Tim Thomas

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead faceplate having flow apertures configured for hollow ca...
- Patent number 11,837,443
- Issue date Dec 5, 2023
- Lam Research Corporation
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead faceplate having flow apertures configured for hollow ca...
- Patent number 11,515,124
- Issue date Nov 29, 2022
- Lam Research Corporation
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature RF connection with integral thermal choke
- Patent number 11,469,084
- Issue date Oct 11, 2022
- Lam Research Corporation
- Timothy S. Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chucking pedestal with substrate backside purging and...
- Patent number 11,232,966
- Issue date Jan 25, 2022
- Lam Research Corporation
- Timothy S. Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead faceplate having flow apertures configured for hollow ca...
- Patent number 10,984,987
- Issue date Apr 20, 2021
- Lam Research Corporation
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead tilt mechanism
- Patent number 10,760,160
- Issue date Sep 1, 2020
- Lam Research Corporation
- Bin Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus including edge plenum showerhead assembly
- Patent number 10,253,412
- Issue date Apr 9, 2019
- Lam Research Corporation
- Timothy Scott Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead tilt mechanism
- Patent number 10,190,216
- Issue date Jan 29, 2019
- Lam Research Corporation
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature substrate pedestal module and components thereof
- Patent number 10,177,024
- Issue date Jan 8, 2019
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for plasma-based deposition
- Patent number 8,962,101
- Issue date Feb 24, 2015
- Novellus Systems, Inc.
- Pramod Subramonium
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20240112890
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE
- Publication number 20230369091
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20230099566
- Publication date Mar 30, 2023
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE
- Publication number 20220415620
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Timothy S. THOMAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...
- Publication number 20220333239
- Publication date Oct 20, 2022
- LAM RESEARCH CORPORATION
- Ashish SAURABH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMALLY CONTROLLED CHANDELIER SHOWERHEAD
- Publication number 20220282377
- Publication date Sep 8, 2022
- LAM RESEARCH CORPORATION
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20210210310
- Publication date Jul 8, 2021
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...
- Publication number 20200118795
- Publication date Apr 16, 2020
- LAM RESEARCH CORPORATION
- Michael John Selep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND...
- Publication number 20190237353
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Timothy S. THOMAS
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SHOWERHEAD TILT MECHANISM
- Publication number 20190153601
- Publication date May 23, 2019
- LAM RESEARCH CORPORATION
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE
- Publication number 20190071778
- Publication date Mar 7, 2019
- LAM RESEARCH CORPORATION
- Timothy S. Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD TILT MECHANISM
- Publication number 20190032214
- Publication date Jan 31, 2019
- LAM RESEARCH CORPORATION
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS INCLUDING EDGE PLENUM SHOWERHEAD ASSEMBLY
- Publication number 20160340781
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Timothy Scott Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF
- Publication number 20160336213
- Publication date Nov 17, 2016
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PLASMA-BASED DEPOSITION
- Publication number 20140057454
- Publication date Feb 27, 2014
- Novellus Systems, Inc.
- Pramod Subramonium
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and methods for increasing the rate of solute concentrati...
- Publication number 20080264443
- Publication date Oct 30, 2008
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Showerhead faceplate having flow apertures configured for hollow ca...

Showerhead faceplate having flow apertures configured for hollow ca...

High temperature RF connection with integral thermal choke

Electrostatic chucking pedestal with substrate backside purging and...

Showerhead faceplate having flow apertures configured for hollow ca...

Showerhead tilt mechanism

Deposition apparatus including edge plenum showerhead assembly

Showerhead tilt mechanism

High temperature substrate pedestal module and components thereof

Methods and apparatus for plasma-based deposition

Patents Applicationslast 30 patents

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE

TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...

THERMALLY CONTROLLED CHANDELIER SHOWERHEAD

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

Showerhead Faceplate Having Flow Apertures Configured for Hollow Ca...

ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND...

SHOWERHEAD TILT MECHANISM

HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE

SHOWERHEAD TILT MECHANISM

DEPOSITION APPARATUS INCLUDING EDGE PLENUM SHOWERHEAD ASSEMBLY

HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF

METHODS AND APPARATUS FOR PLASMA-BASED DEPOSITION

Apparatus and methods for increasing the rate of solute concentrati...