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Thomas Morgenstern
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming an isolation layer and method of manufacturing a...
Patent number
6,984,556
Issue date
Jan 10, 2006
Infineon Technologies AG
Christian Drabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a trench capacitor having an isolation trench
Patent number
6,855,596
Issue date
Feb 15, 2005
Infineon Technologies AG
Gabriele Fichtl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching processing method for a material layer
Patent number
6,852,639
Issue date
Feb 8, 2005
Infineon Technologies AG
Matthias Rudolph
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for planarization and recess etching of integrated circuits
Patent number
6,593,242
Issue date
Jul 15, 2003
Infineon Technologies AG
Thomas Morgenstern
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of forming an isolation layer and method of manufacturing a...
Publication number
20040198015
Publication date
Oct 7, 2004
Christian Drabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing a trench capacitor having an isolation trench
Publication number
20040094777
Publication date
May 20, 2004
Gabriele Fichtl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing method
Publication number
20040023507
Publication date
Feb 5, 2004
Matthias Rudolph
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for planarization and recess etching of integrated circuits
Publication number
20030022510
Publication date
Jan 30, 2003
Thomas Morgenstern
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for determining the endpoint of etch process steps
Publication number
20030010750
Publication date
Jan 16, 2003
Joseph Louis Petrucci
B24 - GRINDING POLISHING
Information
Patent Application
Gate etch process for 12 inch wafers
Publication number
20020177323
Publication date
Nov 28, 2002
Virinder Grewal
H01 - BASIC ELECTRIC ELEMENTS