Number | Name | Date | Kind |
---|---|---|---|
4529314 | Ports | Jul 1985 | |
4568189 | Bass et al. | Feb 1986 | |
4820055 | Muller | Apr 1989 | |
5216257 | Brueck et al. | Jun 1993 | |
5262258 | Yanagisawa | Nov 1993 | |
5402224 | Hirukawa et al. | Mar 1995 |
Entry |
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Ausschnitt, "Electrical Measurements for Characterizing Lithograph," VLSI Electronics, Microstructure Science, vol. 16, Chapter 8, pp. 320-356, 1987. |