Tsuyoshi Naraki

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure method
- Patent number 6,617,097
- Issue date Sep 9, 2003
- Sharp Kabushiki Kaisha
- Yasunori Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,496,249
- Issue date Dec 17, 2002
- Sharp Kabushiki Kaishi
- Yasunori Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface height detecting apparatus and exposure apparatus using the...
- Patent number 6,479,832
- Issue date Nov 12, 2002
- Nikon Corporation
- Tsuyoshi Naraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning type exposure apparatus and exposure method
- Patent number RE37361
- Issue date Sep 11, 2001
- Nikon Corporation
- Masamitsu Yanagihara
- 355 - Photocopying
Information Patent Grant
Exposure method and scanning type exposure apparatus
- Patent number 6,239,861
- Issue date May 29, 2001
- Nikon Corporation
- Kei Nara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring orthogonality having a third interferometer wh...
- Patent number 6,134,007
- Issue date Oct 17, 2000
- Nikon Corporation
- Tsuyoshi Naraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring orthogonality in a stage of an exposure apparatus
- Patent number 5,995,225
- Issue date Nov 30, 1999
- Nikon Corporation
- Tsuyoshi Naraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan type exposure apparatus
- Patent number 5,668,624
- Issue date Sep 16, 1997
- Nikon Corporation
- Tsuyoshi Naraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning type exposure apparatus and exposure method
- Patent number 5,625,436
- Issue date Apr 29, 1997
- Nikon Corporation
- Masamitsu Yanagihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-beam scanning projection exposure apparatus and method with b...
- Patent number 5,581,075
- Issue date Dec 3, 1996
- Nikon Corporation
- Tsuyoshi Naraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning light exposure apparatus
- Patent number 5,579,147
- Issue date Nov 26, 1996
- Nikon Corporation
- Susumu Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate positioning apparatus
- Patent number 4,655,584
- Issue date Apr 7, 1987
- Nippon Kogaku K.K.
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus
- Publication number 20010009455
- Publication date Jul 26, 2001
- Yasunori Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method
- Publication number 20010006764
- Publication date Jul 5, 2001
- Yasunori Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tsuyoshi Naraki

Person

Patents Grantslast 30 patents

Exposure method

Exposure apparatus

Surface height detecting apparatus and exposure apparatus using the...

Scanning type exposure apparatus and exposure method

Exposure method and scanning type exposure apparatus

Method for measuring orthogonality having a third interferometer wh...

Method for measuring orthogonality in a stage of an exposure apparatus

Scan type exposure apparatus

Scanning type exposure apparatus and exposure method

Multi-beam scanning projection exposure apparatus and method with b...

Scanning light exposure apparatus

Substrate positioning apparatus

Patents Applicationslast 30 patents

Exposure apparatus

Exposure method