Vlasta Brusic Kaufman

Person

Geneva, IL, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing slurry useful for copper substrates
- Patent number 7,381,648
- Issue date Jun 3, 2008
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing systems and methods for their use
- Patent number 7,354,530
- Issue date Apr 8, 2008
- Shumin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of polishing a multi-layer substrate
- Patent number 6,867,140
- Issue date Mar 15, 2005
- Cabot Microelectronics Corporation
- Shumin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing system with stopping compound and method of its use
- Patent number 6,855,266
- Issue date Feb 15, 2005
- Cabot Microelectronics Corporation
- Shumin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of polishing a multi-layer substrate
- Patent number 6,852,632
- Issue date Feb 8, 2005
- Cabot Microelectronics Corporation
- Shumin Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical mechanical polishing systems and methods for their use
- Patent number 6,840,971
- Issue date Jan 11, 2005
- Cabot Microelectronics Corporation
- Shumin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper substrates
- Patent number 6,620,037
- Issue date Sep 16, 2003
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing method useful for copper substrates
- Patent number 6,593,239
- Issue date Jul 15, 2003
- Cabot Microelectronics Corp.
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper substrates
- Patent number 6,569,350
- Issue date May 27, 2003
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper substrates
- Patent number 6,432,828
- Issue date Aug 13, 2002
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical mechanical polishing method useful for copper substrates
- Patent number 6,362,106
- Issue date Mar 26, 2002
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of polishing using multi-oxidizer slurry
- Patent number 6,316,366
- Issue date Nov 13, 2001
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper substrates
- Patent number 6,309,560
- Issue date Oct 30, 2001
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper/tantalum sub...
- Patent number 6,217,416
- Issue date Apr 17, 2001
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper substrates
- Patent number 6,126,853
- Issue date Oct 3, 2000
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper/tantalum sub...
- Patent number 6,063,306
- Issue date May 16, 2000
- Cabot Corporation
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Multi-oxidizer precursor for chemical mechanical polishing
- Patent number 6,039,891
- Issue date Mar 21, 2000
- Cabot Corporation
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Multi-oxidizer slurry for chemical mechanical polishing
- Patent number 6,033,596
- Issue date Mar 7, 2000
- Cabot Corporation
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical mechanical polishing slurry useful for copper substrates
- Patent number 5,954,997
- Issue date Sep 21, 1999
- Cabot Corporation
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry for metal layers and films
- Patent number 5,858,813
- Issue date Jan 12, 1999
- Cabot Corporation
- Debra L. Scherber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-oxidizer slurry for chemical mechanical polishing
- Patent number 5,783,489
- Issue date Jul 21, 1998
- Cabot Corporation
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
Chemical mechanical polishing systems and methods for their use
- Publication number 20050148187
- Publication date Jul 7, 2005
- Cabot Microelectronics Corporation
- Shumin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical mechanical polishing slurry useful for copper substrates
- Publication number 20040009671
- Publication date Jan 15, 2004
- Cabot Microelectronics Corporation
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical mechanical polishing systems and methods for their use
- Publication number 20030166337
- Publication date Sep 4, 2003
- Cabot Microelectronics, Corp.
- Shumin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of polishing a multi-layer substrate
- Publication number 20030153184
- Publication date Aug 14, 2003
- Cabot Microelectronics Corporation
- Shumin Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical mechanical polishing slurry useful for copper substrates
- Publication number 20020168923
- Publication date Nov 14, 2002
- Cabot Microelectronics Corp.
- Vlasta Brusic Kaufman
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical mechanical polishing slurry useful for copper substrates
- Publication number 20020145127
- Publication date Oct 10, 2002
- Cabot Microelectronics Corp.
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD USEFUL FOR COPPER SUBSTRATES
- Publication number 20020033382
- Publication date Mar 21, 2002
- VLASTA BRUSIC KAUFMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
- Publication number 20010049910
- Publication date Dec 13, 2001
- VLASTA BRUSIC KAUFMAN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical mechanical polishing slurry useful for copper/tantalum sub...
- Publication number 20010041507
- Publication date Nov 15, 2001
- Vlasta Brusic Kaufman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vlasta Brusic Kaufman

Person

Patents Grantslast 30 patents

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing systems and methods for their use

Method of polishing a multi-layer substrate

Polishing system with stopping compound and method of its use

Method of polishing a multi-layer substrate

Chemical mechanical polishing systems and methods for their use

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing method useful for copper substrates

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing method useful for copper substrates

Method of polishing using multi-oxidizer slurry

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing slurry useful for copper/tantalum sub...

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing slurry useful for copper/tantalum sub...

Multi-oxidizer precursor for chemical mechanical polishing

Multi-oxidizer slurry for chemical mechanical polishing

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing slurry for metal layers and films

Multi-oxidizer slurry for chemical mechanical polishing

Patents Applicationslast 30 patents

Chemical mechanical polishing systems and methods for their use

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing systems and methods for their use

Method of polishing a multi-layer substrate

Chemical mechanical polishing slurry useful for copper substrates

Chemical mechanical polishing slurry useful for copper substrates

CHEMICAL MECHANICAL POLISHING METHOD USEFUL FOR COPPER SUBSTRATES

CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES

Chemical mechanical polishing slurry useful for copper/tantalum sub...