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Singapore, SG
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Patents Grants
last 30 patents
Information
Patent Grant
Copper metal structure for the reduction of intra-metal capacitance
Patent number
6,815,823
Issue date
Nov 9, 2004
Chartered Semiconductor Manufacturing Ltd.
Young-Way Teh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Linear polishing for improving substrate uniformity
Patent number
6,726,545
Issue date
Apr 27, 2004
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
B24 - GRINDING POLISHING
Information
Patent Grant
STI scheme to prevent fox recess during pre-CMP HF dip
Patent number
6,673,695
Issue date
Jan 6, 2004
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple step CMP polishing
Patent number
6,663,472
Issue date
Dec 16, 2003
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
B24 - GRINDING POLISHING
Information
Patent Grant
Copper metal structure for the reduction of intra-metal capacitance
Patent number
6,649,517
Issue date
Nov 18, 2003
Chartered Semiconductor Manufacturing Ltd.
Young-Way Teh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to fabricate dish-free copper interconnects
Patent number
6,531,386
Issue date
Mar 11, 2003
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Assorted aluminum wiring design to enhance chip-level performance f...
Patent number
6,472,697
Issue date
Oct 29, 2002
Chartered Semiconductor Manufacturing Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating an air gap shallow trench isolation (STI) st...
Patent number
6,406,975
Issue date
Jun 18, 2002
Chartered Semiconductor Manufacturing Inc.
Victor Seng Keong Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to achieve STI planarization
Patent number
6,403,484
Issue date
Jun 11, 2002
Chartered Semiconductor Manufacturing Ltd.
Victor Seng Keong Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Assorted aluminum wiring design to enhance chip-level performance f...
Patent number
6,399,471
Issue date
Jun 4, 2002
Chartered Semiconductor Manufacturing Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to prevent CU dishing during damascene formation
Patent number
6,376,376
Issue date
Apr 23, 2002
Chartered Semiconductor Manufacturing Ltd.
Victor Seng Keong Lim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Elevated bond-pad structure for high-density flip-clip packaging an...
Publication number
20060166402
Publication date
Jul 27, 2006
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Novel copper metal structure for the reduction of intra-metal capac...
Publication number
20040065956
Publication date
Apr 8, 2004
Chartered Semiconductor Manufacturing Ltd.
Young-Way Teh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Linear polishing for improving substrate uniformity
Publication number
20030203710
Publication date
Oct 30, 2003
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
B24 - GRINDING POLISHING
Information
Patent Application
Multiple step CMP polishing
Publication number
20030148712
Publication date
Aug 7, 2003
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
B24 - GRINDING POLISHING
Information
Patent Application
Extended poly buffer STI scheme
Publication number
20020094648
Publication date
Jul 18, 2002
Chartered Semiconductor Manufacturing Ltd.
Victor Seng Keong Lim
H01 - BASIC ELECTRIC ELEMENTS