Thomas E. Seidel

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and structure for nanoimprint lithography masks using optica...
- Patent number 10,996,562
- Issue date May 4, 2021
- Thomas E. Seidel
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Limited dose and angle directed beam assisted ALE and ALD processes...
- Patent number 10,923,359
- Issue date Feb 16, 2021
- Thomas E Seidel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Limited dose atomic layer processes for localizing coatings on non-...
- Patent number 10,896,823
- Issue date Jan 19, 2021
- Thomas E. Seidel
- G01 - MEASURING TESTING
Information Patent Grant
Method and structure for nanoimprint lithography masks using optica...
- Patent number 10,156,786
- Issue date Dec 18, 2018
- Thomas E. Seidel
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Transient enhanced atomic layer deposition
- Patent number 7,981,473
- Issue date Jul 19, 2011
- Aixtron, Inc.
- Gi Youl Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and procedures for engineering of composite conductive film...
- Patent number 7,183,649
- Issue date Feb 27, 2007
- Genus, Inc.
- Ana R. Londergan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and procedures for engineering of composite conductive by a...
- Patent number 7,164,203
- Issue date Jan 16, 2007
- Genus, Inc.
- Ana R. Londergan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and procedures for engineering of composite conductive film...
- Patent number 7,129,580
- Issue date Oct 31, 2006
- Genus, Inc.
- Ana R. Londergan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for flexible atomic layer deposition
- Patent number 6,905,547
- Issue date Jun 14, 2005
- Genus, Inc.
- Ana R. Londergan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Massively parallel atomic layer deposition/chemical vapor depositio...
- Patent number 6,902,624
- Issue date Jun 7, 2005
- Genus, Inc.
- Thomas E. Seidel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method to achieve continuous interface and ultrathin...
- Patent number 6,897,119
- Issue date May 24, 2005
- Genus, Inc.
- Ofer Sneh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation method for improved uniformity and repeatability for at...
- Patent number 6,720,259
- Issue date Apr 13, 2004
- Genus, Inc.
- Ana R. Londergan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method to achieve continuous interface and ultrathin...
- Patent number 6,638,859
- Issue date Oct 28, 2003
- Genus, Inc.
- Ofer Sneh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD and CVD processes for WNx deposition
- Patent number 6,635,570
- Issue date Oct 21, 2003
- Carl J. Galewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fully integrated process for MIM capacitors using atomic layer depo...
- Patent number 6,551,399
- Issue date Apr 22, 2003
- Genus Inc.
- Ofer Sneh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method to achieve continuous interface and ultrathin...
- Patent number 6,503,330
- Issue date Jan 7, 2003
- Genus, Inc.
- Ofer Sneh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber for atomic layer deposition processes
- Patent number 6,387,185
- Issue date May 14, 2002
- Genus, Inc.
- Kenneth Doering
- C30 - CRYSTAL GROWTH
Information Patent Grant
Processing chamber for atomic layer deposition processes
- Patent number 6,174,377
- Issue date Jan 16, 2001
- Genus, Inc.
- Kenneth Doering
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of making a dual damascene interconnect structure using low...
- Patent number 6,100,184
- Issue date Aug 8, 2000
- Sematech, Inc.
- Bin Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual damascene interconnect structure using low dielectric constant...
- Patent number 6,037,664
- Issue date Mar 14, 2000
- Bin Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertically-stacked process reactor and cluster tool system for atom...
- Patent number 5,879,459
- Issue date Mar 9, 1999
- Genus, Inc.
- Prasad N. Gadgil
- C30 - CRYSTAL GROWTH
Information Patent Grant
Staircase sidewall spacer for improved source/drain architecture
- Patent number 5,102,816
- Issue date Apr 7, 1992
- Sematech, Inc.
- V. Reddy Manukonda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIMITED DOSE AND ANGLE DIRECTED BEAM ASSISTED ALE AND ALD PROCESSES...
- Publication number 20210020452
- Publication date Jan 21, 2021
- Thomas E Seidel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIMITED DOSE ATOMIC LAYER PROCESSES FOR LOCALIZING COATINGS ON NON-...
- Publication number 20200161140
- Publication date May 21, 2020
- Thomas E. Seidel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND STRUCTURE FOR NANOIMPRINT LITHOGRAPHY MASKS USING OPTICA...
- Publication number 20190049839
- Publication date Feb 14, 2019
- Thomas E. Seidel
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD AND STRUCTURE FOR NANOIMPRINT LITHOGRAPHY MASKS USING OPTICA...
- Publication number 20170090282
- Publication date Mar 30, 2017
- Thomas E. Seidel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON DOPING SOURCE FILMS BY ALD DEPOSITION
- Publication number 20160379828
- Publication date Dec 29, 2016
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATION FOR MULTI-SINGLE-WAFER PROCESSING APPARATUS
- Publication number 20100012036
- Publication date Jan 21, 2010
- Hugo Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Transient enhanced atomic layer deposition
- Publication number 20080131601
- Publication date Jun 5, 2008
- Gi Youl Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS
- Publication number 20080072821
- Publication date Mar 27, 2008
- Jeremic J. Dalton
- C30 - CRYSTAL GROWTH
Information Patent Application
Vaporizer for atomic layer deposition system
- Publication number 20070042119
- Publication date Feb 22, 2007
- Larry Matthysse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-single wafer processing apparatus
- Publication number 20060137609
- Publication date Jun 29, 2006
- Jerzy P. Puchacz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Massively parallel atomic layer deposition/chemical vapor depositio...
- Publication number 20050281949
- Publication date Dec 22, 2005
- Thomas E. Seidel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Massively parallel atomic layer deposition/chemical vapor depositio...
- Publication number 20050274323
- Publication date Dec 15, 2005
- Thomas E. Seidel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Collection of unused precursors in ALD
- Publication number 20050016453
- Publication date Jan 27, 2005
- Thomas E. Seidel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for cycle time improvements for atomic layer...
- Publication number 20050016956
- Publication date Jan 27, 2005
- Xinye Liu
- C30 - CRYSTAL GROWTH
Information Patent Application
PASSIVATION METHOD FOR IMPROVED UNIFORMITY AND REPEATABILITY FOR AT...
- Publication number 20040023516
- Publication date Feb 5, 2004
- Ana R. Londergan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Massively parallel atomic layer deposition/chemical vapor depositio...
- Publication number 20030109094
- Publication date Jun 12, 2003
- Thomas E. Seidel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method to achieve continuous interface and ultrathin...
- Publication number 20030027431
- Publication date Feb 6, 2003
- Ofer Sneh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing chamber for atomic layer deposition processes
- Publication number 20010011526
- Publication date Aug 9, 2001
- Kenneth Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Thomas E. Seidel

Person

Patents Grantslast 30 patents

Method and structure for nanoimprint lithography masks using optica...

Limited dose and angle directed beam assisted ALE and ALD processes...

Limited dose atomic layer processes for localizing coatings on non-...

Method and structure for nanoimprint lithography masks using optica...

Transient enhanced atomic layer deposition

Methods and procedures for engineering of composite conductive film...

Methods and procedures for engineering of composite conductive by a...

Methods and procedures for engineering of composite conductive film...

Method and apparatus for flexible atomic layer deposition

Massively parallel atomic layer deposition/chemical vapor depositio...

Apparatus and method to achieve continuous interface and ultrathin...

Passivation method for improved uniformity and repeatability for at...

Apparatus and method to achieve continuous interface and ultrathin...

PECVD and CVD processes for WNx deposition

Fully integrated process for MIM capacitors using atomic layer depo...

Apparatus and method to achieve continuous interface and ultrathin...

Processing chamber for atomic layer deposition processes

Processing chamber for atomic layer deposition processes

Method of making a dual damascene interconnect structure using low...

Dual damascene interconnect structure using low dielectric constant...

Vertically-stacked process reactor and cluster tool system for atom...

Staircase sidewall spacer for improved source/drain architecture

Patents Applicationslast 30 patents

LIMITED DOSE AND ANGLE DIRECTED BEAM ASSISTED ALE AND ALD PROCESSES...

LIMITED DOSE ATOMIC LAYER PROCESSES FOR LOCALIZING COATINGS ON NON-...

METHOD AND STRUCTURE FOR NANOIMPRINT LITHOGRAPHY MASKS USING OPTICA...

METHOD AND STRUCTURE FOR NANOIMPRINT LITHOGRAPHY MASKS USING OPTICA...

SILICON DOPING SOURCE FILMS BY ALD DEPOSITION

ISOLATION FOR MULTI-SINGLE-WAFER PROCESSING APPARATUS

Transient enhanced atomic layer deposition

SMALL VOLUME SYMMETRIC FLOW SINGLE WAFER ALD APPARATUS

Vaporizer for atomic layer deposition system

Multi-single wafer processing apparatus

Massively parallel atomic layer deposition/chemical vapor depositio...

Massively parallel atomic layer deposition/chemical vapor depositio...

Collection of unused precursors in ALD

Methods and apparatus for cycle time improvements for atomic layer...

PASSIVATION METHOD FOR IMPROVED UNIFORMITY AND REPEATABILITY FOR AT...

Massively parallel atomic layer deposition/chemical vapor depositio...

Apparatus and method to achieve continuous interface and ultrathin...

Processing chamber for atomic layer deposition processes