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Ulrich Egger
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Kanagawa-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming ferrocapacitors and FeRAM devices
Patent number
7,316,980
Issue date
Jan 8, 2008
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching ferroelectric devices
Patent number
7,098,142
Issue date
Aug 29, 2006
Infineon Technologies AG
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for inhibiting hydrogen damage in ferroelectric capacitor de...
Patent number
7,071,506
Issue date
Jul 4, 2006
Infineon Technologies AG
Bum-Ki Moon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hardmask with high selectivity for Ir barriers for ferroelectric ca...
Patent number
7,045,837
Issue date
May 16, 2006
Infineon Technologies AG
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sidewall structure and method of fabrication for reducing oxygen di...
Patent number
7,042,705
Issue date
May 9, 2006
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fence-free etching of iridium barrier having a steep taper angle
Patent number
7,015,049
Issue date
Mar 21, 2006
Infineon Technologies AG
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a ferroelectric capacitor that includes etchin...
Patent number
7,001,781
Issue date
Feb 21, 2006
Infineon Technologies AG
Jenny Lian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabrication of an FeRAM capacitor and an FeRAM capacitor...
Patent number
7,001,780
Issue date
Feb 21, 2006
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a ferroelectric capacitor device
Patent number
6,924,156
Issue date
Aug 2, 2005
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Avoiding shorting in capacitors
Patent number
6,897,501
Issue date
May 24, 2005
Infineon Technologies Aktiengesellschaft
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication of a FeRAM capacitor using a noble metal hardmask
Patent number
6,867,053
Issue date
Mar 15, 2005
Infineon Technologies AG
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ferroelectric capacitor and process for its manufacture
Patent number
6,785,119
Issue date
Aug 31, 2004
Infineon Technologies AG
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for fabrication of a ferrocapacitor
Patent number
6,762,064
Issue date
Jul 13, 2004
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Encapsulation of ferroelectric capacitors
Patent number
6,746,877
Issue date
Jun 8, 2004
Infineon AG
Karl Hornik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning capacitors and capacitors made thereby
Patent number
6,734,057
Issue date
May 11, 2004
Infineon Technologies AG
Jenny Lian
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method for forming ferrocapacitors and FeRAM devices
Publication number
20050084984
Publication date
Apr 21, 2005
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for forming ferrocapacitors and FeRAM devices
Publication number
20050074979
Publication date
Apr 7, 2005
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for forming a contact to a top electrode in ferro...
Publication number
20050070030
Publication date
Mar 31, 2005
Stefan Gernhardt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and a method for forming a ferroelectric capacitor device
Publication number
20050067643
Publication date
Mar 31, 2005
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing a ferroelectric capacitor and a ferroelectric...
Publication number
20050067649
Publication date
Mar 31, 2005
Jenny Lian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for inhibiting hydrogen damage in ferroelectric c...
Publication number
20050051819
Publication date
Mar 10, 2005
Bum-Ki Moon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FENCE-FREE ETCHING OF IRIDIUM BARRIER HAVING A STEEP TAPER ANGLE
Publication number
20050045937
Publication date
Mar 3, 2005
Infineon Technologies AG
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabrication of an FeRAM capacitor and an FeRAM capacitor...
Publication number
20050029563
Publication date
Feb 10, 2005
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FABRICATION OF A FERAM CAPACITOR USING A NOBLE METAL HARDMASK
Publication number
20050023582
Publication date
Feb 3, 2005
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AVOIDING SHORTING IN CAPACITORS
Publication number
20040169211
Publication date
Sep 2, 2004
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for formation of hardmask elements during a semiconductor de...
Publication number
20040171274
Publication date
Sep 2, 2004
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching ferroelectric devices
Publication number
20040164050
Publication date
Aug 26, 2004
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sidewall structure and method of fabrication for reducing oxygen di...
Publication number
20040149477
Publication date
Aug 5, 2004
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Hardmask with high selectivity for Ir barriers for ferroelectic cap...
Publication number
20040150923
Publication date
Aug 5, 2004
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ferroelectric capacitor and process for its manufacture
Publication number
20040105213
Publication date
Jun 3, 2004
Ulrich Egger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING CAPACITORS AND CAPACITORS MADE THEREBY
Publication number
20040063278
Publication date
Apr 1, 2004
Jenny Lian
H01 - BASIC ELECTRIC ELEMENTS