William JOHANSON

Person

Gilroy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for reducing tungsten resistivity
- Patent number 11,655,534
- Issue date May 23, 2023
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for reducing tungsten resistivity
- Patent number 11,447,857
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for in-situ cleaning of electrostatic chucks
- Patent number 11,361,982
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for enhancing flow uniformity in a process chamber
- Patent number 11,270,898
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for substrate edge uniformity
- Patent number 11,056,325
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Thanh X. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Biased cover ring for a substrate processing system
- Patent number 11,049,701
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Adolph Miller Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron having enhanced target cooling configuration
- Patent number 11,024,490
- Issue date Jun 1, 2021
- Applied Materials, Inc.
- Vanessa Faune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D902165
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- William R. Johanson
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D894137
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- William Johanson
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Process kit having a floating shadow ring
- Patent number 10,648,071
- Issue date May 12, 2020
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D877101
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- William R. Johanson
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D851613
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- William Johanson
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods and apparatus for maintaining low non-uniformity over targe...
- Patent number 10,283,334
- Issue date May 7, 2019
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
One-piece process kit shield for reducing the impact of an electric...
- Patent number 10,103,012
- Issue date Oct 16, 2018
- Applied Materials, Inc.
- William Johanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D825504
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Fuhong Zhang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Magnetron assembly for physical vapor deposition chamber
- Patent number 9,991,101
- Issue date Jun 5, 2018
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated process kit for a substrate processing chamber
- Patent number 9,953,812
- Issue date Apr 24, 2018
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit having tall deposition ring and deposition ring clamp
- Patent number 9,909,206
- Issue date Mar 6, 2018
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target profile for a physical vapor deposition chamber target
- Patent number D797067
- Issue date Sep 12, 2017
- Applied Materials, Inc.
- Fuhong Zhang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Selectively groundable cover ring for substrate process chambers
- Patent number 9,472,443
- Issue date Oct 18, 2016
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for processing a substrate using multiple substrate support...
- Patent number 9,315,891
- Issue date Apr 19, 2016
- Applied Materials, Inc.
- Joung Joo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual seal deposition process chamber and process
- Patent number 7,737,035
- Issue date Jun 15, 2010
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH TEMPERATURE DETACHABLE VERY HIGH FREQUENCY (VHF) ELECTROSTATIC...
- Publication number 20230162954
- Publication date May 25, 2023
- William R. JOHANSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR IMPROVED HIGH PRESSURE PLASMA PROCESSING
- Publication number 20220359171
- Publication date Nov 10, 2022
- William R. JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220341025
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Wenting HOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220081756
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Wenting HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR IN-SITU CLEANING OF ELECTROSTATIC CHUCKS
- Publication number 20210175107
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- KIRANKUMAR NEELASANDRA SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELD KIT FOR PROCESS CHAMBER
- Publication number 20200321202
- Publication date Oct 8, 2020
- Applied Materials, Inc.
- William R. JOHANSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET ASSEMBLY SHIELD
- Publication number 20200303172
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- William R. Johanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ENHANCING FLOW UNIFORMITY IN A PROCESS CHAMBER
- Publication number 20200090957
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...
- Publication number 20190259586
- Publication date Aug 22, 2019
- Applied Materials, Inc.
- WILLIAM JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY
- Publication number 20190189407
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- THANH X. NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON HAVING ENHANCED TARGET COOLING CONFIGURATION
- Publication number 20190180992
- Publication date Jun 13, 2019
- Applied Materials, Inc.
- VANESSA FAUNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIASED COVER RING FOR A SUBSTRATE PROCESSING SYSTEM
- Publication number 20180151325
- Publication date May 31, 2018
- ADOLPH MILLER ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT HAVING A FLOATING SHADOW RING
- Publication number 20180142340
- Publication date May 24, 2018
- WILLIAM JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED PROCESS KIT FOR A SUBSTRATE PROCESSING CHAMBER
- Publication number 20170098530
- Publication date Apr 6, 2017
- Applied Materials, Inc.
- William JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ONE-PIECE PROCESS KIT SHIELD FOR REDUCING THE IMPACT OF AN ELECTRIC...
- Publication number 20170076924
- Publication date Mar 16, 2017
- Applied Materials, Inc.
- William JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT HAVING TALL DEPOSITION RING AND DEPOSITION RING CLAMP
- Publication number 20170002461
- Publication date Jan 5, 2017
- Applied Materials, Inc.
- William JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...
- Publication number 20160056024
- Publication date Feb 25, 2016
- Applied Materials, Inc.
- WILLIAM JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON ASSEMBLY FOR PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20160035547
- Publication date Feb 4, 2016
- Applied Materials, Inc.
- WILLIAM JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVELY GROUNDABLE COVER RING FOR SUBSTRATE PROCESS CHAMBERS
- Publication number 20140262763
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- MUHAMMAD M. RASHEED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PROCESSING A SUBSTRATE USING MULTIPLE SUBSTRATE SUPPORT...
- Publication number 20140263169
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- JOUNG JOO LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for delivering uniform fluid flow in a chemica...
- Publication number 20080081114
- Publication date Apr 3, 2008
- Novellus Systems, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

William JOHANSON

Person

Patents Grantslast 30 patents

Apparatus for reducing tungsten resistivity

Methods and apparatus for reducing tungsten resistivity

Methods and apparatus for in-situ cleaning of electrostatic chucks

Apparatus for enhancing flow uniformity in a process chamber

Methods and apparatus for substrate edge uniformity

Biased cover ring for a substrate processing system

Magnetron having enhanced target cooling configuration

Target profile for a physical vapor deposition chamber target

Target profile for a physical vapor deposition chamber target

Process kit having a floating shadow ring

Target profile for a physical vapor deposition chamber target

Target profile for a physical vapor deposition chamber target

Methods and apparatus for maintaining low non-uniformity over targe...

One-piece process kit shield for reducing the impact of an electric...

Target profile for a physical vapor deposition chamber target

Magnetron assembly for physical vapor deposition chamber

Integrated process kit for a substrate processing chamber

Process kit having tall deposition ring and deposition ring clamp

Target profile for a physical vapor deposition chamber target

Selectively groundable cover ring for substrate process chambers

Methods for processing a substrate using multiple substrate support...

Dual seal deposition process chamber and process

Patents Applicationslast 30 patents

HIGH TEMPERATURE DETACHABLE VERY HIGH FREQUENCY (VHF) ELECTROSTATIC...

APPARATUS FOR IMPROVED HIGH PRESSURE PLASMA PROCESSING

APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

METHODS AND APPARATUS FOR IN-SITU CLEANING OF ELECTROSTATIC CHUCKS

SHIELD KIT FOR PROCESS CHAMBER

TARGET ASSEMBLY SHIELD

APPARATUS FOR ENHANCING FLOW UNIFORMITY IN A PROCESS CHAMBER

METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...

METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY

MAGNETRON HAVING ENHANCED TARGET COOLING CONFIGURATION

BIASED COVER RING FOR A SUBSTRATE PROCESSING SYSTEM

PROCESS KIT HAVING A FLOATING SHADOW RING

INTEGRATED PROCESS KIT FOR A SUBSTRATE PROCESSING CHAMBER

ONE-PIECE PROCESS KIT SHIELD FOR REDUCING THE IMPACT OF AN ELECTRIC...

PROCESS KIT HAVING TALL DEPOSITION RING AND DEPOSITION RING CLAMP

METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...

MAGNETRON ASSEMBLY FOR PHYSICAL VAPOR DEPOSITION CHAMBER

SELECTIVELY GROUNDABLE COVER RING FOR SUBSTRATE PROCESS CHAMBERS

METHODS FOR PROCESSING A SUBSTRATE USING MULTIPLE SUBSTRATE SUPPORT...

Apparatus and method for delivering uniform fluid flow in a chemica...