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Tetsuya Sada
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Kikuchi-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Cooling device and cooling method
Patent number
6,889,764
Issue date
May 10, 2005
Tokyo Electron Limited
Tetsuya Sada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating processing apparatus
Patent number
6,565,656
Issue date
May 20, 2003
Toyko Electron Limited
Tetsuya Sada
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Processing apparatus and a processing method
Patent number
6,456,480
Issue date
Sep 24, 2002
Tokyo Electron Limited
Osamu Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for cleaning treatment
Patent number
6,391,110
Issue date
May 21, 2002
Tokyo Electron Limited
Fumio Satou
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method and apparatus for processing substrate
Patent number
6,238,511
Issue date
May 29, 2001
Tokyo Electron Limited
Tetsuya Sada
B32 - LAYERED PRODUCTS
Information
Patent Grant
Cooling device and cooling method
Patent number
6,216,475
Issue date
Apr 17, 2001
Tokyo Electron Limited
Tetsuya Sada
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for cleaning treatment
Patent number
6,159,288
Issue date
Dec 12, 2000
Tokyo Electron Limited
Fumio Satou
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Heat process apparatus and heat process method
Patent number
6,129,546
Issue date
Oct 10, 2000
Tokyo Electron Limited
Tetsuya Sada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment device
Patent number
6,062,240
Issue date
May 16, 2000
Tokyo Electron Limited
Tetsuya Sada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing apparatus and a processing method
Patent number
6,002,572
Issue date
Dec 14, 1999
Tokyo Electron Limited
Osamu Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooling device and cooling method
Patent number
5,941,083
Issue date
Aug 24, 1999
Tokyo Electron Limited
Tetsuya Sada
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
DEFECT INSPECTING APPARATUS AND DEFECT INSPECTING METHOD
Publication number
20140353505
Publication date
Dec 4, 2014
TOKYO ELECTRON LIMITED
Tetsuya Sada
G01 - MEASURING TESTING
Information
Patent Application
Cooling device and cooling method
Publication number
20010017035
Publication date
Aug 30, 2001
Tetsuya Sada
G05 - CONTROLLING REGULATING
Information
Patent Application
Coating processing apparatus
Publication number
20010003965
Publication date
Jun 21, 2001
Tetsuya Sada
H01 - BASIC ELECTRIC ELEMENTS