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Toshiyuki Ikeuchi
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Patents Grants
last 30 patents
Information
Patent Grant
Battery pack
Patent number
12,132,221
Issue date
Oct 29, 2024
Honda Motor Co., Ltd.
Kenta Yashiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film-forming method and film-forming apparatus
Patent number
12,018,370
Issue date
Jun 25, 2024
Tokyo Electron Limited
Tatsuhiko Tanimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming silicon oxide film on tungsten film
Patent number
10,636,649
Issue date
Apr 28, 2020
Tokyo Electron Limited
Kyungseok Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming silicon oxide film
Patent number
9,472,394
Issue date
Oct 18, 2016
Tokyo Electron Limited
Hiroki Murakami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming silicon oxide film
Patent number
9,472,393
Issue date
Oct 18, 2016
Tokyo Electron Limited
Toshiyuki Ikeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition method and film deposition apparatus
Patent number
9,005,459
Issue date
Apr 14, 2015
Tokyo Electron Limited
Akinobu Kakimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition method
Patent number
8,658,247
Issue date
Feb 25, 2014
Tokyo Electron Limited
Toshiyuki Ikeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film forming method, thin film forming apparatus, and program
Patent number
8,642,486
Issue date
Feb 4, 2014
Tokyo Electron Limited
Toshiyuki Ikeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Batch CVD method and apparatus for semiconductor process
Patent number
8,461,059
Issue date
Jun 11, 2013
Tokyo Electron Limited
Toshiyuki Ikeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Oxidizing method and oxidizing unit for object to be processed
Patent number
7,926,445
Issue date
Apr 19, 2011
Tokyo Electron Limited
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Oxidizing method and oxidizing unit for object to be processed
Patent number
7,674,724
Issue date
Mar 9, 2010
Tokyo Electron Limited
Keisuke Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment method and heat treatment apparatus
Patent number
7,625,604
Issue date
Dec 1, 2009
Tokyo Electron Limited
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat processing method and apparatus for semiconductor process
Patent number
7,605,095
Issue date
Oct 20, 2009
Tokyo Electron Limited
Toshiyuki Ikeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Oxidizing method and oxidizing unit of object for object to be proc...
Patent number
7,419,550
Issue date
Sep 2, 2008
Tokyo Electron Limited
Keisuke Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxidizing method and oxidizing unit for object to be processed
Patent number
7,304,003
Issue date
Dec 4, 2007
Tokyo Electron Limited
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Oxidation method for semiconductor process
Patent number
7,125,811
Issue date
Oct 24, 2006
Tokyo Electron Limited
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of oxidizing work pieces and oxidation system
Patent number
6,869,892
Issue date
Mar 22, 2005
Tokyo Electron Limited
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
BATTERY PACK
Publication number
20230198085
Publication date
Jun 22, 2023
Honda Motor Co., Ltd.
Kenta YASHIRO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
Publication number
20220396874
Publication date
Dec 15, 2022
Tokyo Electron Limited
Tatsuhiko TANIMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND OXIDATION METHOD
Publication number
20220068637
Publication date
Mar 3, 2022
Tokyo Electron Limited
Kotaro MIYATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM
Publication number
20190043712
Publication date
Feb 7, 2019
TOKYO ELECTRON LIMITED
Kyungseok KO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas Injector and Vertical Heat Treatment Apparatus
Publication number
20180135179
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Toshiyuki IKEUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLEANING METHOD OF SILICON OXIDE FILM FORMING APPARATUS, SILICON OX...
Publication number
20150267292
Publication date
Sep 24, 2015
TOKYO ELECTRON LIMITED
Cheoljung KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM
Publication number
20150235846
Publication date
Aug 20, 2015
TOKYO ELECTRON LIMITED
Toshiyuki IKEUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILICON OXIDE FILM FORMING METHOD AND SILICON OXIDE FILM FORMING AP...
Publication number
20140295675
Publication date
Oct 2, 2014
TOKYO ELECTRONIC LIMITED
Toshiyuki IKEUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING SILICON OXIDE FILM
Publication number
20140199853
Publication date
Jul 17, 2014
TOKYO ELECTRON LIMITED
Hiroki MURAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM FORMING APPARATUS AND COMPUTER-READABLE MEDIUM
Publication number
20140090594
Publication date
Apr 3, 2014
TOKYO ELECTRON LIMITED
Toshiyuki IKEUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING SILICON OXIDE FILM
Publication number
20130109197
Publication date
May 2, 2013
TOKYO ELECTRON LIMITED
Hiroki MURAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
Publication number
20120267340
Publication date
Oct 25, 2012
TOKYO ELECTRON LIMITED
Akinobu KAKIMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
Publication number
20120190215
Publication date
Jul 26, 2012
TOKYO ELECTRON LIMITED
Toshiyuki IKEUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THIN FILM FORMING METHOD, THIN FILM FORMING APPARATUS, AND PROGRAM
Publication number
20120164847
Publication date
Jun 28, 2012
TOKYO ELECTRON LIMITED
Toshiyuki IKEUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BATCH CVD METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
Publication number
20110021033
Publication date
Jan 27, 2011
TOKYO ELECTRON LIMITED
Toshiyuki Ikeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heat processing method and apparatus for semiconductor process
Publication number
20080200038
Publication date
Aug 21, 2008
Toshiyuki Ikeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Oxidizing method and oxidizing unit for object to be processed
Publication number
20080056967
Publication date
Mar 6, 2008
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Oxidizing method and oxidizing unit of object for object to be proc...
Publication number
20060183343
Publication date
Aug 17, 2006
Keisuke Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Oxidizing method and oxidizing unit for object to be processed
Publication number
20050272269
Publication date
Dec 8, 2005
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Oxidizing method and oxidizing unit for object to be processed
Publication number
20050241578
Publication date
Nov 3, 2005
Kimiya Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment method and heat treament apparatus
Publication number
20050201894
Publication date
Sep 15, 2005
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Oxidation method for semiconductor process
Publication number
20050079699
Publication date
Apr 14, 2005
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...