Toshihiro Sasaya

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus and method with adjustment of rotatio...
- Patent number 6,958,803
- Issue date Oct 25, 2005
- Nikon Corporation
- Toshihiro Sasaya
- F21 - LIGHTING
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number RE38403
- Issue date Jan 27, 2004
- Nikon Corporation
- Toshihiro Sasaya
- 359 - Optical: systems and elements
Information Patent Grant
Method of manufacturing and using correction member to correct aber...
- Patent number 6,262,793
- Issue date Jul 17, 2001
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number 5,943,172
- Issue date Aug 24, 1999
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number 5,831,776
- Issue date Nov 3, 1998
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Grant
Projection optical system and projection exposure apparatus
- Patent number 5,805,344
- Issue date Sep 8, 1998
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Projection exposure apparatus and method with adjustment of rotatio...
- Publication number 20040046950
- Publication date Mar 11, 2004
- Nikon Corporation
- Toshihiro Sasaya
- G02 - OPTICS
Information Patent Application
Projection exposure apparatus
- Publication number 20020054282
- Publication date May 9, 2002
- NIKON CORPORATION
- Toshihiro Sasaya
- G02 - OPTICS