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MEMS valve
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Patent number 6,612,535
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Issue date Sep 2, 2003
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California Institute of Technology
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Yu-Chong Tai
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Microbellows actuator
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Patent number 6,146,543
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Issue date Nov 14, 2000
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California Institute of Technology
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Yu-Chong Tai
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Microbellows actuator
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Patent number 6,069,392
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Issue date May 30, 2000
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California Institute of Technology
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Yu-Chong Tai
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Microfluidic sub-millisecond mixers
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Patent number 5,921,678
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Issue date Jul 13, 1999
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California Institute of Technology
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Amish Desai
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL