Walter Dale Gillespie

Person

Poway, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas management system
- Patent number 11,949,202
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas management system
- Patent number 11,949,203
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for extending electrode life in a laser cha...
- Patent number 11,777,271
- Issue date Oct 3, 2023
- Cymer, LLC
- Thomas Patrick Duffey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nonwoven screens for dust trapping in laser discharge chambers
- Patent number 11,614,012
- Issue date Mar 28, 2023
- Cymer, LLC
- Ulrich Niemann
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Erosion resistant electrodes for use in generating gas discharge laser
- Patent number 10,074,953
- Issue date Sep 11, 2018
- Cymer, LLC
- Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pulse repetition rate gas discharge laser
- Patent number 9,620,920
- Issue date Apr 11, 2017
- Cymer, LLC
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
6 KHz and above gas discharge laser system
- Patent number 8,855,166
- Issue date Oct 7, 2014
- Cymer, LLC
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing module
- Patent number 7,653,112
- Issue date Jan 26, 2010
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pulse repetition rate gas discharge laser
- Patent number 7,633,989
- Issue date Dec 15, 2009
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathodes for fluorine gas discharge lasers
- Patent number 7,535,948
- Issue date May 19, 2009
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge laser chamber improvements
- Patent number 7,522,650
- Issue date Apr 21, 2009
- Cymer, Inc.
- William N. Partlo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing module
- Patent number 7,366,219
- Issue date Apr 29, 2008
- Cymer, Inc.
- J. Martin Algots
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen gas discharge laser electrodes
- Patent number 7,301,980
- Issue date Nov 27, 2007
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anodes for fluorine gas discharge lasers
- Patent number 7,230,965
- Issue date Jun 12, 2007
- Cymer, Inc.
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High rep-rate laser with improved electrodes
- Patent number 7,132,123
- Issue date Nov 7, 2006
- Cymer, Inc.
- Richard G. Morton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High rep-rate laser with improved electrodes
- Patent number 6,937,635
- Issue date Aug 30, 2005
- Cymer, Inc.
- Richard G. Morton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power deep ultraviolet laser with long life optics
- Patent number 6,904,073
- Issue date Jun 7, 2005
- Cymer, Inc.
- Thomas A. Yager
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...
- Publication number 20230017337
- Publication date Jan 19, 2023
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHAR...
- Publication number 20230008480
- Publication date Jan 12, 2023
- CYMER, LLC
- Ulrich Niemann
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
APPARATUS FOR AND METHOD OF GENERATING MULTIPLE LASER BEAMS
- Publication number 20220255288
- Publication date Aug 11, 2022
- CYMER, LLC
- Walter Dale Gillespie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS
- Publication number 20220255286
- Publication date Aug 11, 2022
- CYMER, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE
- Publication number 20210194202
- Publication date Jun 24, 2021
- CYMER, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF AND APPARATUS FOR EXTENDING ELECTRODE LIFE IN A LASER CHA...
- Publication number 20210111529
- Publication date Apr 15, 2021
- CYMER, LLC
- Thomas Patrick Duffey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MANAGEMENT SYSTEM
- Publication number 20200358241
- Publication date Nov 12, 2020
- Yzzer Roman Gutierrez
- G01 - MEASURING TESTING
Information Patent Application
GAS MANAGEMENT SYSTEM
- Publication number 20200358240
- Publication date Nov 12, 2020
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NONWOVEN SCREENS FOR DUST TRAPPING IN LASER DISCHARGE CHAMBERS
- Publication number 20200332689
- Publication date Oct 22, 2020
- CYMER, LLC
- Ulrich Niemann
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EROSION RESISTANT ELECTRODES FOR USE IN GENERATING GAS DISCHARGE LASER
- Publication number 20170093112
- Publication date Mar 30, 2017
- Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM
- Publication number 20120120974
- Publication date May 17, 2012
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Line narrowing module
- Publication number 20100097704
- Publication date Apr 22, 2010
- Cymer, Inc.
- J. Martin Algots
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High pulse repetition rate gas discharge laser
- Publication number 20100054295
- Publication date Mar 4, 2010
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Line narrowing module
- Publication number 20080151944
- Publication date Jun 26, 2008
- Cymer, Inc.
- J. Martin Algots
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Anodes for fluorine gas discharge lasers
- Publication number 20080002752
- Publication date Jan 3, 2008
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High pulse repetition rate gas discharge laser
- Publication number 20060291517
- Publication date Dec 28, 2006
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cathodes for fluorine gas discharge lasers
- Publication number 20060274809
- Publication date Dec 7, 2006
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid electrode support bar
- Publication number 20060233214
- Publication date Oct 19, 2006
- Cymer, Inc.
- Walter D. Gillespie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
6 Khz and above gas discharge laser system
- Publication number 20060222034
- Publication date Oct 5, 2006
- Cymer, Inc.
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Line narrowing module
- Publication number 20060114957
- Publication date Jun 1, 2006
- J. Martin Algots
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas discharge laser chamber improvements
- Publication number 20050226301
- Publication date Oct 13, 2005
- William N. Partlo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Halogen gas discharge laser electrodes
- Publication number 20050047471
- Publication date Mar 3, 2005
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Anodes for fluorine gas discharge lasers
- Publication number 20040071178
- Publication date Apr 15, 2004
- Timothy S. Dyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cathodes for fluorine gas discharge lasers
- Publication number 20040066827
- Publication date Apr 8, 2004
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High rep-rate laser with improved electrodes
- Publication number 20040037338
- Publication date Feb 26, 2004
- Richard G. Morton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High rep-rate laser with improved electrodes
- Publication number 20040022292
- Publication date Feb 5, 2004
- Richard G. Morton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High power deep ultraviolet laser with long life optics
- Publication number 20030219056
- Publication date Nov 27, 2003
- Thomas A. Yager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Walter Dale Gillespie

Person

Patents Grantslast 30 patents

Gas management system

Gas management system

Method of and apparatus for extending electrode life in a laser cha...

Nonwoven screens for dust trapping in laser discharge chambers

Erosion resistant electrodes for use in generating gas discharge laser

High pulse repetition rate gas discharge laser

6 KHz and above gas discharge laser system

Line narrowing module

High pulse repetition rate gas discharge laser

Cathodes for fluorine gas discharge lasers

Gas discharge laser chamber improvements

Line narrowing module

Halogen gas discharge laser electrodes

Anodes for fluorine gas discharge lasers

High rep-rate laser with improved electrodes

High rep-rate laser with improved electrodes

High power deep ultraviolet laser with long life optics

Patents Applicationslast 30 patents

DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...

PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHAR...

APPARATUS FOR AND METHOD OF GENERATING MULTIPLE LASER BEAMS

CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS

METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE

METHOD OF AND APPARATUS FOR EXTENDING ELECTRODE LIFE IN A LASER CHA...

GAS MANAGEMENT SYSTEM

GAS MANAGEMENT SYSTEM

NONWOVEN SCREENS FOR DUST TRAPPING IN LASER DISCHARGE CHAMBERS

EROSION RESISTANT ELECTRODES FOR USE IN GENERATING GAS DISCHARGE LASER

6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM

Line narrowing module

High pulse repetition rate gas discharge laser

Line narrowing module

Anodes for fluorine gas discharge lasers

High pulse repetition rate gas discharge laser

Cathodes for fluorine gas discharge lasers

Hybrid electrode support bar

6 Khz and above gas discharge laser system

Line narrowing module

Gas discharge laser chamber improvements

Halogen gas discharge laser electrodes

Anodes for fluorine gas discharge lasers

Cathodes for fluorine gas discharge lasers

High rep-rate laser with improved electrodes

High rep-rate laser with improved electrodes

High power deep ultraviolet laser with long life optics