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Toshihiko Ozawa
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Saitama-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for evaluating image formation performance
Patent number
7,061,671
Issue date
Jun 13, 2006
Nikon Corporation
Toshihiko Ozawa
G02 - OPTICS
Information
Patent Grant
Method for evaluating image formation performance
Patent number
6,870,668
Issue date
Mar 22, 2005
Nikon Corporation
Toshihiko Ozawa
G02 - OPTICS
Information
Patent Grant
Projection optical system and an exposure apparatus with the projec...
Patent number
6,831,731
Issue date
Dec 14, 2004
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Production method of projection optical system
Patent number
6,788,389
Issue date
Sep 7, 2004
Nikon Corporation
Youhei Fujishima
C30 - CRYSTAL GROWTH
Information
Patent Grant
Projection exposure apparatus with a catadioptric projection optica...
Patent number
6,661,499
Issue date
Dec 9, 2003
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection exposure apparatus with a catadioptric projection optica...
Patent number
6,466,303
Issue date
Oct 15, 2002
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Exposure method and apparatus
Patent number
5,739,898
Issue date
Apr 14, 1998
Nikon Corporation
Toshihiko Ozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Projection optical system and an exposure apparatus with the projec...
Publication number
20050122499
Publication date
Jun 9, 2005
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Method for evaluating image formation performance
Publication number
20050018277
Publication date
Jan 27, 2005
Nikon Corporation
Toshihiko Ozawa
G02 - OPTICS
Information
Patent Application
Method for evaluating image formation performance
Publication number
20050018278
Publication date
Jan 27, 2005
Nikon Corporation
Toshihiko Ozawa
G02 - OPTICS
Information
Patent Application
Projection optical system and an exposure apparatus with the projec...
Publication number
20030058421
Publication date
Mar 27, 2003
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Production method of projection optical system
Publication number
20030053036
Publication date
Mar 20, 2003
Nikon Corporation
Youhei Fujishima
C30 - CRYSTAL GROWTH
Information
Patent Application
Projection exposure apparatus with a catadioptric projection optica...
Publication number
20030011756
Publication date
Jan 16, 2003
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS