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Theodorus Marinus Modderman
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Nuenen, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for determining a condition associated with a...
Patent number
11,906,907
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Derk Servatius Gertruda Brouns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,620,545
Issue date
Apr 14, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of manufacturing a lithographic...
Patent number
10,324,384
Issue date
Jun 18, 2019
ASML Netherlands B.V.
Gerben Pieterse
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
10,248,035
Issue date
Apr 2, 2019
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,222,706
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus and device manufacturing method
Patent number
10,001,712
Issue date
Jun 19, 2018
ASML Netherlands B.V.
Theodorus Wilhelmus Polet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,964,858
Issue date
May 8, 2018
ASML Netherlands B.V.
Joannes Theodoor De Smit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,835,960
Issue date
Dec 5, 2017
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,417,535
Issue date
Aug 16, 2016
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,329,494
Issue date
May 3, 2016
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,195,153
Issue date
Nov 24, 2015
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,116,443
Issue date
Aug 25, 2015
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,110,389
Issue date
Aug 18, 2015
ASML Netherlands B.V.
Joannes Theodoor De Smit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method involving a fluid inlet and a flu...
Patent number
9,091,940
Issue date
Jul 28, 2015
ASML Netherlands B.V.
Antonius Theodorus Anna Maria Derksen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method with a liqui...
Patent number
8,797,503
Issue date
Aug 5, 2014
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,462,312
Issue date
Jun 11, 2013
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,363,208
Issue date
Jan 29, 2013
ASML Netherlands B.V.
Joannes Theodoor De Smit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,344,341
Issue date
Jan 1, 2013
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,233,137
Issue date
Jul 31, 2012
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,208,120
Issue date
Jun 26, 2012
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus and device manufacturing method wi...
Patent number
7,982,850
Issue date
Jul 19, 2011
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method of exposing a substrate, method of m...
Patent number
7,835,017
Issue date
Nov 16, 2010
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,795,603
Issue date
Sep 14, 2010
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,684,008
Issue date
Mar 23, 2010
ASML Netherlands B.V.
Joannes Theodoor De Smit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,528,931
Issue date
May 5, 2009
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,482,611
Issue date
Jan 27, 2009
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus
Patent number
7,388,648
Issue date
Jun 17, 2008
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,372,541
Issue date
May 13, 2008
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,317,504
Issue date
Jan 8, 2008
ASML Netherlands B.V.
Joannes Theodoor De Smit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Off-axis levelling in lithographic projection apparatus
Patent number
7,206,058
Issue date
Apr 17, 2007
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A...
Publication number
20240103386
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Derk Servatius Gertruda BROUNS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A...
Publication number
20200341366
Publication date
Oct 29, 2020
ASML NETHERLANDS B.V.
Derk Servatius Gertruda BROUNS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190265596
Publication date
Aug 29, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC...
Publication number
20180210350
Publication date
Jul 26, 2018
ASML NETHERLANDS B.V.
Gerben PIETERSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20180059556
Publication date
Mar 1, 2018
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170219939
Publication date
Aug 3, 2017
ASML NETHERLANDS B.V.
Theodorus Wilhelmus POLET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20170010546
Publication date
Jan 12, 2017
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160062248
Publication date
Mar 3, 2016
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150362844
Publication date
Dec 17, 2015
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150331334
Publication date
Nov 19, 2015
ASML NETHERLANDS B.V.
Joannes Theodoor DE SMIT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20150192864
Publication date
Jul 9, 2015
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20150009479
Publication date
Jan 8, 2015
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20130301017
Publication date
Nov 14, 2013
ASML NETHERLANDS B.V.
Antonius Theodorus Anna Maria Derksen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20130128256
Publication date
May 23, 2013
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120013872
Publication date
Jan 19, 2012
ASML NETHERLANDS B.V.
Joannes Theodoor De Smit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120008117
Publication date
Jan 12, 2012
ASML NETHERLANDS B.V.
Joannes Theodoor DE SMIT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110279806
Publication date
Nov 17, 2011
ASML NETHERLANDS B.V.
Theodorus Marinus MODDERMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110279804
Publication date
Nov 17, 2011
ASML NETHERLANDS B.V.
Theodorus Marinus MODDERMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110228241
Publication date
Sep 22, 2011
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110027721
Publication date
Feb 3, 2011
JOERI LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100128235
Publication date
May 27, 2010
ASML NETHERLANDS B.V.
Joannes Theodoor De Smit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090184270
Publication date
Jul 23, 2009
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090079951
Publication date
Mar 26, 2009
ASML NETHERLANDS B.V.
Theodorus Marinus MODDERMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090002652
Publication date
Jan 1, 2009
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080218726
Publication date
Sep 11, 2008
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus, Method of Exposing a Substrate, Method of M...
Publication number
20070252963
Publication date
Nov 1, 2007
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070040133
Publication date
Feb 22, 2007
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060232756
Publication date
Oct 19, 2006
ASML NETHERLANDS B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Off-axis levelling in lithographic projection apparatus
Publication number
20060176459
Publication date
Aug 10, 2006
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060132733
Publication date
Jun 22, 2006
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY