate processing apparatus

Air flow controller for heater of substrate processing apparatus

Heater for substrate processing apparatus

Heater of substrate processing apparatus

Heater of substrate processing apparatus

Protector tube for thermocouple

Protector tube for thermocouple

Thermometry tool for substrate processing apparatus

Heater supporting device

Substrate processing apparatus, method of manufacturing semiconduct...

Insulation structure and method of manufacturing semiconductor device

Patents Applicationslast 30 patents

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

CEILING HEATER, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURIN...

SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MAN...

TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

COOLING UNIT, HEAT INSULATING STRUCTURE, AND SUBSTRATE PROCESSING A...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND CEILING PART

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...

SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, CEILING HEAT INS...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

INSULATION STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND...

SUBSTRATE PROCESSING APPARATUS AND HEATING EQUIPMENT

HEATER SUPPORTING DEVICE

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...