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TSAN-HUA HUANG

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  • TAINAN CITY, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Reaction chamber for vapor deposition apparatus
    • Patent number 10,927,456
    • Issue date Feb 23, 2021
    • Hermes-Epitek Corp.
    • Yu-Sheng Liang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vapor phase film deposition apparatus
    • Patent number 10,844,490
    • Issue date Nov 24, 2020
    • Hermes-Epitek Corp.
    • Noboru Suda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas injector used for semiconductor equipment
    • Patent number 10,731,253
    • Issue date Aug 4, 2020
    • Hermes-Epitek Corporation
    • Tsan-Hua Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Detachable gas injector used for semiconductor equipment
    • Patent number 10,651,016
    • Issue date May 12, 2020
    • Hermes-Epitek Corporation
    • Tsan-Hua Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Assembling device used for semiconductor equipment
    • Patent number 10,418,264
    • Issue date Sep 17, 2019
    • Hermes-Epitek Corporation
    • Tsan-Hua Huang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Chemical vapor deposition apparatus
    • Patent number 10,208,378
    • Issue date Feb 19, 2019
    • Hermes-Epitek Corp.
    • Junji Komeno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas injector and cover plate assembly for semiconductor equipment
    • Patent number 9,855,575
    • Issue date Jan 2, 2018
    • Hermes-Epitek Corporation
    • Tsan-Hua Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas injector and cover plate assembly for semiconductor equipment
    • Patent number 9,427,762
    • Issue date Aug 30, 2016
    • Hermes-Epitek Corporation
    • Tsan-Hua Huang
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Semiconductor equipment
    • Patent number 9,269,547
    • Issue date Feb 23, 2016
    • Hermes-Epitek Corporation
    • Jui-Sheng Cheng
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead
    • Patent number 9,126,214
    • Issue date Sep 8, 2015
    • Hermes-Epitek Corporation
    • Chien-Ping Huang
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Semiconductor equipment
    • Patent number 8,719,993
    • Issue date May 13, 2014
    • Hermes-Epitek Corporation
    • Chien-Ping Huang
    • B08 - CLEANING
  • Information Patent Grant

    Method for making a showerhead
    • Patent number 8,484,847
    • Issue date Jul 16, 2013
    • Hermes-Epitek Corporation
    • Chien-Ping Huang
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Semiconductor equipment
    • Patent number 8,448,288
    • Issue date May 28, 2013
    • Hermes-Epitek Corporation
    • Chien-Ping Huang
    • B08 - CLEANING

Patents Applicationslast 30 patents

  • Information Patent Application

    REACTION CHAMBER FOR VAPOR DEPOSITION APPARATUS
    • Publication number 20200017964
    • Publication date Jan 16, 2020
    • HERMES-EPITEK CORP.
    • Yu-Sheng LIANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR PHASE FILM DEPOSITION APPARATUS
    • Publication number 20190376179
    • Publication date Dec 12, 2019
    • HERMES-EPITEK CORP.
    • NOBORU SUDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DETACHABLE GAS INJECTOR USED FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20180269036
    • Publication date Sep 20, 2018
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS INJECTOR USED FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20180202044
    • Publication date Jul 19, 2018
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL VAPOR DEPOSITION APPARATUS
    • Publication number 20180163301
    • Publication date Jun 14, 2018
    • HERMES-EPITEK CORP.
    • JUNJI KOMENO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS INJECTOR DEVICE USED FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20180163304
    • Publication date Jun 14, 2018
    • HERMES-EPITEK CORPORATION
    • Po-Jung Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas Distribution Apparatus for Deposition System
    • Publication number 20180119277
    • Publication date May 3, 2018
    • HERMES-EPITEK CORPORATION
    • Junji Komeno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS INJECTOR DEVICE USED FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20180094353
    • Publication date Apr 5, 2018
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    ASSEMBLING DEVICE USED FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20170358463
    • Publication date Dec 14, 2017
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ASSEMBLING DEVICE USED FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20170358473
    • Publication date Dec 14, 2017
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS INJECTOR AND COVER PLATE ASSEMBLY FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20160244876
    • Publication date Aug 25, 2016
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer Holder
    • Publication number 20160240398
    • Publication date Aug 18, 2016
    • HERMES-EPITEK CORPORATION
    • Takahiro Oishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CLEANING APPARATUS FOR SEMICONDUCTOR EQUIPMENT
    • Publication number 20160233115
    • Publication date Aug 11, 2016
    • HERMES-EPITEK CORPORATION
    • Chien-Ping HUANG
    • A46 - BRUSHWARE
  • Information Patent Application

    Gas Injector and Cover Plate Assembly for Semiconductor Equipment
    • Publication number 20140239091
    • Publication date Aug 28, 2014
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    Semiconductor Equipment
    • Publication number 20140000655
    • Publication date Jan 2, 2014
    • Chien-Ping HUANG
    • A46 - BRUSHWARE
  • Information Patent Application

    Showerhead
    • Publication number 20130277459
    • Publication date Oct 24, 2013
    • HERMES-EPITEK CORPORATION
    • Chien-Ping HUANG
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    SEMICONDUCTOR EQUIPMENT
    • Publication number 20130219639
    • Publication date Aug 29, 2013
    • HERMES-EPITEK CORPORATION
    • Chien-Ping HUANG
    • A46 - BRUSHWARE
  • Information Patent Application

    Gas Distribution Apparatus with Heat Exchanging Channels
    • Publication number 20130220222
    • Publication date Aug 29, 2013
    • HERMES-EPITEK CORPORATION
    • Tsan-Hua Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor Equipment
    • Publication number 20120304922
    • Publication date Dec 6, 2012
    • HERMES-EPITEK CORPORATION
    • Jui-Sheng CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATER ASSEMBLY AND WAFER PROCESSING APPARATUS USING THE SAME
    • Publication number 20120085747
    • Publication date Apr 12, 2012
    • Benson CHAO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Showerhead
    • Publication number 20120024478
    • Publication date Feb 2, 2012
    • HERMES-EPITEK CORPORATION
    • Chien-Ping Huang
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Semiconductor Equipment
    • Publication number 20110186078
    • Publication date Aug 4, 2011
    • HERMES-EPITEK CORPORATION
    • Chien-Ping HUANG
    • B08 - CLEANING
  • Information Patent Application

    Showerhead
    • Publication number 20110186228
    • Publication date Aug 4, 2011
    • HERMES-EPITEK CORPORATION
    • Chien-Ping Huang
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Epitaxy Processing System and Its Processing Method
    • Publication number 20100055330
    • Publication date Mar 4, 2010
    • HERMES SYSTEMS INC.
    • Tsan-Hua Huang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR GAS DISTRIBUTION AND ITS APPLICATIONS
    • Publication number 20090211707
    • Publication date Aug 27, 2009
    • HERMES SYSTEMS INC.
    • BENSON CHAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...