Theodorus G. M. Oosterlaken

Person

Ondewater, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for performing an in-situ etch of reaction ch...
- Patent number 12,203,166
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition furnace with a cleaning gas system to pro...
- Patent number 12,077,854
- Issue date Sep 3, 2024
- ASM IP Holding B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automatic system calibration for wafer handling
- Patent number 12,027,400
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Injector
- Patent number 11,993,847
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch furnace assembly and method of operating a batch furnace asse...
- Patent number 11,971,217
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Wafer boat
- Patent number 11,869,786
- Issue date Jan 9, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,804,388
- Issue date Oct 31, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Fast FOUP swapping with a FOUP handler
- Patent number 11,798,830
- Issue date Oct 24, 2023
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 11,735,445
- Issue date Aug 22, 2023
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly
- Patent number 11,587,815
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Fast FOUP swapping with a FOUP handler
- Patent number 11,515,187
- Issue date Nov 29, 2022
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer boat handling device, vertical batch furnace and method
- Patent number 11,515,188
- Issue date Nov 29, 2022
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,230,766
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,232,963
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dummy wafer storage cassette
- Patent number 11,121,014
- Issue date Sep 14, 2021
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 11,087,997
- Issue date Aug 10, 2021
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,024,523
- Issue date Jun 1, 2021
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly of a liner and a flange for a vertical furnace as well as...
- Patent number 10,605,530
- Issue date Mar 31, 2020
- ASM IP Holding B.V.
- Lucian C. Jdira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for delivering hydrogen peroxide to a semiconduct...
- Patent number 10,343,907
- Issue date Jul 9, 2019
- ASM IP Holding B.V.
- Bert Jongbloed
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Semiconductor processing assembly and facility
- Patent number 10,319,621
- Issue date Jun 11, 2019
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly of liner and flange for vertical furnace as well as a vert...
- Patent number 10,224,222
- Issue date Mar 5, 2019
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for manufacturing a semiconductor device
- Patent number 10,103,040
- Issue date Oct 16, 2018
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular vertical furnace processing system
- Patent number 9,991,139
- Issue date Jun 5, 2018
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process for forming silicon-filled openings with a reduced occurren...
- Patent number 9,837,271
- Issue date Dec 5, 2017
- ASM IP Holding B.V.
- Steven R. A. Van Aerde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming silicon-filled openings with a reduced occurren...
- Patent number 9,443,730
- Issue date Sep 13, 2016
- ASM IP Holding B.V.
- Steven R. A. Van Aerde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactive curing process for semiconductor substrates
- Patent number 9,431,238
- Issue date Aug 30, 2016
- ASM IP Holding B.V.
- Bert Jongbloed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus including a plurality of reactor...
- Patent number 9,410,244
- Issue date Aug 9, 2016
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer boat
- Patent number 9,153,466
- Issue date Oct 6, 2015
- ASM IP Holding B.V.
- Lucian C. Jdira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular semiconductor processing system
- Patent number 9,048,271
- Issue date Jun 2, 2015
- ASM International N.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PRECURSOR DELIVERY VESSEL, PRECURSOR DELIVERY SYSTEM, AND PRECURSOR...
- Publication number 20250034703
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Quentin Nikitas Nicolas Lionel Eric Tricas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT SYSTEM, HOLDER RING AND USE THEREOF
- Publication number 20250006529
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...
- Publication number 20240420971
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...
- Publication number 20240392435
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE CHEMICAL VAPORIZER
- Publication number 20240360554
- Publication date Oct 31, 2024
- ASM IP HOLDING B.V.
- Davide Proserpio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD DEPOSITION METHOD AND SYSTEM
- Publication number 20240229237
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
- Publication number 20240175137
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR
- Publication number 20240167157
- Publication date May 23, 2024
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
- Publication number 20240141485
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR ASSEMBLY
- Publication number 20240145262
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALD DEPOSITION METHOD AND SYSTEM
- Publication number 20240133030
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240068097
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS FOR PROCESSING A PLURALITY OF SU...
- Publication number 20240003009
- Publication date Jan 4, 2024
- ASM IP HOLDING, B.V.
- Ivo Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL MODEL-BASED TEMPERATURE CONTROLLER
- Publication number 20240004409
- Publication date Jan 4, 2024
- ASM IP HOLDING, B.V.
- Liu Zhenduo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20230395405
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230134767
- Publication date May 4, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20230140283
- Publication date May 4, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR FOR A VERTICAL FURNACE
- Publication number 20230111229
- Publication date Apr 13, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FAST FOUP SWAPPING WITH A FOUP HANDLER
- Publication number 20230047885
- Publication date Feb 16, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE LID OPENING DEVICE
- Publication number 20230012302
- Publication date Jan 12, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...
- Publication number 20230008131
- Publication date Jan 12, 2023
- ASM IP HOLDING, B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES PROVIDED WITH AN...
- Publication number 20230008684
- Publication date Jan 12, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL VAPOR DEPOSPITION FURNACE FOR DEPOSITING FILMS
- Publication number 20230002889
- Publication date Jan 5, 2023
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH FURNACE ASSEMBLY AND METHOD OF OPERATING A BATCH FURNACE ASSE...
- Publication number 20220412652
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
VERTICAL FURNACE REACTOR ASSEMBLY, METHOD OF ALIGNING ANNULAR FLANG...
- Publication number 20220268520
- Publication date Aug 25, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
WAFER BOAT
- Publication number 20220254668
- Publication date Aug 11, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS WITH A ROTATABLE TABLE
- Publication number 20220199444
- Publication date Jun 23, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, REACTOR MOVER FOR MOVING A REACTOR...
- Publication number 20210384046
- Publication date Dec 9, 2021
- ASM IP HOLDING B.V.
- Gijsbert Hendrik Ronner
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
AUTOMATIC SYSTEM CALIBRATION FOR WAFER HANDLING
- Publication number 20210375654
- Publication date Dec 2, 2021
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- G05 - CONTROLLING REGULATING
Information Patent Application
FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20210366742
- Publication date Nov 25, 2021
- ASM IP HOLDING B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS

Theodorus G. M. Oosterlaken

Person

Patents Grantslast 30 patents

Apparatus and methods for performing an in-situ etch of reaction ch...

Substrate processing apparatus for processing substrates

Chemical vapor deposition furnace with a cleaning gas system to pro...

Automatic system calibration for wafer handling

Injector

Batch furnace assembly and method of operating a batch furnace asse...

Wafer boat

Substrate processing apparatus and method

Fast FOUP swapping with a FOUP handler

Substrate processing apparatus for processing substrates

Vertical batch furnace assembly

Fast FOUP swapping with a FOUP handler

Wafer boat handling device, vertical batch furnace and method

Substrate processing apparatus and method

Substrate processing apparatus and method

Dummy wafer storage cassette

Substrate processing apparatus for processing substrates

Substrate processing apparatus and method

Assembly of a liner and a flange for a vertical furnace as well as...

Method and system for delivering hydrogen peroxide to a semiconduct...

Semiconductor processing assembly and facility

Assembly of liner and flange for vertical furnace as well as a vert...

Apparatus and method for manufacturing a semiconductor device

Modular vertical furnace processing system

Process for forming silicon-filled openings with a reduced occurren...

Process for forming silicon-filled openings with a reduced occurren...

Reactive curing process for semiconductor substrates

Semiconductor processing apparatus including a plurality of reactor...

Wafer boat

Modular semiconductor processing system

Patents Applicationslast 30 patents

PRECURSOR DELIVERY VESSEL, PRECURSOR DELIVERY SYSTEM, AND PRECURSOR...

WAFER BOAT SYSTEM, HOLDER RING AND USE THEREOF

VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...

CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...

SOLID SOURCE CHEMICAL VAPORIZER

ALD DEPOSITION METHOD AND SYSTEM

VAPOR PHASE PRECURSOR DELIVERY SYSTEM

GAS INJECTOR

VAPOR PHASE PRECURSOR DELIVERY SYSTEM

GAS INJECTOR ASSEMBLY

ALD DEPOSITION METHOD AND SYSTEM

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING APPARATUS FOR PROCESSING A PLURALITY OF SU...

DUAL MODEL-BASED TEMPERATURE CONTROLLER

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

GAS INJECTOR FOR A VERTICAL FURNACE

FAST FOUP SWAPPING WITH A FOUP HANDLER

CASSETTE LID OPENING DEVICE

CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...

APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES PROVIDED WITH AN...

CHEMICAL VAPOR DEPOSPITION FURNACE FOR DEPOSITING FILMS

BATCH FURNACE ASSEMBLY AND METHOD OF OPERATING A BATCH FURNACE ASSE...

VERTICAL FURNACE REACTOR ASSEMBLY, METHOD OF ALIGNING ANNULAR FLANG...

WAFER BOAT

WAFER PROCESSING APPARATUS WITH A ROTATABLE TABLE

SUBSTRATE PROCESSING APPARATUS, REACTOR MOVER FOR MOVING A REACTOR...

AUTOMATIC SYSTEM CALIBRATION FOR WAFER HANDLING

FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES