Toru MARUYAMA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 12,062,563
- Issue date Aug 13, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Temperature regulating apparatus and polishing apparatus
- Patent number 12,023,777
- Issue date Jul 2, 2024
- Ebara Corporation
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Grant
System for adjusting pad surface temperature and polishing apparatus
- Patent number 11,992,915
- Issue date May 28, 2024
- Ebara Corporation
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus having surface-property measuring device of pol...
- Patent number 11,958,161
- Issue date Apr 16, 2024
- Ebara Corporation
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Grant
Method of cleaning an optical film-thickness measuring system
- Patent number 11,919,048
- Issue date Mar 5, 2024
- Ebara Corporation
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Pad-temperature regulating apparatus, method of regulating pad-temp...
- Patent number 11,919,124
- Issue date Mar 5, 2024
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Leak detection system and inspection method for the system
- Patent number 11,898,940
- Issue date Feb 13, 2024
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Pad-temperature regulating apparatus, and polishing apparatus
- Patent number 11,839,947
- Issue date Dec 12, 2023
- Ebara Corporation
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Grant
Pad-temperature regulating apparatus, pad-temperature regulating me...
- Patent number 11,826,871
- Issue date Nov 28, 2023
- Ebara Corporation
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning device
- Patent number 11,517,940
- Issue date Dec 6, 2022
- Ebara Corporation
- Shuji Uozumi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,450,544
- Issue date Sep 20, 2022
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus for heat exchanger and polishing apparatus
- Patent number 11,383,345
- Issue date Jul 12, 2022
- Ebara Corporation
- Yasuyuki Motoshima
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Cryocooler and cryocooler pipe system
- Patent number 11,262,105
- Issue date Mar 1, 2022
- Sumitomo Heavy Industries, Ltd.
- Toru Maruyama
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Substrate processing apparatus and method for detecting abnormality...
- Patent number 10,903,101
- Issue date Jan 26, 2021
- Ebara Corporation
- Mitsunori Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Leak checking method, and computer-readable storage medium for perf...
- Patent number 10,792,784
- Issue date Oct 6, 2020
- Ebara Corporation
- Suguru Sakugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,710,208
- Issue date Jul 14, 2020
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 10,665,487
- Issue date May 26, 2020
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat exchanger for regulating surface temperature of a polishing pa...
- Patent number 10,589,398
- Issue date Mar 17, 2020
- Ebara Corporation
- Yohei Eto
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Head height adjustment device and substrate processing apparatus pr...
- Patent number 10,556,314
- Issue date Feb 11, 2020
- Ebara Corporation
- Suguru Sakugawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate transfer hand
- Patent number 10,475,691
- Issue date Nov 12, 2019
- Ebara Corporation
- Toru Maruyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus and pipe cleaning method for substra...
- Patent number 10,438,818
- Issue date Oct 8, 2019
- Ebara Corporation
- Junji Kunisawa
- B08 - CLEANING
Information Patent Grant
Apparatus and method for regulating surface temperature of polishin...
- Patent number 10,414,018
- Issue date Sep 17, 2019
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 10,373,845
- Issue date Aug 6, 2019
- Ebara Corporation
- Fujihiko Toyomasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning chemical supplying device, cleaning chemical supplying met...
- Patent number 10,340,159
- Issue date Jul 2, 2019
- Ebara Corporation
- Fujihiko Toyomasu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 10,259,098
- Issue date Apr 16, 2019
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,195,712
- Issue date Feb 5, 2019
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Monitoring method and cooling system
- Patent number 10,047,977
- Issue date Aug 14, 2018
- Sumitomo Heavy Industries, Ltd.
- Jyunya Hamasaki
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,035,238
- Issue date Jul 31, 2018
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 9,969,046
- Issue date May 15, 2018
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Pressure calibration jig and substrate processing apparatus
- Patent number 9,922,852
- Issue date Mar 20, 2018
- Ebara Corporation
- Suguru Sakugawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
- Publication number 20230356267
- Publication date Nov 9, 2023
- EBARA CORPORATION
- Shuji UOZUMI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20220375775
- Publication date Nov 24, 2022
- EBARA CORPORATION
- Itsuki KOBATA
- B24 - GRINDING POLISHING
Information Patent Application
PAD-TEMPERATURE REGULATING APPARATUS, AND POLISHING APPARATUS
- Publication number 20220305617
- Publication date Sep 29, 2022
- EBARA CORPORATION
- Keisuke KAMIKI
- B24 - GRINDING POLISHING
Information Patent Application
TEMPERATURE REGULATING APPARATUS AND POLISHING APPARATUS
- Publication number 20220212312
- Publication date Jul 7, 2022
- EBARA CORPORATION
- Keisuke KAMIKI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF CLEANING AN OPTICAL FILM-THICKNESS MEASURING SYSTEM
- Publication number 20220072590
- Publication date Mar 10, 2022
- EBARA CORPORATION
- Nobuyuki Takahashi
- B08 - CLEANING
Information Patent Application
PAD-TEMPERATURE REGULATING APPARATUS, METHOD OF REGULATING PAD-TEMP...
- Publication number 20220072679
- Publication date Mar 10, 2022
- EBARA CORPORATION
- Toru MARUYAMA
- B24 - GRINDING POLISHING
Information Patent Application
LEAK DETECTION SYSTEM AND INSPECTION METHOD FOR THE SYSTEM
- Publication number 20220034745
- Publication date Feb 3, 2022
- EBARA CORPORATION
- Toru Maruyama
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS HAVING SURFACE-PROPERTY MEASURING DEVICE OF POL...
- Publication number 20210370461
- Publication date Dec 2, 2021
- EBARA CORPORATION
- Keisuke KAMIKI
- B24 - GRINDING POLISHING
Information Patent Application
PAD-TEMPERATURE REGULATING APPARATUS, PAD-TEMPERATURE REGULATING ME...
- Publication number 20210347004
- Publication date Nov 11, 2021
- EBARA CORPORATION
- Shuji UOZUMI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...
- Publication number 20210229235
- Publication date Jul 29, 2021
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM FOR ADJUSTING PAD SURFACE TEMPERATURE AND POLISHING APPARATUS
- Publication number 20210170545
- Publication date Jun 10, 2021
- EBARA CORPORATION
- SHUJI UOZUMI
- B24 - GRINDING POLISHING
Information Patent Application
CRYOCOOLER AND CRYOCOOLER PIPE SYSTEM
- Publication number 20200393168
- Publication date Dec 17, 2020
- Sumitomo Heavy Industries, Ltd.
- Toru MARUYAMA
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
CLEANING APPARATUS FOR HEAT EXCHANGER AND POLISHING APPARATUS
- Publication number 20200306920
- Publication date Oct 1, 2020
- EBARA CORPORATION
- Yasuyuki Motoshima
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
- Publication number 20200276619
- Publication date Sep 3, 2020
- EBARA CORPORATION
- Shuji UOZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20200243364
- Publication date Jul 30, 2020
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE
- Publication number 20200188962
- Publication date Jun 18, 2020
- EBARA CORPORATION
- SHUJI UOZUMI
- B08 - CLEANING
Information Patent Application
METHOD OF CHECKING LEAKAGE OF FLUID AND POLISHING APPARATUS
- Publication number 20190389030
- Publication date Dec 26, 2019
- EBARA CORPORATION
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...
- Publication number 20190168354
- Publication date Jun 6, 2019
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...
- Publication number 20190126428
- Publication date May 2, 2019
- EBARA CORPORATION
- Toru MARUYAMA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20190118334
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
LEAK CHECKING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM FOR PERF...
- Publication number 20180304434
- Publication date Oct 25, 2018
- EBARA CORPORATION
- Suguru SAKUGAWA
- B24 - GRINDING POLISHING
Information Patent Application
HEAT EXCHANGER FOR REGULATING SURFACE TEMPERATURE OF A POLISHING PA...
- Publication number 20180236631
- Publication date Aug 23, 2018
- EBARA CORPORATION
- Yohei Eto
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20180222007
- Publication date Aug 9, 2018
- EBARA CORPORATION
- Yasuyuki MOTOSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20180021917
- Publication date Jan 25, 2018
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PR...
- Publication number 20180001438
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Suguru SAKUGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20170361420
- Publication date Dec 21, 2017
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170352573
- Publication date Dec 7, 2017
- EBARA CORPORATION
- Zhongxin WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...
- Publication number 20170239778
- Publication date Aug 24, 2017
- EBARA CORPORATION
- Toru MARUYAMA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PIPE CLEANING METHOD FOR SUBSTRA...
- Publication number 20170117165
- Publication date Apr 27, 2017
- EBARA CORPORATION
- Junji KUNISAWA
- B08 - CLEANING
Information Patent Application
PRESSURE CALIBRATION JIG AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170092519
- Publication date Mar 30, 2017
- EBARA CORPORATION
- Suguru SAKUGAWA
- H01 - BASIC ELECTRIC ELEMENTS

Toru MARUYAMA

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing system, and su...

Temperature regulating apparatus and polishing apparatus

System for adjusting pad surface temperature and polishing apparatus

Polishing apparatus having surface-property measuring device of pol...

Method of cleaning an optical film-thickness measuring system

Pad-temperature regulating apparatus, method of regulating pad-temp...

Leak detection system and inspection method for the system

Pad-temperature regulating apparatus, and polishing apparatus

Pad-temperature regulating apparatus, pad-temperature regulating me...

Substrate cleaning device

Substrate processing apparatus, substrate processing system, and su...

Cleaning apparatus for heat exchanger and polishing apparatus

Cryocooler and cryocooler pipe system

Substrate processing apparatus and method for detecting abnormality...

Leak checking method, and computer-readable storage medium for perf...

Polishing method and polishing apparatus

Substrate processing apparatus, substrate processing system, and su...

Heat exchanger for regulating surface temperature of a polishing pa...

Head height adjustment device and substrate processing apparatus pr...

Substrate transfer hand

Substrate processing apparatus and pipe cleaning method for substra...

Apparatus and method for regulating surface temperature of polishin...

Substrate cleaning apparatus and substrate cleaning method

Cleaning chemical supplying device, cleaning chemical supplying met...

Method and apparatus for polishing a substrate

Polishing method and polishing apparatus

Monitoring method and cooling system

Polishing method and polishing apparatus

Method and apparatus for polishing a substrate

Pressure calibration jig and substrate processing apparatus

Patents Applicationslast 30 patents

CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

PAD-TEMPERATURE REGULATING APPARATUS, AND POLISHING APPARATUS

TEMPERATURE REGULATING APPARATUS AND POLISHING APPARATUS

METHOD OF CLEANING AN OPTICAL FILM-THICKNESS MEASURING SYSTEM

PAD-TEMPERATURE REGULATING APPARATUS, METHOD OF REGULATING PAD-TEMP...

LEAK DETECTION SYSTEM AND INSPECTION METHOD FOR THE SYSTEM

POLISHING APPARATUS HAVING SURFACE-PROPERTY MEASURING DEVICE OF POL...

PAD-TEMPERATURE REGULATING APPARATUS, PAD-TEMPERATURE REGULATING ME...

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...

SYSTEM FOR ADJUSTING PAD SURFACE TEMPERATURE AND POLISHING APPARATUS

CRYOCOOLER AND CRYOCOOLER PIPE SYSTEM

CLEANING APPARATUS FOR HEAT EXCHANGER AND POLISHING APPARATUS

CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

SUBSTRATE CLEANING DEVICE

METHOD OF CHECKING LEAKAGE OF FLUID AND POLISHING APPARATUS

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...

HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...

POLISHING METHOD AND POLISHING APPARATUS

LEAK CHECKING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM FOR PERF...

HEAT EXCHANGER FOR REGULATING SURFACE TEMPERATURE OF A POLISHING PA...

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE

POLISHING METHOD AND POLISHING APPARATUS

HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PR...

POLISHING METHOD AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...

SUBSTRATE PROCESSING APPARATUS AND PIPE CLEANING METHOD FOR SUBSTRA...

PRESSURE CALIBRATION JIG AND SUBSTRATE PROCESSING APPARATUS