Tomohisa Shimazu

Person

Tokyo-To, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thermal processing unit
- Patent number 7,479,619
- Issue date Jan 20, 2009
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal treatment apparatus
- Patent number 7,144,823
- Issue date Dec 5, 2006
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enveloping device and vertical heat-treating apparatus for semicond...
- Patent number 6,283,175
- Issue date Sep 4, 2001
- Tokyo Electron Limited
- Tomohisa Shimazu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical thermal treatment apparatus
- Patent number 6,235,121
- Issue date May 22, 2001
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enveloping device and vertical heat-treating apparatus for semicond...
- Patent number 6,142,773
- Issue date Nov 7, 2000
- Tokyo Electron Limited
- Tomohisa Shimazu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating boat for semiconductor wafers
- Patent number 6,062,853
- Issue date May 16, 2000
- Tokyo Electron Limited
- Tomohisa Shimazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz cover
- Patent number D423026
- Issue date Apr 18, 2000
- Tokyo Electron Limited
- Tomohisa Shimazu
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate processing apparatus
- Patent number 6,030,457
- Issue date Feb 29, 2000
- Tokyo Electron Limited
- Tomohisa Shimazu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal treatment apparatus with thermal protection members interce...
- Patent number 6,031,205
- Issue date Feb 29, 2000
- Tokyo Electron Limited
- Tomohisa Shimazu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Wafer boat for use in a semiconductor wafer heat processing apparatus
- Patent number D411176
- Issue date Jun 22, 1999
- Tokyo Electron Limited
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Wafer boat for use in a semiconductor wafer heat processing apparatus
- Patent number D409158
- Issue date May 4, 1999
- Tokyo Electron Limited
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Inner tube for use in a semiconductor wafer heat processing apparatus
- Patent number D407696
- Issue date Apr 6, 1999
- Tokyo Electron Limited
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Tube for use in a semiconductor wafer heat processing apparatus
- Patent number D405431
- Issue date Feb 9, 1999
- Tokyo Electron Ltd.
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Processing tube for use in a semiconductor wafer heat processing ap...
- Patent number D405062
- Issue date Feb 2, 1999
- Tokyo Electron Ltd.
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Wafer boat for use in a semiconductor wafer heat processing apparatus
- Patent number D404371
- Issue date Jan 19, 1999
- Tokyo Electron Limited
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heat retaining tube base for use in a semiconductor wafer head proc...
- Patent number D404375
- Issue date Jan 19, 1999
- Tokyo Electron Limited
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Outer tube for use in a semiconductor wafer heat processing apparatus
- Patent number D404368
- Issue date Jan 19, 1999
- Tokyo Electron Limited
- Tomohisa Shimazu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heat treatment process for preventing slips in semiconductor wafers
- Patent number 5,775,889
- Issue date Jul 7, 1998
- Tokyo Electron Limited
- Junichi Kobayashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment apparatus
- Patent number 5,718,574
- Issue date Feb 17, 1998
- Tokyo Electron Limited
- Tomohisa Shimazu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 5,709,543
- Issue date Jan 20, 1998
- Tokyo Electron Limited
- Tomohisa Shimazu
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Thermal processing unit
- Publication number 20060258170
- Publication date Nov 16, 2006
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal treating apparatus
- Publication number 20050028738
- Publication date Feb 10, 2005
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS

Tomohisa Shimazu

Person

Patents Grantslast 30 patents

Thermal processing unit

Thermal treatment apparatus

Enveloping device and vertical heat-treating apparatus for semicond...

Vertical thermal treatment apparatus

Enveloping device and vertical heat-treating apparatus for semicond...

Heat-treating boat for semiconductor wafers

Quartz cover

Substrate processing apparatus

Thermal treatment apparatus with thermal protection members interce...

Wafer boat for use in a semiconductor wafer heat processing apparatus

Wafer boat for use in a semiconductor wafer heat processing apparatus

Inner tube for use in a semiconductor wafer heat processing apparatus

Tube for use in a semiconductor wafer heat processing apparatus

Processing tube for use in a semiconductor wafer heat processing ap...

Wafer boat for use in a semiconductor wafer heat processing apparatus

Heat retaining tube base for use in a semiconductor wafer head proc...

Outer tube for use in a semiconductor wafer heat processing apparatus

Heat treatment process for preventing slips in semiconductor wafers

Heat treatment apparatus

Vertical heat treatment apparatus

Patents Applicationslast 30 patents

Thermal processing unit

Thermal treating apparatus