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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-zone shower head for drying single semiconductor substrate
Patent number
7,228,645
Issue date
Jun 12, 2007
Xuyen Ngoc Pham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holding and spinning assembly and methods for making the...
Patent number
7,226,055
Issue date
Jun 5, 2007
Lam Research Corporation
Gregory R. Bettencourt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for point of use delivery, control and mixing che...
Patent number
7,054,719
Issue date
May 30, 2006
Lam Research Corporation
Xuyen Pham
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus and method for distributing a polishing fluid
Patent number
7,040,970
Issue date
May 9, 2006
Lam Research Corporation
Simon McClatchie
B24 - GRINDING POLISHING
Information
Patent Grant
Methods of and apparatus for controlling polishing surface characte...
Patent number
7,040,954
Issue date
May 9, 2006
Lam Research Corporation
Simon McClatchie
B24 - GRINDING POLISHING
Information
Patent Grant
Air platen for leading edge and trailing edge control
Patent number
7,018,276
Issue date
Mar 28, 2006
Lam Research Corporation
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and systems for controlling belt surface temperature and sl...
Patent number
6,953,750
Issue date
Oct 11, 2005
Lam Research Corporation
Patrick P. H. Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Gimballed conditioning apparatus
Patent number
6,949,016
Issue date
Sep 27, 2005
Lam Research Corporation
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Grant
Porous material air bearing platen for chemical mechanical planariz...
Patent number
6,939,212
Issue date
Sep 6, 2005
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for heating polishing pad
Patent number
6,896,586
Issue date
May 24, 2005
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Liquid dispense manifold for chemical-mechanical polisher
Patent number
6,896,600
Issue date
May 24, 2005
Lam Research Corporation
Patrick P. H. Wu
B24 - GRINDING POLISHING
Information
Patent Grant
System, method and apparatus for applying liquid to a CMP polishing...
Patent number
6,872,128
Issue date
Mar 29, 2005
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad and method of manufacture
Patent number
6,869,339
Issue date
Mar 22, 2005
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier head having location optimized vacuum holes
Patent number
6,821,195
Issue date
Nov 23, 2004
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Molded end point detection window for chemical mechanical planariza...
Patent number
6,806,100
Issue date
Oct 19, 2004
Lam Research Corporation
Cangshan Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Air platen for leading edge and trailing edge control
Patent number
6,761,626
Issue date
Jul 13, 2004
Lam Research Corporation
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head assembly
Patent number
6,755,723
Issue date
Jun 29, 2004
Lam Research Corporation
Xuyen N. Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head assembly in an apparatus for chemical mechanical pla...
Patent number
6,746,313
Issue date
Jun 8, 2004
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for point of use delivery, control and mixing che...
Patent number
6,732,017
Issue date
May 4, 2004
LAM Research Corp.
Xuyen Pham
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for applying downward force on wafer during CMP
Patent number
6,712,670
Issue date
Mar 30, 2004
Lam Research Corporation
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad and method of manufacture
Patent number
6,569,004
Issue date
May 27, 2003
Lam Research
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Interlocking chemical mechanical polishing system
Patent number
6,475,332
Issue date
Nov 5, 2002
Lam Research Corporation
John Boyd
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and substrate retainer ring providing continuou...
Patent number
6,447,380
Issue date
Sep 10, 2002
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Robot blade for handling of semiconductor substrates
Patent number
6,199,927
Issue date
Mar 13, 2001
Applied Materials, Inc.
Behzad Shamlou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Robot blade for handling of semiconductor substrate
Patent number
6,024,393
Issue date
Feb 15, 2000
Applied Materials, Inc.
Behzad Shamlou
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Systems and methods for clamping semiconductor wafers
Publication number
20070256632
Publication date
Nov 8, 2007
Xuyen Pham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi zone shower head for cleaning and drying wafer and method of...
Publication number
20070246079
Publication date
Oct 25, 2007
Xuyen Pham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-zone shower head for drying single semiconductor substrate
Publication number
20070084079
Publication date
Apr 19, 2007
Xuyen Pham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for distributing a polishing fluid
Publication number
20060014478
Publication date
Jan 19, 2006
Simon McClatchie
B24 - GRINDING POLISHING
Information
Patent Application
SYSTEM, METHOD AND APPARATUS FOR APPLYING LIQUID TO A CMP POLISHING...
Publication number
20050070212
Publication date
Mar 31, 2005
LAM RESEARCH CORPORATION
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Application
Air platen for leading edge and trailing edge control
Publication number
20040242136
Publication date
Dec 2, 2004
Lam Research Corporation
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Application
System and method for point of use delivery, control and mixing che...
Publication number
20040199293
Publication date
Oct 7, 2004
LAM RESEARCH CORPORATION
Xuyen Pham
G05 - CONTROLLING REGULATING
Information
Patent Application
Chemical mechanical polishing atomizing rinse system
Publication number
20040162007
Publication date
Aug 19, 2004
Ky Phan
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for applying downward force on wafer during CMP
Publication number
20040161939
Publication date
Aug 19, 2004
Lam Research Corporation
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad and method of manufacture
Publication number
20040018805
Publication date
Jan 29, 2004
XUYEN PHAM
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Method and apparatus for heating polishing pad
Publication number
20030186623
Publication date
Oct 2, 2003
Lam Research Corp.
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Application
System and method for point of use delivery, control and mixing che...
Publication number
20030158630
Publication date
Aug 21, 2003
LAM RESEARCH CORPORATION
Xuyen Pham
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and apparatus for applying downward force on wafer during CMP
Publication number
20030139115
Publication date
Jul 24, 2003
LAM RESEARCH CORPORATION
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Application
Air platen for leading edge and trailing edge control
Publication number
20030119433
Publication date
Jun 26, 2003
Anthony de la Llera
B24 - GRINDING POLISHING
Information
Patent Application
INTERLOCKING CHEMICAL MECHANICAL POLISHING SYSTEM
Publication number
20020185467
Publication date
Dec 12, 2002
Lam Research Corporation
John Boyd
B24 - GRINDING POLISHING
Information
Patent Application
FLEXIBLE POLISHING PAD HAVING REDUCED SURFACE STRESS
Publication number
20020077053
Publication date
Jun 20, 2002
XUYEN PHAM
B24 - GRINDING POLISHING