VEDAPURAM S. ACHUTHARAMAN

Person

SANTA CLARA, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 12,195,839
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,318
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,319
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,317
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Minimization of ring erosion during plasma processes
- Patent number 10,109,464
- Issue date Oct 23, 2018
- Applied Materials, Inc.
- Olivier Joubert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 9,797,037
- Issue date Oct 24, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 9,725,799
- Issue date Aug 8, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of thermally treating silicon with oxygen
- Patent number 8,497,193
- Issue date Jul 30, 2013
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Water cooled gas injector
- Patent number 8,409,353
- Issue date Apr 2, 2013
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast axis beam profile shaping for high power laser diode based ann...
- Patent number 8,288,683
- Issue date Oct 16, 2012
- Applied Materials, Inc.
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Real time process monitoring and control for semiconductor junctions
- Patent number 8,110,828
- Issue date Feb 7, 2012
- Solyndra LLC
- Vedapuram S. Achutharaman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Thermal oxidation of silicon using ozone
- Patent number 7,972,441
- Issue date Jul 5, 2011
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Real time process monitoring and control for semiconductor junctions
- Patent number 7,964,418
- Issue date Jun 21, 2011
- Solyndra LLC
- Vedapuram S. Achutharaman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Fast axis beam profile shaping by collimation lenslets for high pow...
- Patent number 7,674,999
- Issue date Mar 9, 2010
- Applied Materials, Inc.
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cylinder for thermal processing chamber
- Patent number 7,241,345
- Issue date Jul 10, 2007
- Applied Materials, Inc.
- Sundar Ramamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for planarization of a material by growing a s...
- Patent number 6,916,744
- Issue date Jul 12, 2005
- Applied Materials, Inc.
- Vedapuram S. Achutharaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally matched support ring for substrate processing chamber
- Patent number 6,888,104
- Issue date May 3, 2005
- Applied Materials, Inc.
- Joseph M. Ranish
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Integrated tungsten-silicide processes
- Patent number 6,284,650
- Issue date Sep 4, 2001
- Applied Materials, Inc.
- Cory M. Czarnik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improving film deposition uniformity on a...
- Patent number 6,022,587
- Issue date Feb 8, 2000
- Applied Materials, Inc.
- H. Peter W. Hey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming an epitaxial titanium silicide fil...
- Patent number 6,019,839
- Issue date Feb 1, 2000
- Applied Materials, Inc.
- Vedapuram S. Achutharaman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of forming doped silicon in high aspect ratio openings
- Patent number 5,863,598
- Issue date Jan 26, 1999
- Applied Materials, Inc.
- Mahalingam Venkatesan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20230167540
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINIMIZATION OF RING EROSION DURING PLASMA PROCESSES
- Publication number 20190043697
- Publication date Feb 7, 2019
- Applied Materials, Inc.
- Olivier JOUBERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20180105922
- Publication date Apr 19, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20180010235
- Publication date Jan 11, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20180010234
- Publication date Jan 11, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZATION OF RING EROSION DURING PLASMA PROCESSES
- Publication number 20170200588
- Publication date Jul 13, 2017
- Applied Materials, Inc.
- Olivier JOUBERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20160326625
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20150158775
- Publication date Jun 11, 2015
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Water cooled gas injector
- Publication number 20120031332
- Publication date Feb 9, 2012
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL TIME PROCESS MONITORING AND CONTROL FOR SEMICONDUCTOR JUNCTIONS
- Publication number 20110259391
- Publication date Oct 27, 2011
- Vedapuram S. Achutharaman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Method of thermally treating silicon with oxygen
- Publication number 20110250764
- Publication date Oct 13, 2011
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fast axis beam profile shaping for high power laser diode based ann...
- Publication number 20090152247
- Publication date Jun 18, 2009
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Fast axis beam profile shaping by collimation lenslets for high pow...
- Publication number 20080210671
- Publication date Sep 4, 2008
- APPLIED MAERIALS, INC.
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONTROLLED ANNEALING METHOD
- Publication number 20080090309
- Publication date Apr 17, 2008
- JOSEPH MICHAEL RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Real time process monitoring and control for semiconductor junctions
- Publication number 20080041439
- Publication date Feb 21, 2008
- Solyndra, Inc.
- Vedapuram S. Achutharaman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Method of Thermally Oxidizing Silicon Using Ozone
- Publication number 20070026693
- Publication date Feb 1, 2007
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing platform allowing processing in different ambi...
- Publication number 20060240680
- Publication date Oct 26, 2006
- APPLIED MATERIALS, INC.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal oxidation of silicon using ozone
- Publication number 20060223315
- Publication date Oct 5, 2006
- APPLIED MATERIALS, INC.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cylinder for thermal processing chamber
- Publication number 20040250772
- Publication date Dec 16, 2004
- Sundar Ramamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for planarization of a material by growing a s...
- Publication number 20040121598
- Publication date Jun 24, 2004
- APPLIED MATERIALS, INC.
- Vedapuram S. Achutharaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR IMPROVING FILM DEPOSITION UNIFORMITY ON A...
- Publication number 20020020358
- Publication date Feb 21, 2002
- H. PETER W. HEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

VEDAPURAM S. ACHUTHARAMAN

Person

Patents Grantslast 30 patents

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Minimization of ring erosion during plasma processes

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Method of thermally treating silicon with oxygen

Water cooled gas injector

Fast axis beam profile shaping for high power laser diode based ann...

Real time process monitoring and control for semiconductor junctions

Thermal oxidation of silicon using ozone

Real time process monitoring and control for semiconductor junctions

Fast axis beam profile shaping by collimation lenslets for high pow...

Cylinder for thermal processing chamber

Method and apparatus for planarization of a material by growing a s...

Thermally matched support ring for substrate processing chamber

Integrated tungsten-silicide processes

Method and apparatus for improving film deposition uniformity on a...

Method and apparatus for forming an epitaxial titanium silicide fil...

Method of forming doped silicon in high aspect ratio openings

Patents Applicationslast 30 patents

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

MINIMIZATION OF RING EROSION DURING PLASMA PROCESSES

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

MINIMIZATION OF RING EROSION DURING PLASMA PROCESSES

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

Water cooled gas injector

REAL TIME PROCESS MONITORING AND CONTROL FOR SEMICONDUCTOR JUNCTIONS

Method of thermally treating silicon with oxygen

Fast axis beam profile shaping for high power laser diode based ann...

Fast axis beam profile shaping by collimation lenslets for high pow...

CONTROLLED ANNEALING METHOD

Real time process monitoring and control for semiconductor junctions

Method of Thermally Oxidizing Silicon Using Ozone

Substrate processing platform allowing processing in different ambi...

Thermal oxidation of silicon using ozone

Cylinder for thermal processing chamber

Method and apparatus for planarization of a material by growing a s...

METHOD AND APPARATUS FOR IMPROVING FILM DEPOSITION UNIFORMITY ON A...