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Helsinki, FI
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Patents Grants
last 30 patents
Information
Patent Grant
Method for depositing nanolaminate thin films on sensitive surfaces
Patent number
7,749,871
Issue date
Jul 6, 2010
ASM International N.V
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conformal lining layers for damascene metallization
Patent number
7,670,944
Issue date
Mar 2, 2010
ASM International N.V.
Ivo Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Production of elemental films using a boron-containing reducing agent
Patent number
7,485,340
Issue date
Feb 3, 2009
ASM International N.V
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing nanolaminate thin films on sensitive surfaces
Patent number
7,329,590
Issue date
Feb 12, 2008
ASM International N.V
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Production of elemental films using a boron-containing reducing agent
Patent number
7,144,809
Issue date
Dec 5, 2006
ASM International N.V.
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing nanolaminate thin films on sensitive surfaces
Patent number
6,902,763
Issue date
Jun 7, 2005
ASM International N.V.
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing transition metal nitride thin films
Patent number
6,863,727
Issue date
Mar 8, 2005
ASM International N.V
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for bottomless deposition of barrier layers in integrated ci...
Patent number
6,852,635
Issue date
Feb 8, 2005
Interuniversitair Nizroelecmica
Alessandra Satta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Production of elemental thin films using a boron-containing reducin...
Patent number
6,821,889
Issue date
Nov 23, 2004
ASM International N.V
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition reactor
Patent number
6,820,570
Issue date
Nov 23, 2004
Nobel Biocare Services AG
Olli Kilpela
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of transition metal carbides
Patent number
6,800,552
Issue date
Oct 5, 2004
ASM International, NV.
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for growing metal or metal carbide thin films utilizing bor...
Patent number
6,794,287
Issue date
Sep 21, 2004
ASM International N.V.
Ville Antero Saanila
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of making conformal lining layers for damascene metallization
Patent number
6,727,169
Issue date
Apr 27, 2004
ASM International, N.V.
Ivo Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for bottomless deposition of barrier layers in integrated ci...
Patent number
6,664,192
Issue date
Dec 16, 2003
Interuniversitair Microelektronica Centrum (IMEC)
Alessandra Satta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for growing metalloid thin films utilizing boron-containing...
Patent number
6,599,572
Issue date
Jul 29, 2003
ASM Microchemistry OY
Ville Antero Saanila
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of transition metal carbides
Patent number
6,482,262
Issue date
Nov 19, 2002
ASM Microchemistry OY
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Production of elemental thin films using a boron-containing reducin...
Patent number
6,475,276
Issue date
Nov 5, 2002
ASM Microchemistry OY
Kai-Erik Elers
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for bottomless deposition of barrier layers in integrated ci...
Patent number
6,391,785
Issue date
May 21, 2002
Interuniversitair Microelektronica Centrum (IMEC)
Alessandra Satta
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
Production of elemental films using a boron-containing reducing agent
Publication number
20070190248
Publication date
Aug 16, 2007
Kai-Erik Elers
C30 - CRYSTAL GROWTH
Information
Patent Application
Conformal lining layers for damascene metallization
Publication number
20070096321
Publication date
May 3, 2007
Ivo Raaijmakers
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for depositing nanolaminate thin films on sensitive surfaces
Publication number
20060079090
Publication date
Apr 13, 2006
Kai-Erik Elers
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for depositing nanolaminate thin films on sensitive surfaces
Publication number
20050106877
Publication date
May 19, 2005
Kai-Erik Elers
C30 - CRYSTAL GROWTH
Information
Patent Application
Atomic layer deposition reactor
Publication number
20050092249
Publication date
May 5, 2005
Olli Kilpela
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Production of elemental films using a boron-containing reducing agent
Publication number
20050064098
Publication date
Mar 24, 2005
Kai-Erik Elers
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for bottomless deposition of barrier layers in integrated ci...
Publication number
20040121616
Publication date
Jun 24, 2004
Alessandra Satta
C30 - CRYSTAL GROWTH
Information
Patent Application
Process for growing metal or metal carbide thin films utilizing bor...
Publication number
20030186495
Publication date
Oct 2, 2003
Ville Antero Saanila
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Atomic layer deposition reactor
Publication number
20030075273
Publication date
Apr 24, 2003
Olli Kilpela
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition of transition metal carbides
Publication number
20030031807
Publication date
Feb 13, 2003
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of producing elemental thin films
Publication number
20020187256
Publication date
Dec 12, 2002
Kai-Erik Elers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for bottomless deposition of barrier layers in integrated ci...
Publication number
20020155722
Publication date
Oct 24, 2002
Alessandra Satta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process for growing metalloid thin films
Publication number
20010009695
Publication date
Jul 26, 2001
Ville Antero Saanila
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...