Thomas D. Steiger

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reducing fretting corrosion in a gas discharge chamber support device
- Patent number 12,125,695
- Issue date Oct 22, 2024
- Cymer, LLC
- Thomas Dickson Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pulse repetition rate gas discharge laser
- Patent number 9,620,920
- Issue date Apr 11, 2017
- Cymer, LLC
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
6 KHz and above gas discharge laser system
- Patent number 8,855,166
- Issue date Oct 7, 2014
- Cymer, LLC
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-flow fan impeller for a transversley excited, pulsed, gas dis...
- Patent number 8,814,522
- Issue date Aug 26, 2014
- Cymer, LLC
- Yoshiho Amada
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
High pulse repetition rate gas discharge laser
- Patent number 7,633,989
- Issue date Dec 15, 2009
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal-expansion tolerant, preionizer electrode for a gas discharg...
- Patent number 7,542,502
- Issue date Jun 2, 2009
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathodes for fluorine gas discharge lasers
- Patent number 7,535,948
- Issue date May 19, 2009
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge laser chamber improvements
- Patent number 7,522,650
- Issue date Apr 21, 2009
- Cymer, Inc.
- William N. Partlo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber for a high energy excimer laser source
- Patent number 7,369,596
- Issue date May 6, 2008
- Cymer, Inc.
- Thomas D Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen gas discharge laser electrodes
- Patent number 7,301,980
- Issue date Nov 27, 2007
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anodes for fluorine gas discharge lasers
- Patent number 7,230,965
- Issue date Jun 12, 2007
- Cymer, Inc.
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High rep-rate laser with improved electrodes
- Patent number 7,132,123
- Issue date Nov 7, 2006
- Cymer, Inc.
- Richard G. Morton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Very high repetition rate narrow band gas discharge laser system
- Patent number 7,006,547
- Issue date Feb 28, 2006
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High rep-rate laser with improved electrodes
- Patent number 6,937,635
- Issue date Aug 30, 2005
- Cymer, Inc.
- Richard G. Morton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Four KHz gas discharge laser system
- Patent number 6,882,674
- Issue date Apr 19, 2005
- Cymer, Inc.
- Christian J. Wittak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High rep-rate laser with improved electrodes
- Patent number 6,690,706
- Issue date Feb 10, 2004
- Cymer, Inc.
- Richard G. Morton
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...
- Publication number 20230163551
- Publication date May 25, 2023
- CYMER, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING FRETTING CORROSION IN A GAS DISCHARGE CHAMBER SUPPORT DEVICE
- Publication number 20230087803
- Publication date Mar 23, 2023
- CYMER, LLC
- Thomas Dickson Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM
- Publication number 20120120974
- Publication date May 17, 2012
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High pulse repetition rate gas discharge laser
- Publication number 20100054295
- Publication date Mar 4, 2010
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cross-flow fan impeller for a transversley excited, pulsed, gas dis...
- Publication number 20080310960
- Publication date Dec 18, 2008
- Cymer, Inc.
- Yoshiho Amada
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
High repetition rate laser produced plasma EUV light source
- Publication number 20080197297
- Publication date Aug 21, 2008
- Robert P. Akins
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Anodes for fluorine gas discharge lasers
- Publication number 20080002752
- Publication date Jan 3, 2008
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chamber for a high energy excimer laser source
- Publication number 20070280323
- Publication date Dec 6, 2007
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal-expansion tolerant, preionizer electrode for a gas discharg...
- Publication number 20070091972
- Publication date Apr 26, 2007
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High pulse repetition rate gas discharge laser
- Publication number 20060291517
- Publication date Dec 28, 2006
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cathodes for fluorine gas discharge lasers
- Publication number 20060274809
- Publication date Dec 7, 2006
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
6 Khz and above gas discharge laser system
- Publication number 20060222034
- Publication date Oct 5, 2006
- Cymer, Inc.
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Very high repetition rate narrow band gas discharge laser system
- Publication number 20050226300
- Publication date Oct 13, 2005
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas discharge laser chamber improvements
- Publication number 20050226301
- Publication date Oct 13, 2005
- William N. Partlo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High repetition rate laser produced plasma EUV light source
- Publication number 20050205810
- Publication date Sep 22, 2005
- Robert P. Akins
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Halogen gas discharge laser electrodes
- Publication number 20050047471
- Publication date Mar 3, 2005
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Anodes for fluorine gas discharge lasers
- Publication number 20040071178
- Publication date Apr 15, 2004
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cathodes for fluorine gas discharge lasers
- Publication number 20040066827
- Publication date Apr 8, 2004
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High rep-rate laser with improved electrodes
- Publication number 20040037338
- Publication date Feb 26, 2004
- Richard G. Morton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High rep-rate laser with improved electrodes
- Publication number 20040022292
- Publication date Feb 5, 2004
- Richard G. Morton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Four KHz gas discharge laser system
- Publication number 20030118072
- Publication date Jun 26, 2003
- Christian J. Wittak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High rep-rate laser with improved electrodes
- Publication number 20020191661
- Publication date Dec 19, 2002
- Richard G. Morton
- H01 - BASIC ELECTRIC ELEMENTS

Thomas D. Steiger

Person

Patents Grantslast 30 patents

Reducing fretting corrosion in a gas discharge chamber support device

High pulse repetition rate gas discharge laser

6 KHz and above gas discharge laser system

Cross-flow fan impeller for a transversley excited, pulsed, gas dis...

High pulse repetition rate gas discharge laser

Thermal-expansion tolerant, preionizer electrode for a gas discharg...

Cathodes for fluorine gas discharge lasers

Gas discharge laser chamber improvements

Chamber for a high energy excimer laser source

Halogen gas discharge laser electrodes

Anodes for fluorine gas discharge lasers

High rep-rate laser with improved electrodes

Very high repetition rate narrow band gas discharge laser system

High rep-rate laser with improved electrodes

Four KHz gas discharge laser system

High rep-rate laser with improved electrodes

Patents Applicationslast 30 patents

CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...

REDUCING FRETTING CORROSION IN A GAS DISCHARGE CHAMBER SUPPORT DEVICE

6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM

High pulse repetition rate gas discharge laser

Cross-flow fan impeller for a transversley excited, pulsed, gas dis...

High repetition rate laser produced plasma EUV light source

Anodes for fluorine gas discharge lasers

Chamber for a high energy excimer laser source

Thermal-expansion tolerant, preionizer electrode for a gas discharg...

High pulse repetition rate gas discharge laser

Cathodes for fluorine gas discharge lasers

6 Khz and above gas discharge laser system

Very high repetition rate narrow band gas discharge laser system

Gas discharge laser chamber improvements

High repetition rate laser produced plasma EUV light source

Halogen gas discharge laser electrodes

Anodes for fluorine gas discharge lasers

Cathodes for fluorine gas discharge lasers

High rep-rate laser with improved electrodes

High rep-rate laser with improved electrodes

Four KHz gas discharge laser system

High rep-rate laser with improved electrodes