Ulrich Wegmann

Person

Konigsbornn, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Measuring method and measuring system for interferometrically measu...
- Patent number 10,697,852
- Issue date Jun 30, 2020
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring method and measuring arrangement for an imaging optical s...
- Patent number 10,502,545
- Issue date Dec 10, 2019
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for wavefront analysis
- Patent number 10,386,728
- Issue date Aug 20, 2019
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus and measuring devic...
- Patent number 10,345,710
- Issue date Jul 9, 2019
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device with image defect determination
- Patent number 9,996,014
- Issue date Jun 12, 2018
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 9,436,095
- Issue date Sep 6, 2016
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 9,429,495
- Issue date Aug 30, 2016
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Optical imaging device with image defect determination
- Patent number 9,235,131
- Issue date Jan 12, 2016
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,836,929
- Issue date Sep 16, 2014
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,823,948
- Issue date Sep 2, 2014
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring an optical system
- Patent number 8,786,849
- Issue date Jul 22, 2014
- Carl Zeiss SMT GmbH
- Thomas Korb
- G01 - MEASURING TESTING
Information Patent Grant
Optical scattering disk, use thereof, and wavefront measuring appar...
- Patent number 8,654,346
- Issue date Feb 18, 2014
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Optical imaging device with image defect determination
- Patent number 8,537,333
- Issue date Sep 17, 2013
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,488,127
- Issue date Jul 16, 2013
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 8,330,935
- Issue date Dec 11, 2012
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical scattering disk, use thereof, and wavefront measuring appar...
- Patent number 8,199,333
- Issue date Jun 12, 2012
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G01 - MEASURING TESTING
Information Patent Grant
Optical apparatus and method for modifying the imaging behavior of...
- Patent number 8,169,595
- Issue date May 1, 2012
- Carl Zeiss SMT GmbH
- Martin Schriever
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for measuring wavefronts and for determining...
- Patent number 8,134,716
- Issue date Mar 13, 2012
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,120,763
- Issue date Feb 21, 2012
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the optical measurement of an optical system,...
- Patent number 8,004,690
- Issue date Aug 23, 2011
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the interferometric measurement of phase masks
- Patent number 7,911,624
- Issue date Mar 22, 2011
- Carl Zeiss SMS GmbH
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,796,274
- Issue date Sep 14, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,760,366
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing a miniaturized device
- Patent number 7,623,218
- Issue date Nov 24, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of optimizing imaging performance
- Patent number 7,570,345
- Issue date Aug 4, 2009
- Carl Zeiss SMT AG
- Gerd Reisinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for improving the imaging properties of a projection objecti...
- Patent number 7,456,933
- Issue date Nov 25, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical measuring apparatus and operating method for imaging error...
- Patent number 7,436,521
- Issue date Oct 14, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for wavefront measurement of an optical imaging s...
- Patent number 7,417,745
- Issue date Aug 26, 2008
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 7,408,652
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining telecentricity and microlithog...
- Patent number 7,365,861
- Issue date Apr 29, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASURING METHOD AND MEASURING SYSTEM FOR INTERFEROMETRICALLY MEASU...
- Publication number 20190212226
- Publication date Jul 11, 2019
- Carl Zeiss SMT GMBH
- Ulrich WEGMANN
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR WAVEFRONT ANALYSIS
- Publication number 20180299782
- Publication date Oct 18, 2018
- Carl Zeiss SMT GMBH
- Ulrich WEGMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASURING METHOD AND MEASURING ARRANGEMENT FOR AN IMAGING OPTICAL S...
- Publication number 20180087891
- Publication date Mar 29, 2018
- Carl Zeiss SMT GMBH
- Ulrich WEGMANN
- G01 - MEASURING TESTING
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20170082930
- Publication date Mar 23, 2017
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION
- Publication number 20160246182
- Publication date Aug 25, 2016
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20140347654
- Publication date Nov 27, 2014
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20140022524
- Publication date Jan 23, 2014
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION
- Publication number 20140016108
- Publication date Jan 16, 2014
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20130293869
- Publication date Nov 7, 2013
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING AN OPTICAL SYSTEM
- Publication number 20130271749
- Publication date Oct 17, 2013
- Thomas KORB
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20130120723
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SCATTERING DISK, USE THEREOF, AND WAVEFRONT MEASURING APPAR...
- Publication number 20120242996
- Publication date Sep 27, 2012
- Carl Zeiss SMT GMBH
- Ulrich WEGMANN
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20120113429
- Publication date May 10, 2012
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION
- Publication number 20110164232
- Publication date Jul 7, 2011
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20100315651
- Publication date Dec 16, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20100141912
- Publication date Jun 10, 2010
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090257049
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS AND METHOD FOR MODIFYING THE IMAGING BEHAVIOR OF...
- Publication number 20090174876
- Publication date Jul 9, 2009
- Carl Zeiss SMT AG
- Martin Schriever
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and Method for the Optical Measurement of an Optical System,...
- Publication number 20090116036
- Publication date May 7, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SCATTERING DISK, USE THEREOF, AND WAVEFRONT MEASURING APPAR...
- Publication number 20090051927
- Publication date Feb 26, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090021726
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20080309894
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR POLARIZATION-SPECIFIC EXAMINATION, OPTICAL IMAGING SY...
- Publication number 20080252888
- Publication date Oct 16, 2008
- Carl Zeiss SMT AG
- Ulrich WEGMANN
- G02 - OPTICS
Information Patent Application
System for Measuring the Image Quality of an Optical Imaging System
- Publication number 20080252876
- Publication date Oct 16, 2008
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus For Measuring Wavefronts and For Determining...
- Publication number 20080231840
- Publication date Sep 25, 2008
- CARL ZEISS SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Application
Device and Method for the Interferometric Measurement of Phase Masks
- Publication number 20080231862
- Publication date Sep 25, 2008
- CARL ZEISS SMS GMBH
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20080180688
- Publication date Jul 31, 2008
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR WAVEFRONT DETECTION
- Publication number 20080144043
- Publication date Jun 19, 2008
- Carl Zeiss SMT AG
- Ulrich WEGMANN
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE DETERMINATION OF IMAGING ERRORS AND MICRO...
- Publication number 20080130012
- Publication date Jun 5, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method For Structuring A Substrate Using Multiple Exposure
- Publication number 20080036982
- Publication date Feb 14, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ulrich Wegmann

Person

Patents Grantslast 30 patents

Measuring method and measuring system for interferometrically measu...

Measuring method and measuring arrangement for an imaging optical s...

Device and method for wavefront analysis

Microlithographic projection exposure apparatus and measuring devic...

Optical imaging device with image defect determination

Exposure apparatus and measuring device for a projection lens

System for measuring the image quality of an optical imaging system

Optical imaging device with image defect determination

Device and method for the optical measurement of an optical system...

System for measuring the image quality of an optical imaging system

Method for measuring an optical system

Optical scattering disk, use thereof, and wavefront measuring appar...

Optical imaging device with image defect determination

System for measuring the image quality of an optical imaging system

Exposure apparatus and measuring device for a projection lens

Optical scattering disk, use thereof, and wavefront measuring appar...

Optical apparatus and method for modifying the imaging behavior of...

Methods and apparatus for measuring wavefronts and for determining...

Device and method for the optical measurement of an optical system...

Device and method for the optical measurement of an optical system,...

Device and method for the interferometric measurement of phase masks

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Method of manufacturing a miniaturized device

Method of optimizing imaging performance

Method for improving the imaging properties of a projection objecti...

Optical measuring apparatus and operating method for imaging error...

Device and method for wavefront measurement of an optical imaging s...

Device and method for the optical measurement of an optical system...

Method and apparatus for determining telecentricity and microlithog...

Patents Applicationslast 30 patents

MEASURING METHOD AND MEASURING SYSTEM FOR INTERFEROMETRICALLY MEASU...

DEVICE AND METHOD FOR WAVEFRONT ANALYSIS

MEASURING METHOD AND MEASURING ARRANGEMENT FOR AN IMAGING OPTICAL S...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

METHOD FOR MEASURING AN OPTICAL SYSTEM

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

OPTICAL SCATTERING DISK, USE THEREOF, AND WAVEFRONT MEASURING APPAR...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

OPTICAL IMAGING DEVICE WITH IMAGE DEFECT DETERMINATION

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

OPTICAL APPARATUS AND METHOD FOR MODIFYING THE IMAGING BEHAVIOR OF...

Device and Method for the Optical Measurement of an Optical System,...

OPTICAL SCATTERING DISK, USE THEREOF, AND WAVEFRONT MEASURING APPAR...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

APPARATUS FOR POLARIZATION-SPECIFIC EXAMINATION, OPTICAL IMAGING SY...

System for Measuring the Image Quality of an Optical Imaging System

Methods and Apparatus For Measuring Wavefronts and For Determining...

Device and Method for the Interferometric Measurement of Phase Masks

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

APPARATUS FOR WAVEFRONT DETECTION

DEVICE AND METHOD FOR THE DETERMINATION OF IMAGING ERRORS AND MICRO...

Method For Structuring A Substrate Using Multiple Exposure