William Oldham

Follow

Person

Orinda, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Material supply apparatus for extreme ultraviolet light source havi...
- Patent number 9,669,334
- Issue date Jun 6, 2017
- ASML Netherlands B.V.
- Igor V. Fomenkov
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Filter for material supply apparatus of an extreme ultraviolet ligh...
- Patent number 9,029,813
- Issue date May 12, 2015
- ASML Netherlands B.V.
- Igor V. Fomenkov
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
EUV collector debris management
- Patent number 8,075,732
- Issue date Dec 13, 2011
- Cymer, Inc.
- William N. Partlo
- B08 - CLEANING
Information Patent Grant
EUV light source collector erosion mitigation
- Patent number 7,141,806
- Issue date Nov 28, 2006
- Cymer, Inc.
- William N. Partlo
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Double hidden flexure microactuator for phase mirror array
- Patent number 7,075,699
- Issue date Jul 11, 2006
- The Regents of the University of California
- William G. Oldham
- G02 - OPTICS
Information Patent Grant
Method and means for reducing speckle in coherent laser pulses
- Patent number 5,233,460
- Issue date Aug 3, 1993
- Regents of the University of California
- William N. Partlo
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
FILTER FOR MATERIAL SUPPLY APPARATUS OF AN EXTREME ULTRAVIOLET LIGH...
- Publication number 20150209701
- Publication date Jul 30, 2015
- ASML NETHERLANDS B.V.
- Igor V. Fomenkov
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Filter for Material Supply Apparatus
- Publication number 20120292527
- Publication date Nov 22, 2012
- Cymer, Inc.
- Igor V. Fomenkov
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EUV collector debris management
- Publication number 20060091109
- Publication date May 4, 2006
- William N. Partlo
- B08 - CLEANING
Information Patent Application
Double hidden flexure microactuator for phase mirror array
- Publication number 20050111119
- Publication date May 26, 2005
- The Regents of the University of California.
- William G. Oldham
- G02 - OPTICS