Thomas Engel

Person

Erfurt-Niedemissa, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining the image quality of an optical imaging system
- Patent number 7,831,105
- Issue date Nov 9, 2010
- Carl Zeiss SMS GmbH
- Thomas Engel
- G01 - MEASURING TESTING
Information Patent Grant
Reflective X-ray microscope and inspection system for examining obj...
- Patent number 7,623,620
- Issue date Nov 24, 2009
- Carl Zeiss SMT AG
- Hans-Jürgen Mann
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Microscope, especially microscope used for inspection in semiconduc...
- Patent number 7,167,310
- Issue date Jan 23, 2007
- Carl Zeiss Jena GmbH
- Thomas Engel
- G02 - OPTICS
Information Patent Grant
Device for flat illumination of an object field
- Patent number 6,925,225
- Issue date Aug 2, 2005
- Carl Zeiss Microelectric Systems GmbH
- Thomas Engel
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR COUPLING TWO SYSTEM COMPONENTS OF A MEASURING DEVICE, IN...
- Publication number 20140259715
- Publication date Sep 18, 2014
- Thomas ENGEL
- G01 - MEASURING TESTING
Information Patent Application
COORDINATE MEASURING DEVICE HAVING POSITIONAL CHANGE SENSORS
- Publication number 20120246953
- Publication date Oct 4, 2012
- Thomas ENGEL
- G01 - MEASURING TESTING
Information Patent Application
Arrangement of aperture diaphragms and/or filters, with changeable...
- Publication number 20060291031
- Publication date Dec 28, 2006
- Klaus Boehm
- G02 - OPTICS
Information Patent Application
Arrangement for the production of photomasks
- Publication number 20060154150
- Publication date Jul 13, 2006
- Thomas Engel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining the image quality of an optical imaging system
- Publication number 20060072104
- Publication date Apr 6, 2006
- Thomas Engel
- G01 - MEASURING TESTING
Information Patent Application
Reflective X-ray microscope and inspection system for examining obj...
- Publication number 20050201514
- Publication date Sep 15, 2005
- Hans-Jurgen Mann
- B82 - NANO-TECHNOLOGY
Information Patent Application
Microscope, especially microscope used for inspection in semiconduc...
- Publication number 20040246574
- Publication date Dec 9, 2004
- Thomas Engel
- G02 - OPTICS
Information Patent Application
Microscope lens and the use of a microscope lens of this type in a...
- Publication number 20040145804
- Publication date Jul 29, 2004
- Thomas Engel
- G02 - OPTICS
Information Patent Application
Microscope lens arrangement
- Publication number 20040145816
- Publication date Jul 29, 2004
- Thomas Engel
- G02 - OPTICS
Information Patent Application
Device for flat illumination of an object field
- Publication number 20040135093
- Publication date Jul 15, 2004
- Thomas Engel
- G02 - OPTICS

Thomas Engel

Person

Patents Grantslast 30 patents

Method for determining the image quality of an optical imaging system

Reflective X-ray microscope and inspection system for examining obj...

Microscope, especially microscope used for inspection in semiconduc...

Device for flat illumination of an object field

Patents Applicationslast 30 patents

METHOD FOR COUPLING TWO SYSTEM COMPONENTS OF A MEASURING DEVICE, IN...

COORDINATE MEASURING DEVICE HAVING POSITIONAL CHANGE SENSORS

Arrangement of aperture diaphragms and/or filters, with changeable...

Arrangement for the production of photomasks

Method for determining the image quality of an optical imaging system

Reflective X-ray microscope and inspection system for examining obj...

Microscope, especially microscope used for inspection in semiconduc...

Microscope lens and the use of a microscope lens of this type in a...

Microscope lens arrangement

Device for flat illumination of an object field