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William A. Muth
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Lagrangeville, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Alignment method for semiconductor processing
Patent number
8,514,374
Issue date
Aug 20, 2013
International Business Machines Corporation
Todd C. Bailey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Predicting wafer failure using learned probability
Patent number
7,962,302
Issue date
Jun 14, 2011
International Business Machines Corporation
Robert Jeffrey Baseman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for normalizing error in photolithographic processes
Patent number
7,957,826
Issue date
Jun 7, 2011
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method to control semiconductor device overlay using post etch imag...
Patent number
7,879,515
Issue date
Feb 1, 2011
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining semiconductor overlay on groundrule devices
Patent number
6,975,398
Issue date
Dec 13, 2005
International Business Machines Corporation
Christopher P. Ausschnitt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Combined layer-to-layer and within-layer overlay control system
Patent number
6,638,671
Issue date
Oct 28, 2003
International Business Machines Corporation
Christopher P. Ausschnitt
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method of measuring bias and edge overlay error for sub-0.5 micron...
Patent number
5,757,507
Issue date
May 26, 1998
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Edge overlay measurement target for sub-0.5 micron ground rules
Patent number
5,712,707
Issue date
Jan 27, 1998
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ALIGNMENT METHOD FOR SEMICONDUCTOR PROCESSING
Publication number
20110102760
Publication date
May 5, 2011
International Business Machines Corporation
Todd C. Bailey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Predicting Wafer Failure Using Learned Probability
Publication number
20100145646
Publication date
Jun 10, 2010
Robert Jeffrey Baseman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method To Control Semiconductor Device Overlay Using Post Etch Imag...
Publication number
20090186286
Publication date
Jul 23, 2009
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND SYSTEMS FOR NORMALIZING ERROR
Publication number
20090053627
Publication date
Feb 26, 2009
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Combined layer-to-layer and within-layer overlay control system
Publication number
20030077527
Publication date
Apr 24, 2003
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for determining semiconductor overlay on groundrule devices
Publication number
20030071997
Publication date
Apr 17, 2003
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY