Tohru Koyama

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device having MIM capacitor e...
- Patent number 6,838,340
- Issue date Jan 4, 2005
- Renesas Technology Corp.
- Tomohiro Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning probe microscope
- Patent number 6,745,618
- Issue date Jun 8, 2004
- Renesas Technology Corp.
- Yukari Imai
- G01 - MEASURING TESTING
Information Patent Grant
Failure analysis device and failure analysis method
- Patent number 6,678,623
- Issue date Jan 13, 2004
- Renesas Technology Corp.
- Tohru Koyama
- G01 - MEASURING TESTING
Information Patent Grant
Method of and apparatus for analyzing failure
- Patent number 6,677,760
- Issue date Jan 13, 2004
- Renesas Technology Corp.
- Tohru Koyama
- G01 - MEASURING TESTING
Information Patent Grant
System LSI chip having a logic part and a memory part
- Patent number 6,614,049
- Issue date Sep 2, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Tohru Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for analyzing a failure in a semiconductor wafer by calculat...
- Patent number 6,009,545
- Issue date Dec 28, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Toshikazu Tsutsui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning photoinduced current analyzer capable of detecting photoin...
- Patent number 5,952,837
- Issue date Sep 14, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Tohru Koyama
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for analyzing a failure in a semiconductor wafer and meth...
- Patent number 5,844,850
- Issue date Dec 1, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Toshikazu Tsutsui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of analyzing failure of semiconductor device by using emissi...
- Patent number 5,760,892
- Issue date Jun 2, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Tohru Koyama
- G01 - MEASURING TESTING
Information Patent Grant
Scanning photoinduced current analyzer capable of detecting photoin...
- Patent number 5,708,371
- Issue date Jan 13, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Tohru Koyama
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device having a gate electrode of polycrystal layer a...
- Patent number 5,381,032
- Issue date Jan 10, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Yoshiko Kokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device having a two layered s...
- Patent number 5,221,630
- Issue date Jun 22, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Tohru Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a two layered structure gate electrode
- Patent number 5,177,569
- Issue date Jan 5, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Tohru Koyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Failure analyzer
- Publication number 20040212380
- Publication date Oct 28, 2004
- RENESAS TECHNOLOGY CORP.
- Tohru Koyama
- G01 - MEASURING TESTING
Information Patent Application
Processing method of semiconductor substrate
- Publication number 20040203257
- Publication date Oct 14, 2004
- Renesas Technology Corp.
- Takeshi Yoshida
- G02 - OPTICS
Information Patent Application
Semiconductor device and method for machining a semiconductor subst...
- Publication number 20040188789
- Publication date Sep 30, 2004
- Renesas Technology Corp.
- Tohru Koyama
- G02 - OPTICS
Information Patent Application
Method of manufacturing semiconductor device having MIM capacitor e...
- Publication number 20040171239
- Publication date Sep 2, 2004
- Renesas Technology Corp.
- Tomohiro Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Failure analysis method
- Publication number 20040103353
- Publication date May 27, 2004
- Renesas Technology Corp.
- Tohru Koyama
- G01 - MEASURING TESTING
Information Patent Application
Scanning probe microscope
- Publication number 20030115939
- Publication date Jun 26, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Yukari Imai
- G01 - MEASURING TESTING
Information Patent Application
Failure analysis device and failure analysis method
- Publication number 20020111759
- Publication date Aug 15, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Tohru Koyama
- G01 - MEASURING TESTING

Tohru Koyama

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device having MIM capacitor e...

Scanning probe microscope

Failure analysis device and failure analysis method

Method of and apparatus for analyzing failure

System LSI chip having a logic part and a memory part

System for analyzing a failure in a semiconductor wafer by calculat...

Scanning photoinduced current analyzer capable of detecting photoin...

Apparatus for analyzing a failure in a semiconductor wafer and meth...

Method of analyzing failure of semiconductor device by using emissi...

Scanning photoinduced current analyzer capable of detecting photoin...

Semiconductor device having a gate electrode of polycrystal layer a...

Method of manufacturing semiconductor device having a two layered s...

Semiconductor device having a two layered structure gate electrode

Patents Applicationslast 30 patents

Failure analyzer

Processing method of semiconductor substrate

Semiconductor device and method for machining a semiconductor subst...

Method of manufacturing semiconductor device having MIM capacitor e...

Failure analysis method

Scanning probe microscope

Failure analysis device and failure analysis method